Simon Gijsbert Josephus MATHIJSSEN

Person

Rosmalen, NL

People

Patents Grantslast 30 patents

Information Patent Grant
Method for overlay metrology and apparatus thereof
- Patent number 12,130,246
- Issue date Oct 29, 2024
- ASML Netherlands B.V.
- Simon Gijsbert Josephus Mathijssen
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and system for determining information about a target structure
- Patent number 12,061,421
- Issue date Aug 13, 2024
- ASML Netherlands B.V.
- Arie Jeffrey Den Boef
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Metrology method and associated metrology and lithographic apparatuses
- Patent number 12,032,299
- Issue date Jul 9, 2024
- ASML Netherlands B.V.
- Patricius Aloysius Jacobus Tinnemans
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Metrology method
- Patent number 12,013,647
- Issue date Jun 18, 2024
- ASML Netherlands B.V.
- Simon Gijsbert Josephus Mathijssen
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method for inferring a local uniformity metric
- Patent number 11,886,125
- Issue date Jan 30, 2024
- ASML Netherlands B.V.
- Simon Gijsbert Josephus Mathijssen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Methods and apparatus for predicting performance of a measurement m...
- Patent number 11,391,677
- Issue date Jul 19, 2022
- ASML Netherlands B.V.
- Stefan Michiel Witte
- G01 - MEASURING TESTING
Information Patent Grant
Metrology sensor for position metrology
- Patent number 11,360,399
- Issue date Jun 14, 2022
- ASML Netherlands B.V.
- Sebastianus Adrianus Goorden
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method to determine a patterning process parameter
- Patent number 11,300,883
- Issue date Apr 12, 2022
- ASML Netherlands B.V.
- Martin Jacobus Johan Jak
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Inspection apparatus and methods, substrates having metrology targe...
- Patent number 11,022,900
- Issue date Jun 1, 2021
- ASML Netherlands B.V.
- Simon Gijsbert Josephus Mathijssen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Methods of aligning a diffractive optical system and diffracting be...
- Patent number 10,983,361
- Issue date Apr 20, 2021
- ASML Netherlands B.V.
- Sander Bas Roobol
- G02 - OPTICS
Information Patent Grant
Mark position determination method
- Patent number 10,942,460
- Issue date Mar 9, 2021
- ASML Netherlands B.V.
- Simon Gijsbert Josephus Mathijssen
- G01 - MEASURING TESTING
Information Patent Grant
Metrology method and apparatus and computer program
- Patent number 10,908,513
- Issue date Feb 2, 2021
- ASML Netherlands B.V.
- Marc Johannes Noot
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
HHG source, inspection apparatus and method for performing a measur...
- Patent number 10,816,906
- Issue date Oct 27, 2020
- ASML Netherlands B.V.
- Nan Lin
- G02 - OPTICS
Information Patent Grant
Metrology sensor, lithographic apparatus and method for manufacturi...
- Patent number 10,788,766
- Issue date Sep 29, 2020
- ASML Netherlands B.V.
- Sebastianus Adrianus Goorden
- G01 - MEASURING TESTING
Information Patent Grant
Inspection apparatus and methods, substrates having metrology targe...
- Patent number 10,761,432
- Issue date Sep 1, 2020
- ASML Netherlands B.V.
- Simon Gijsbert Josephus Mathijssen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Metrology method and apparatus, computer program and lithographic s...
- Patent number 10,705,437
- Issue date Jul 7, 2020
- ASML Netherlands B.V.
- Narjes Javaheri
- G01 - MEASURING TESTING
Information Patent Grant
Metrology in lithographic processes
- Patent number 10,656,533
- Issue date May 19, 2020
- ASML Netherlands B.V.
- Simon Gijsbert Josephus Mathijssen
- G01 - MEASURING TESTING
Information Patent Grant
Illumination source for an inspection apparatus, inspection apparat...
- Patent number 10,649,344
- Issue date May 12, 2020
- ASML Netherlands B.V.
- Sander Bas Roobol
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Methods and apparatus for predicting performance of a measurement m...
- Patent number 10,648,919
- Issue date May 12, 2020
- ASML Netherlands B.V.
- Stefan Michiel Witte
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus for delivering gas and illumination source for generating...
- Patent number 10,630,037
- Issue date Apr 21, 2020
- ASML Netherlands B.V.
- Sudhir Srivastava
- G01 - MEASURING TESTING
