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Wannweil, DE
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Patents Grants
last 30 patents
Information
Patent Grant
Mechanical component and manufacturing method for a mechanical comp...
Patent number
10,589,988
Issue date
Mar 17, 2020
Robert Bosch GmbH
Wolfgang Heinzelmann
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for forming a cavity and a component having a cavity
Patent number
10,431,474
Issue date
Oct 1, 2019
Robert Bosch GmbH
Simon Armbruster
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micromechanical component and corresponding test method for a micro...
Patent number
9,764,945
Issue date
Sep 19, 2017
Robert Bosch GmbH
Sebastian Reiss
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micromechanical component having hermetic through-contacting, and m...
Patent number
9,725,311
Issue date
Aug 8, 2017
Robert Bosch GmbH
Jochen Franz
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for producing a wafer equipped with transparent plates
Patent number
9,663,351
Issue date
May 30, 2017
Robert Bosch GmbH
Simon Armbruster
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micromirror and manufacturing method for at least one micromirror w...
Patent number
9,618,740
Issue date
Apr 11, 2017
Robert Bosch GmbH
Simon Armbruster
G02 - OPTICS
Information
Patent Grant
Method for structuring a layered structure from two semiconductor l...
Patent number
9,490,137
Issue date
Nov 8, 2016
Robert Bosch GmbH
Simon Armbruster
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micromechanical component and method for producing a micromechanica...
Patent number
9,360,664
Issue date
Jun 7, 2016
Robert Bosch GmbH
Simon Armbruster
G02 - OPTICS
Information
Patent Grant
Component having a via
Patent number
9,082,831
Issue date
Jul 14, 2015
Robert Bosch GmbH
Marcus Ahles
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Sensor and method for its production
Patent number
8,749,013
Issue date
Jun 10, 2014
Robert Bosch GmbH
Hubert Benzel
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micromechanical component and corresponding production method
Patent number
8,558,327
Issue date
Oct 15, 2013
Robert Bosch GmbH
Kathrin Knese
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for producing a component, and sensor element
Patent number
8,530,261
Issue date
Sep 10, 2013
Robert Bosch GmbH
Torsten Kramer
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for manufacturing a micromechanical diaphragm structure havi...
Patent number
8,519,494
Issue date
Aug 27, 2013
Robert Bosch GmbH
Torsten Kramer
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micromechanical capacitive pressure transducer and production method
Patent number
8,492,855
Issue date
Jul 23, 2013
Robert Bosch GmbH
Gerhard Lammel
G01 - MEASURING TESTING
Information
Patent Grant
Method for producing a silicon substrate having modified surface pr...
Patent number
8,492,850
Issue date
Jul 23, 2013
Robert Bosch GmbH
Gerhard Lammel
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for manufacturing capped MEMS components
Patent number
8,470,631
Issue date
Jun 25, 2013
Robert Bosch GmbH
Torsten Kramer
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for manufacturing chips
Patent number
8,389,327
Issue date
Mar 5, 2013
Robert Bosch GmbH
Torsten Kramer
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Sensor and method for the manufacture thereof
Patent number
8,334,534
Issue date
Dec 18, 2012
Robert Bosch GmbH
Jochen Reinmuth
G01 - MEASURING TESTING
Information
Patent Grant
Micromechanical component and method for the manufacture thereof
Patent number
8,217,476
Issue date
Jul 10, 2012
Robert Bosch GmbH
Karl-Heinz Kraft
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for manufacturing a semiconductor structure, and a correspon...
Patent number
8,148,234
Issue date
Apr 3, 2012
Robert Bosch GmbH
Gerhard Lammel
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Micromechanical sensor element
Patent number
7,918,136
Issue date
Apr 5, 2011
Robert Bosch GmbH
Joerg Muchow
G01 - MEASURING TESTING
Information
Patent Grant
Method for manufacturing a sensor array including a monolithically...
Patent number
7,858,424
Issue date
Dec 28, 2010
Robert Bosch GmbH
Hubert Benzel
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micromechanical semiconductor sensor
Patent number
7,843,025
Issue date
Nov 30, 2010
Robert Bosch GmbH
Hubert Benzel
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Semiconductor component configured as a diaphragm sensor
Patent number
7,755,152
Issue date
Jul 13, 2010
Robert Bosch GmbH
Hubert Benzel
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micromechanical device and method for producing a micromechanical d...
Patent number
7,647,832
Issue date
Jan 19, 2010
Robert Bosch GmbH
Joerg Muchow
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for manufacturing a micromechanical sensor element
Patent number
7,572,661
Issue date
Aug 11, 2009
Robert Bosch GmbH
Hubert Benzel
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for manufacturing a diaphragm sensor
Patent number
7,569,412
Issue date
Aug 4, 2009
Robert Bosch GmbH
Hubert Benzel
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for manufacturing a membrane sensor
Patent number
7,494,839
Issue date
Feb 24, 2009
Robert Bosch GmbH
Hubert Benzel
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micromechanical component and method
Patent number
7,404,332
Issue date
Jul 29, 2008
Robert Bosch GmbH
Gerhard Lammel
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Sensor element with trenched cavity
Patent number
7,354,786
Issue date
Apr 8, 2008
Robert Bosch GmbH
Hubert Benzel
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
METHOD FOR FORMING A CAVITY AND A COMPONENT HAVING A CAVITY
Publication number
20170140943
Publication date
May 18, 2017
ROBERT BOSCH GmbH
Simon Armbruster
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROMECHANICAL LAYER SYSTEM
Publication number
20170081183
Publication date
Mar 23, 2017
ROBERT BOSCH GmbH
Simon Armbruster
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Micromechanical component having hermetic through-contacting, and m...
