Silvia Kronmueller

Person

Schwaikheim, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Electromechanical system having a controlled atmosphere, and method...
- Patent number 9,771,257
- Issue date Sep 26, 2017
- Robert Bosch GmbH
- Aaron Partridge
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor device with embedded converter element and production...
- Patent number 9,035,413
- Issue date May 19, 2015
- Robert Bosch GmbH
- Georg Bischopink
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Microelectromechanical device including an encapsulation layer of w...
- Patent number 8,623,686
- Issue date Jan 7, 2014
- Robert Bosch GmbH
- Aaron Partridge
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for producing a silicon substrate having modified surface pr...
- Patent number 8,492,850
- Issue date Jul 23, 2013
- Robert Bosch GmbH
- Gerhard Lammel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Microelectromechanical device including an encapsulation layer of w...
- Patent number 8,421,167
- Issue date Apr 16, 2013
- Robert Bosch GmbH
- Aaron Partridge
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for producing a capping wafer for a sensor
- Patent number 8,329,555
- Issue date Dec 11, 2012
- Robert Bosch GmbH
- Frank Reichenbach
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Crack and residue free conformal deposited silicon oxide with predi...
- Patent number 8,287,956
- Issue date Oct 16, 2012
- Robert Bosch GmbH
- Aaron Partridge
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for etching a layer on a substrate
- Patent number 8,182,707
- Issue date May 22, 2012
- Robert Bosch GmbH
- Franz Laermer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing a semiconductor structure, and a correspon...
- Patent number 8,148,234
- Issue date Apr 3, 2012
- Robert Bosch GmbH
- Gerhard Lammel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electromechanical system having a controlled atmosphere, and method...
- Patent number 8,018,077
- Issue date Sep 13, 2011
- Robert Bosch GmbH
- Aaron Partridge
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical systems encapsulation process
- Patent number 7,898,046
- Issue date Mar 1, 2011
- Robert Bosch GmbH
- Markus Ulm
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical device including an encapsulation layer of w...
- Patent number 7,859,067
- Issue date Dec 28, 2010
- Robert Bosch GmbH
- Aaron Partridge
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for producing a micromechanical component having a thin-laye...
- Patent number 7,851,248
- Issue date Dec 14, 2010
- Robert Bosch GmbH
- Silvia Kronmueller
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical component and corresponding method for its manufacture
- Patent number 7,834,409
- Issue date Nov 16, 2010
- Robert Bosch GmbH
- Frank Reichenbach
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Crack and residue free conformal deposited silicon oxide with predi...
- Patent number 7,625,603
- Issue date Dec 1, 2009
- Robert Bosch GmbH
- Aaron Partridge
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Microelectromechanical systems encapsulation process with anti-stic...
- Patent number 7,582,514
- Issue date Sep 1, 2009
- Robert Bosch GmbH
- Cyril Vancura
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Anchors for microelectromechanical systems having an SOI substrate,...
- Patent number 7,579,206
- Issue date Aug 25, 2009
- Robert Bosch GmbH
- Markus Lutz
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical systems encapsulation process
- Patent number 7,563,633
- Issue date Jul 21, 2009
- Robert Bosch GmbH
- Markus Ulm
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of fabricating electromechanical device having a controlled...
- Patent number 7,514,283
- Issue date Apr 7, 2009
- Robert Bosch GmbH
- Aaron Partridge
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Component including a fixed element that is in a silicon layer and...
- Patent number 7,382,031
- Issue date Jun 3, 2008
- Robert Bosch GmbH
- Silvia Kronmueller
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical systems having trench isolated contacts, and...
- Patent number 7,352,040
- Issue date Apr 1, 2008
- Robert Bosch GmbH
- Aaron Partridge
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Anchors for microelectromechanical systems having an SOI substrate,...
- Patent number 7,317,233
- Issue date Jan 8, 2008
- Robert Bosch GmbH
- Markus Lutz
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical systems, and devices having thin film encaps...
- Patent number 7,288,824
- Issue date Oct 30, 2007
- Robert Bosch GmbH
- Aaron Partridge
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical component
- Patent number 7,270,868
- Issue date Sep 18, 2007
- Robert Bosch GmbH
- Thorsten Pannek
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical systems and devices having thin film encapsu...
- Patent number 7,075,160
- Issue date Jul 11, 2006
- Robert Bosch GmbH
- Aaron Partridge
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Anchors for microelectromechanical systems having an SOI substrate,...
- Patent number 6,952,041
- Issue date Oct 4, 2005
- Robert Bosch GmbH
- Markus Lutz
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of fabricating microelectromechanical systems and devices ha...
- Patent number 6,936,491
- Issue date Aug 30, 2005
- Robert Bosch GmbH
- Aaron Partridge
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
Semiconductor Device and Production Method for a Semiconductor Device
- Publication number 20140084408
- Publication date Mar 27, 2014
- ROBERT BOSCH GmbH
- Georg Bischopink
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MICROELECTROMECHANICAL DEVICE INCLUDING AN ENCAPSULATION LAYER OF W...