Information Patent Grant
Substrate edge detection
- Patent number 10,607,873
- Issue date Mar 31, 2020
- ASML Netherlands B.V.
- Eric Anthony Janda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Metrology apparatus, lithographic system, and method of measuring a...
- Patent number 10,599,047
- Issue date Mar 24, 2020
- ASML Netherlands B.V.
- Janneke Ravensbergen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Alignment system
- Patent number 10,585,363
- Issue date Mar 10, 2020
- ASML Netherlands B.V.
- Simon Gijsbert Josephus Mathijssen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Position sensor, lithographic apparatus and method for manufacturin...
- Patent number 10,527,959
- Issue date Jan 7, 2020
- ASML Netherlands B.V.
- Simon Reinald Huisman
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus for delivering gas and illumination source for generating...
- Patent number 10,530,111
- Issue date Jan 7, 2020
- ASML Netherlands B.V.
- Sudhir Srivastava
- G01 - MEASURING TESTING
Information Patent Grant
Alignment method
- Patent number 10,514,620
- Issue date Dec 24, 2019
- ASML Holding N.V.
- Franciscus Godefridus Casper Bijnen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Methods and patterning devices and apparatuses for measuring focus...
- Patent number 10,474,039
- Issue date Nov 12, 2019
- ASML Netherlands B.V.
- Paul Christiaan Hinnen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Alignment sensor for lithographic apparatus
- Patent number 10,466,601
- Issue date Nov 5, 2019
- ASML Netherlands B.V.
- Alessandro Polo
- G02 - OPTICS
Information Patent Grant
Metrology parameter determination and metrology recipe selection
- Patent number 10,451,978
- Issue date Oct 22, 2019
- ASML Netherlands B.V.
- Kaustuve Bhattacharyya
- G01 - MEASURING TESTING
Information Patent Grant
Illumination source for an inspection apparatus, inspection apparat...
- Patent number 10,451,559
- Issue date Oct 22, 2019
- ASML Netherlands B.V.
- Peter Danny Van Voorst
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR INFERRING A LOCAL UNIFORMITY METRIC
- Publication number 20240168388
- Publication date May 23, 2024
- ASML NETHERLANDS B.V.
- Simon Gijsbert Josephus MATHIJSSEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD OF METROLOGY AND ASSOCIATED APPARATUSES
- Publication number 20240036484
- Publication date Feb 1, 2024
- ASML NETHERLANDS B.V.
- Timothy Dugan DAVIS
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
A SUBSTRATE COMPRISING A TARGET ARRANGEMENT, AND ASSOCIATED AT LEAS...
- Publication number 20240036480
- Publication date Feb 1, 2024
- ASML NETHERLANDS B.V.
- Armand Eugene Albert KOOLEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METROLOGY METHOD AND APPARATUS AND COMPUTER PROGRAM
- Publication number 20240027918
- Publication date Jan 25, 2024
- ASML NETHERLANDS B.V.
- Simon Gijsbert Josephus MATHIJSSEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METROLOGY METHOD AND ASSOCIATED METROLOGY AND LITHOGRAPHIC APPARATUSES
- Publication number 20240012342
- Publication date Jan 11, 2024
- ASML NETHERLANDS B.V.
- Sebastianus Adrianus GOORDEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METROLOGY METHOD FOR MEASURING AN ETCHED TRENCH AND ASSOCIATED METR...
- Publication number 20240012339
- Publication date Jan 11, 2024
- ASML NETHERLANDS B.V.
- Simon Gijsbert Josephus MATHIJSSEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR INFERRING A LOCAL UNIFORMITY METRIC
- Publication number 20230062558
- Publication date Mar 2, 2023
- ASML NETHERLANDS B.V.
- Simon Gijsbert Josephus MATHIJSSEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METROLOGY METHOD AND ASSOCIATED METROLOGY AND LITHOGRAPHIC APPARATUSES
- Publication number 20230017491
- Publication date Jan 19, 2023
- ASML NETHERLANDS B.V.
- Patricius Aloysius Jacobus TINNEMANS
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ILLUMINATION AND DETECTION APPARATUS FOR A METROLOGY APPARATUS
- Publication number 20220276180
- Publication date Sep 1, 2022
- ASML NETHERLANDS B.V.
- Nitesh PANDEY
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND SYSTEM FOR DETERMINING INFORMATION ABOUT A TARGET STRUCTURE
- Publication number 20220276569
- Publication date Sep 1, 2022
- ASML NETHERLANDS B.V.
- Arie Jeffrey DEN BOEF
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR OVERLAY METROLOGY AND APPARATUS THEREOF
