Shuuichi Nishikido

Person

Kumamoto-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate cleaning method, processing container cleaning method, an...
- Patent number 11,865,590
- Issue date Jan 9, 2024
- Tokyo Electron Limited
- Kyoko Ikeda
- B08 - CLEANING
Information Patent Grant
Substrate cleaning method, processing container cleaning method, an...
- Patent number 11,504,751
- Issue date Nov 22, 2022
- Tokyo Electron Limited
- Kyoko Ikeda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, substrate processing method and rec...
- Patent number 11,084,072
- Issue date Aug 10, 2021
- Tokyo Electron Limited
- Shogo Fukui
- B08 - CLEANING
Information Patent Grant
Substrate cleaning method
- Patent number 9,716,002
- Issue date Jul 25, 2017
- Tokyo Electron Limited
- Yasushi Takiguchi
- B08 - CLEANING
Information Patent Grant
Substrate cleaning apparatus, substrate cleaning method, and comput...
- Patent number 8,578,953
- Issue date Nov 12, 2013
- Tokyo Electron Limited
- Yasushi Takiguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Developing treatment apparatus and developing treatment method
- Patent number 7,766,566
- Issue date Aug 3, 2010
- Tokyo Electron Limited
- Takahiro Kitano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wet processing device and wet processing method
- Patent number 7,431,038
- Issue date Oct 7, 2008
- Tokyo Electron Limited
- Shuuichi Nishikido
- B08 - CLEANING
Information Patent Grant
Developing treatment apparatus
- Patent number 7,419,316
- Issue date Sep 2, 2008
- Tokyo Electron Limited
- Tetsuya Kitamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing device, substrate processing method, and devel...
- Patent number 7,387,455
- Issue date Jun 17, 2008
- Tokyo Electron Limited
- Tetsutoshi Awamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coating apparatus
- Patent number 6,551,400
- Issue date Apr 22, 2003
- Tokyo Electron Limited
- Keizo Hasbe
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Film forming method and film forming apparatus
- Patent number 6,503,003
- Issue date Jan 7, 2003
- Tokyo Electron Limited
- Keizo Hasebe
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Developing method and developing apparatus
- Patent number 6,402,399
- Issue date Jun 11, 2002
- Tokyo Electron Limited
- Kazuo Sakamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Developing method and developing apparatus
- Patent number 6,241,403
- Issue date Jun 5, 2001
- Tokyo Electron Limited
- Kazuo Sakamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Film forming method and film forming apparatus
- Patent number 6,228,561
- Issue date May 8, 2001
- Tokyo Electron Limited
- Keizo Hasebe
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE CLEANING METHOD, PROCESSING CONTAINER CLEANING METHOD, AN...
- Publication number 20230063907
- Publication date Mar 2, 2023
- TOKYO ELECTRON LIMITED
- Kyoko IKEDA
- B08 - CLEANING
Information Patent Application
SUBSTRATE CLEANING METHOD, PROCESSING CONTAINER CLEANING METHOD, AN...
- Publication number 20220001426
- Publication date Jan 6, 2022
- TOKYO ELECTRON LIMITED
- Kyoko IKEDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND REC...
- Publication number 20180200764
- Publication date Jul 19, 2018
- TOKYO ELECTRON LIMITED
- Shogo Fukui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CLEANING APPARATUS, SUBSTRATE CLEANING METHOD, AND COMPUT...
- Publication number 20160314958
- Publication date Oct 27, 2016
- TOKYO ELECTRON LIMITED
- Yasushi TAKIGUCHI
- B08 - CLEANING
Information Patent Application
SUBSTRATE CLEANING APPARATUS, SUBSTRATE CLEANING METHOD, AND COMPUT...
- Publication number 20140102474
- Publication date Apr 17, 2014
- TOKYO ELECTRON LIMITED
- Yasushi TAKIGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate cleaning apparatus, substrate cleaning method, and comput...
- Publication number 20080163899
- Publication date Jul 10, 2008
- Yasushi Takiguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Developing treatment apparatus and developing treatment method
- Publication number 20070031145
- Publication date Feb 8, 2007
- TOKYO ELECTRON LIMITED
- Takahiro Kitano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Developing treatment apparatus
- Publication number 20060086460
- Publication date Apr 27, 2006
- Tetsuya Kitamura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Substrate processing device, substrate processing method, and devel...
- Publication number 20050223980
- Publication date Oct 13, 2005
- TOKYO ELECTRON LIMITED
- Tetsutoshi Awamura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Developing method and developing apparatus
- Publication number 20010016121
- Publication date Aug 23, 2001
- Kazuo Sakamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Film forming method and film forming apparatus
- Publication number 20010014224
- Publication date Aug 16, 2001
- Keizo Hasebe
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
Film forming method and film forming apparatus
- Publication number 20010009135
- Publication date Jul 26, 2001
- Keizo Hasebe
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...

Shuuichi Nishikido

Person

Patents Grantslast 30 patents

Substrate cleaning method, processing container cleaning method, an...

Substrate cleaning method, processing container cleaning method, an...

Substrate processing apparatus, substrate processing method and rec...

Substrate cleaning method

Substrate cleaning apparatus, substrate cleaning method, and comput...

Developing treatment apparatus and developing treatment method

Wet processing device and wet processing method

Developing treatment apparatus

Substrate processing device, substrate processing method, and devel...

Coating apparatus

Film forming method and film forming apparatus

Developing method and developing apparatus

Developing method and developing apparatus

Film forming method and film forming apparatus

Patents Applicationslast 30 patents

SUBSTRATE CLEANING METHOD, PROCESSING CONTAINER CLEANING METHOD, AN...

SUBSTRATE CLEANING METHOD, PROCESSING CONTAINER CLEANING METHOD, AN...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND REC...

SUBSTRATE CLEANING APPARATUS, SUBSTRATE CLEANING METHOD, AND COMPUT...

SUBSTRATE CLEANING APPARATUS, SUBSTRATE CLEANING METHOD, AND COMPUT...

Substrate cleaning apparatus, substrate cleaning method, and comput...

Developing treatment apparatus and developing treatment method

Developing treatment apparatus

Substrate processing device, substrate processing method, and devel...

Developing method and developing apparatus

Film forming method and film forming apparatus

Film forming method and film forming apparatus