- Publication number 20130280842
- Publication date Oct 24, 2013
- ROBERT BOSCH GmbH
- Aaron PARTRIDGE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR PRODUCING A CAPPING WAFER FOR A SENSOR
- Publication number 20130061674
- Publication date Mar 14, 2013
- ROBERT BOSCH GmbH
- Frank REICHENBACH
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING A SEMICONDUCTOR STRUCTURE, AND A CORRESPON...
- Publication number 20120132925
- Publication date May 31, 2012
- Gerhard Lammel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROMECHANICAL SYSTEM HAVING A CONTROLLED ATMOSPHERE, AND METHOD...
- Publication number 20110298065
- Publication date Dec 8, 2011
- Aaron Partridge
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL DEVICE INCLUDING AN ENCAPSULATION LAYER OF W...
- Publication number 20110221013
- Publication date Sep 15, 2011
- Aaron Partridge
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for producing a capping wafer for a sensor
- Publication number 20110012248
- Publication date Jan 20, 2011
- Frank Reichenbach
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CRACK AND RESIDUE FREE CONFORMAL DEPOSITED SILICON OXIDE WITH PREDI...
- Publication number 20100159627
- Publication date Jun 24, 2010
- Aaron Partridge
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MICROMECHANICAL COMPONENT HAVING AN ANTI-ADHESIVE LAYER
- Publication number 20100127339
- Publication date May 27, 2010
- Franz Laermer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for producing a silicon substrate having modified surface pr...
- Publication number 20100035068
- Publication date Feb 11, 2010
- Gerhard Lammel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR PRODUCING A MICROMECHANICAL COMPONENT HAVING A THIN-LAYE...
- Publication number 20100003790
- Publication date Jan 7, 2010
- Silvia Kronmueller
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Electromechanical system having a controlled atmosphere, and method...
- Publication number 20090309175
- Publication date Dec 17, 2009
- Aaron Partridge
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Microelectromechanical Systems Encapsulation Process
- Publication number 20090278214
- Publication date Nov 12, 2009
- ROBERT BOSCH GmbH
- Markus Ulm
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for Manufacturing a Semiconductor Structure, and a Correspon...
- Publication number 20090236610
- Publication date Sep 24, 2009
- ROBERT BOSCH GmbH
- Gerhard Lammel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Micromechanical component and corresponding method for its manufacture
- Publication number 20090026561
- Publication date Jan 29, 2009
- Frank Reichenbach
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for Etching a Layer on a Substrate
- Publication number 20080311751
- Publication date Dec 18, 2008
- Franz Laermer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Microelectromechanical systems, and methods for encapsualting and f...
- Publication number 20080237756
- Publication date Oct 2, 2008
- Aaron Partridge
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Anchors for microelectromechanical systems having an SOI substrate,...
- Publication number 20080108165
- Publication date May 8, 2008
- Markus Lutz
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Microelectromechanical Systems Encapsulation Process with Anti-Stic...
- Publication number 20080050861
- Publication date Feb 28, 2008
- Cyril Vancura
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Microelectromechanical systems, and methods for encapsulating and f...
- Publication number 20060108652
- Publication date May 25, 2006
- Aaron Partridge
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Component and method for producing the same
- Publication number 20060054972
- Publication date Mar 16, 2006
- Silvia Kronmueller
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Anchors for microelectromechanical systems having an SOI substrate,...
- Publication number 20050253209
- Publication date Nov 17, 2005
- Markus Lutz
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Microelectromechanical systems having trench isolated contacts, and...
- Publication number 20050156260
- Publication date Jul 21, 2005
- Aaron Partridge
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Crack and residue free conformal deposited silicon oxide with predi...
- Publication number 20050106318
- Publication date May 19, 2005
- Aaron Partridge
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for manufacturing a microsystem
- Publication number 20050054134
- Publication date Mar 10, 2005
- Wilhelm Frey
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Anchors for microelectromechanical systems having an SOI substrate,...
- Publication number 20050019974
- Publication date Jan 27, 2005
- Markus Lutz
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Microelectromechanical systems having trench isolated contacts, and...
- Publication number 20040245586
- Publication date Dec 9, 2004
- Aaron Partridge
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Microelectromechanical systems, and methods for encapsualting and f...
- Publication number 20040248344
- Publication date Dec 9, 2004
- Aaron Partridge
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Electromechanical system having a controlled atmosphere, and method...
- Publication number 20040183214
- Publication date Sep 23, 2004
- Aaron Partridge
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Component and method of manufacturing same
- Publication number 20040081802
- Publication date Apr 29, 2004
- Thorsten Pannek
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Silvia Kronmueller