- Publication number 20220074875
- Publication date Mar 10, 2022
- ASML NETHERLANDS B.V.
- Simon Gijsbert Josephus MATHIJSSEN
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METROLOGY METHOD
- Publication number 20220075276
- Publication date Mar 10, 2022
- ASML NETHERLANDS B.V.
- Simon Gijsbert Josephus MATHIJSSEN
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METROLOGY SENSOR FOR POSITION METROLOGY
- Publication number 20220035257
- Publication date Feb 3, 2022
- ASML NETHERLANDS B.V.
- Sebastianus Adrianus GOORDEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METROLOGY METHOD AND APPARATUS THEREFOR
- Publication number 20210356873
- Publication date Nov 18, 2021
- ASML NETHERLANDS B.V.
- Arie Jeffrey DEN BOEF
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Inspection Apparatus and Methods, Substrates Having Metrology Targe...
- Publication number 20200348605
- Publication date Nov 5, 2020
- ASML NETHERLANDS B.V.
- Simon Gijsbert Josephus MATHIJSSEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Methods and Apparatus for Predicting Performance of a Measurement M...
- Publication number 20200232931
- Publication date Jul 23, 2020
- ASML NETHERLANDS B.V.
- Stefan Michiel WITTE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Metrology Sensor, Lithographic Apparatus and Method for Manufacturi...
- Publication number 20200103772
- Publication date Apr 2, 2020
- ASML NETHERLANDS B.V.
- Sebastianus Adrianus GOORDEN
- G01 - MEASURING TESTING
Information Patent Application
ALIGNMENT METHOD
- Publication number 20190227446
- Publication date Jul 25, 2019
- ASML NETHERLANDS B.V.
- Franciscus Godefridus Casper BIJNEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Apparatus For Delivering Gas and Illumination Source for Generating...
- Publication number 20190212657
- Publication date Jul 11, 2019
- ASML NETHERLANDS B.V.
- Sudhir SRIVASTAVA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
POSITION SENSOR, LITHOGRAPHIC APPARATUS AND METHOD FOR MANUFACTURIN...
- Publication number 20190212658
- Publication date Jul 11, 2019
- ASML NETHERLANDS B.V.
- Simon Reinald HUISMAN
- G02 - OPTICS
Information Patent Application
HHG Source, Inspection Apparatus and Method for Performing a Measur...
- Publication number 20190155171
- Publication date May 23, 2019
- ASML NETHERLANDS B.V.
- Nan LIN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Metrology Method and Apparatus, Computer Program and Lithographic S...
- Publication number 20190107785
- Publication date Apr 11, 2019
- ASML NETHERLANDS B.V.
- Narjes JAVAHERI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE EDGE DETECTION
- Publication number 20190101839
- Publication date Apr 4, 2019
- ASML NETHERLANDS B.V.
- Eric Anthony JANDA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method to Determine a Patterning Process Parameter
- Publication number 20190094703
- Publication date Mar 28, 2019
- ASML NETHERLANDS B.V.
- Martin Jacobus Johan JAK
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MARK POSITION DETERMINATION METHOD
- Publication number 20190086824
- Publication date Mar 21, 2019
- ASML Netherlands B.V.
- Simon Gijsbert Josephus MATHIJSSEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Metrology in Lithographic Processes
- Publication number 20190079413
- Publication date Mar 14, 2019
- ASML NETHERLANDS B.V.
- Simon Gijsbert Josephus MATHIJSSEN
- G01 - MEASURING TESTING
Information Patent Application
Metrology Method and Apparatus and Computer Program
- Publication number 20190033727
- Publication date Jan 31, 2019
- ASML NETHERLANDS B.V.
- Marc Johannes NOOT
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Illumination Source for an Inspection Apparatus, Inspection Apparat...
- Publication number 20190003981
- Publication date Jan 3, 2019
- ASML NETHERLANDS B.V.
- Peter Danny Van Voorst
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METROLOGY PARAMETER DETERMINATION AND METROLOGY RECIPE SELECTION
- Publication number 20190004437
- Publication date Jan 3, 2019
- ASML NETHERLANDS B.V.
- Kaustuve Bhattacharyya
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Metrology Apparatus, Lithographic System, And Method Of Measuring A...
- Publication number 20180348645
- Publication date Dec 6, 2018
- ASML NETHERLANDS B.V.
- Janneke Ravensbergen
- G01 - MEASURING TESTING