Publication number
20150232330
Publication date
Aug 20, 2015
ROBERT BOSCH GmbH
Jochen FRANZ
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR STRUCTURING A LAYERED STRUCTURE FROM TWO SEMICONDUCTOR L...
Publication number
20150235859
Publication date
Aug 20, 2015
ROBERT BOSCH GmbH
Simon ARMBRUSTER
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for producing a wafer equipped with transparent plates
Publication number
20150232328
Publication date
Aug 20, 2015
ROBERT BOSCH GmbH
Simon ARMBRUSTER
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROMIRROR AND MANUFACTURING METHOD FOR AT LEAST ONE MICROMIRROR W...
Publication number
20150153566
Publication date
Jun 4, 2015
ROBERT BOSCH GmbH
Simon Armbruster
G02 - OPTICS
Information
Patent Application
MICROMECHANICAL COMPONENT AND METHOD FOR PRODUCING A MICROMECHANICA...
Publication number
20150062677
Publication date
Mar 5, 2015
ROBERT BOSCH GmbH
Simon ARMBRUSTER
G02 - OPTICS
Information
Patent Application
MICROMECHANICAL COMPONENT AND CORRESPONDING TEST METHOD FOR A MICRO...
Publication number
20150061695
Publication date
Mar 5, 2015
ROBERT BOSCH GmbH
Sebastian REISS
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Micromechanical component, micromirror device, and manufacturing me...
Publication number
20140376071
Publication date
Dec 25, 2014
ROBERT BOSCH GmbH
Simon ARMBRUSTER
G02 - OPTICS
Information
Patent Application
MECHANICAL COMPONENT AND MANUFACTURING METHOD FOR A MECHANICAL COMP...
Publication number
20140118005
Publication date
May 1, 2014
ROBERT BOSCH GmbH
Wolfgang HEINZELMANN
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR MANUFACTURING A SEMICONDUCTOR STRUCTURE, AND A CORRESPON...
Publication number
20120132925
Publication date
May 31, 2012
Gerhard Lammel
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Component having a VIA
Publication number
20120068356
Publication date
Mar 22, 2012
Marcus Ahles
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Method for manufacturing a component, method for manufacturing a co...
Publication number
20110169107
Publication date
Jul 14, 2011
Torsten Kramer
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR MANUFACTURING CHIPS
Publication number
20110151620
Publication date
Jun 23, 2011
Torsten Kramer
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Method for manufacturing a micromechanical diaphragm structure havi...
Publication number
20110147864
Publication date
Jun 23, 2011
Torsten Kramer
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SENSOR AND METHOD FOR PRODUCING THE SAME
Publication number
20110002359
Publication date
Jan 6, 2011
Hubert Benzel
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROMECHANICAL COMPONENT AND METHOD FOR THE MANUFACTURE THEREOF
Publication number
20110001200
Publication date
Jan 6, 2011
Karl-Heinz Kraft
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR MANUFACTURING CAPPED MEMS COMPONENTS
Publication number
20100267183
Publication date
Oct 21, 2010
Torsten Kramer
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR PRODUCING A COMPONENT, AND SENSOR ELEMENT
Publication number
20100164027
Publication date
Jul 1, 2010
Torsten Kramer
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROMECHANICAL COMPONENT AND CORRESPONDING PRODUCTION METHOD
Publication number
20100164023
Publication date
Jul 1, 2010
Kathrin Knese
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Sensor and method for the manufacture thereof
Publication number
20100140618
Publication date
Jun 10, 2010
Jochen Reinmuth
G01 - MEASURING TESTING
Information
Patent Application
Method for producing a silicon substrate having modified surface pr...
Publication number
20100035068
Publication date
Feb 11, 2010
Gerhard Lammel
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR MANUFACTURING A SEMICONDUCTOR COMPONENT, AS WELL AS A SE...
Publication number
20090256219
Publication date
Oct 15, 2009
Hubert Benzel
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Method for Manufacturing a Semiconductor Structure, and a Correspon...
Publication number
20090236610
Publication date
Sep 24, 2009
ROBERT BOSCH GmbH
Gerhard Lammel
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for Manufacturing a Sensor Array Including a Monolithically...
Publication number
20090142873
Publication date
Jun 4, 2009
Hubert Benzel
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR MANUFACTURING A SEMICONDUCTOR COMPONENT, AS WELL AS A SE...
Publication number
20090127640
Publication date
May 21, 2009
Hubert Benzel
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Micromechanical Capacitive Pressure Transducer and Production Method
Publication number
20090101997
Publication date
Apr 23, 2009
Gerhard Lammel
G01 - MEASURING TESTING
Information
Patent Application
MICROMECHANICAL SENSOR ELEMENT
Publication number
20090084182
Publication date
Apr 2, 2009
Joerg Muchow
G01 - MEASURING TESTING
Information
Patent Application
Micromechanical device and method for producing a micromechanical d...
Publication number
20070126069
Publication date
Jun 7, 2007
Joerg Muchow
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Micromechanical component and method
Publication number
20060137460
Publication date
Jun 29, 2006
Gerhard Lammel
B81 - MICRO-STRUCTURAL TECHNOLOGY