Person

Patents Grantslast 30 patents

Electromechanical system having a controlled atmosphere, and method...

Semiconductor device with embedded converter element and production...

Microelectromechanical device including an encapsulation layer of w...

Method for producing a silicon substrate having modified surface pr...

Microelectromechanical device including an encapsulation layer of w...

Method for producing a capping wafer for a sensor

Crack and residue free conformal deposited silicon oxide with predi...

Method for etching a layer on a substrate

Method for manufacturing a semiconductor structure, and a correspon...

Electromechanical system having a controlled atmosphere, and method...

Microelectromechanical systems encapsulation process

Microelectromechanical device including an encapsulation layer of w...

Method for producing a micromechanical component having a thin-laye...

Micromechanical component and corresponding method for its manufacture

Crack and residue free conformal deposited silicon oxide with predi...

Microelectromechanical systems encapsulation process with anti-stic...

Anchors for microelectromechanical systems having an SOI substrate,...

Microelectromechanical systems encapsulation process

Method of fabricating electromechanical device having a controlled...

Component including a fixed element that is in a silicon layer and...

Microelectromechanical systems having trench isolated contacts, and...

Anchors for microelectromechanical systems having an SOI substrate,...

Microelectromechanical systems, and devices having thin film encaps...

Micromechanical component

Microelectromechanical systems and devices having thin film encapsu...

Anchors for microelectromechanical systems having an SOI substrate,...

Method of fabricating microelectromechanical systems and devices ha...

Patents Applicationslast 30 patents

Semiconductor Device and Production Method for a Semiconductor Device

MICROELECTROMECHANICAL DEVICE INCLUDING AN ENCAPSULATION LAYER OF W...

METHOD FOR PRODUCING A CAPPING WAFER FOR A SENSOR

METHOD FOR MANUFACTURING A SEMICONDUCTOR STRUCTURE, AND A CORRESPON...

ELECTROMECHANICAL SYSTEM HAVING A CONTROLLED ATMOSPHERE, AND METHOD...

MICROELECTROMECHANICAL DEVICE INCLUDING AN ENCAPSULATION LAYER OF W...

Method for producing a capping wafer for a sensor

CRACK AND RESIDUE FREE CONFORMAL DEPOSITED SILICON OXIDE WITH PREDI...

MICROMECHANICAL COMPONENT HAVING AN ANTI-ADHESIVE LAYER

Method for producing a silicon substrate having modified surface pr...

METHOD FOR PRODUCING A MICROMECHANICAL COMPONENT HAVING A THIN-LAYE...

Electromechanical system having a controlled atmosphere, and method...

Microelectromechanical Systems Encapsulation Process

Method for Manufacturing a Semiconductor Structure, and a Correspon...

Micromechanical component and corresponding method for its manufacture

Method for Etching a Layer on a Substrate

Microelectromechanical systems, and methods for encapsualting and f...

Anchors for microelectromechanical systems having an SOI substrate,...

Microelectromechanical Systems Encapsulation Process with Anti-Stic...

Microelectromechanical systems, and methods for encapsulating and f...

Component and method for producing the same

Anchors for microelectromechanical systems having an SOI substrate,...

Microelectromechanical systems having trench isolated contacts, and...

Crack and residue free conformal deposited silicon oxide with predi...

Method for manufacturing a microsystem

Anchors for microelectromechanical systems having an SOI substrate,...

Microelectromechanical systems having trench isolated contacts, and...

Microelectromechanical systems, and methods for encapsualting and f...

Electromechanical system having a controlled atmosphere, and method...

Component and method of manufacturing same