Simon Gijsbert Josephus MATHIJSSEN

Person

Patents Grantslast 30 patents

Method for overlay metrology and apparatus thereof

Method and system for determining information about a target structure

Metrology method and associated metrology and lithographic apparatuses

Metrology method

Method for inferring a local uniformity metric

Methods and apparatus for predicting performance of a measurement m...

Metrology sensor for position metrology

Method to determine a patterning process parameter

Inspection apparatus and methods, substrates having metrology targe...

Methods of aligning a diffractive optical system and diffracting be...

Mark position determination method

Metrology method and apparatus and computer program

HHG source, inspection apparatus and method for performing a measur...

Metrology sensor, lithographic apparatus and method for manufacturi...

Inspection apparatus and methods, substrates having metrology targe...

Metrology method and apparatus, computer program and lithographic s...

Metrology in lithographic processes

Illumination source for an inspection apparatus, inspection apparat...

Methods and apparatus for predicting performance of a measurement m...

Apparatus for delivering gas and illumination source for generating...

Substrate edge detection

Metrology apparatus, lithographic system, and method of measuring a...

Alignment system

Position sensor, lithographic apparatus and method for manufacturin...

Apparatus for delivering gas and illumination source for generating...

Alignment method

Methods and patterning devices and apparatuses for measuring focus...

Alignment sensor for lithographic apparatus

Metrology parameter determination and metrology recipe selection

Illumination source for an inspection apparatus, inspection apparat...

Patents Applicationslast 30 patents

METHOD FOR INFERRING A LOCAL UNIFORMITY METRIC

METHOD OF METROLOGY AND ASSOCIATED APPARATUSES

A SUBSTRATE COMPRISING A TARGET ARRANGEMENT, AND ASSOCIATED AT LEAS...

METROLOGY METHOD AND APPARATUS AND COMPUTER PROGRAM

METROLOGY METHOD AND ASSOCIATED METROLOGY AND LITHOGRAPHIC APPARATUSES

METROLOGY METHOD FOR MEASURING AN ETCHED TRENCH AND ASSOCIATED METR...

METHOD FOR INFERRING A LOCAL UNIFORMITY METRIC

METROLOGY METHOD AND ASSOCIATED METROLOGY AND LITHOGRAPHIC APPARATUSES

ILLUMINATION AND DETECTION APPARATUS FOR A METROLOGY APPARATUS

METHOD AND SYSTEM FOR DETERMINING INFORMATION ABOUT A TARGET STRUCTURE

METHOD FOR OVERLAY METROLOGY AND APPARATUS THEREOF

METROLOGY METHOD

METROLOGY SENSOR FOR POSITION METROLOGY

METROLOGY METHOD AND APPARATUS THEREFOR

Inspection Apparatus and Methods, Substrates Having Metrology Targe...

Methods and Apparatus for Predicting Performance of a Measurement M...

Metrology Sensor, Lithographic Apparatus and Method for Manufacturi...

ALIGNMENT METHOD

Apparatus For Delivering Gas and Illumination Source for Generating...

POSITION SENSOR, LITHOGRAPHIC APPARATUS AND METHOD FOR MANUFACTURIN...

HHG Source, Inspection Apparatus and Method for Performing a Measur...

Metrology Method and Apparatus, Computer Program and Lithographic S...

SUBSTRATE EDGE DETECTION

Method to Determine a Patterning Process Parameter

MARK POSITION DETERMINATION METHOD

Metrology in Lithographic Processes

Metrology Method and Apparatus and Computer Program

Illumination Source for an Inspection Apparatus, Inspection Apparat...

METROLOGY PARAMETER DETERMINATION AND METROLOGY RECIPE SELECTION

Metrology Apparatus, Lithographic System, And Method Of Measuring A...