Slawomir Czerkas

Person

Weilburg, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Method and computer program product for controlling the positioning...
- Patent number 10,303,153
- Issue date May 28, 2019
- KLA-Tencor Corporation
- Slawomir Czerkas
- G05 - CONTROLLING REGULATING
Information Patent Grant
Method for measuring positions of structures on a mask and thereby...
- Patent number 9,424,636
- Issue date Aug 23, 2016
- KLA-Tencor Corporation
- Frank Laske
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method for determining the systematic error in the measurement of p...
- Patent number 8,149,383
- Issue date Apr 3, 2012
- Vistec Semiconductor Systems GmbH
- Slawomir Czerkas
- G01 - MEASURING TESTING
Information Patent Grant
Coordinate measuring machine and method for calibrating the coordin...
- Patent number 8,115,808
- Issue date Feb 14, 2012
- Vistec Semiconductor Systems GmbH
- Wolfgang Fricke
- G01 - MEASURING TESTING
Information Patent Grant
Method for correcting measured values resulting from the bending of...
- Patent number 7,826,068
- Issue date Nov 2, 2010
- Vistec Semiconductor Systems GmbH
- Slawomir Czerkas
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Method and Computer Program Product for Controlling the Positioning...
- Publication number 20180120807
- Publication date May 3, 2018
- KLA-Tencor Corporation
- Slawomir Czerkas
- G05 - CONTROLLING REGULATING
Information Patent Application
METHOD FOR MEASURING POSITIONS OF STRUCTURES ON A MASK AND THEREBY...
- Publication number 20150248756
- Publication date Sep 3, 2015
- KLA-Tencor Corporation
- Frank LASKE
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Metrology system and method for monitoring and correcting system ge...
- Publication number 20100302555
- Publication date Dec 2, 2010
- KLA-TENCOR MIE GMBH
- Hans-Artur Boesser
- G01 - MEASURING TESTING
Information Patent Application
COORDINATE MEASURING MACHINE WITH TEMPERATURE ADAPTING STATION
- Publication number 20090153875
- Publication date Jun 18, 2009
- Vistec Semiconductor Systems GmbH
- Slawomir Czerkas
- G01 - MEASURING TESTING
Information Patent Application
Method for determining the systematic error in the measurement of p...
- Publication number 20090033894
- Publication date Feb 5, 2009
- Vistec Semiconductor Systems GmbH
- Slawomir Czerkas
- G01 - MEASURING TESTING
Information Patent Application
Method for Correcting Measured Values Resulting from the Bending of...
- Publication number 20090030639
- Publication date Jan 29, 2009
- Vistec Semiconductor Systems GmbH
- Slawomir Czerkas
- G01 - MEASURING TESTING
Information Patent Application
Coordinate measuring machine and method for calibrating the coordin...
- Publication number 20090002486
- Publication date Jan 1, 2009
- Vistec Semiconductor Systems GmbH
- Wolfgang Fricke
- G01 - MEASURING TESTING

Slawomir Czerkas

Person

Patents Grantslast 30 patents

Method and computer program product for controlling the positioning...

Method for measuring positions of structures on a mask and thereby...

Method for determining the systematic error in the measurement of p...

Coordinate measuring machine and method for calibrating the coordin...

Method for correcting measured values resulting from the bending of...

Patents Applicationslast 30 patents

Method and Computer Program Product for Controlling the Positioning...

METHOD FOR MEASURING POSITIONS OF STRUCTURES ON A MASK AND THEREBY...

Metrology system and method for monitoring and correcting system ge...

COORDINATE MEASURING MACHINE WITH TEMPERATURE ADAPTING STATION

Method for determining the systematic error in the measurement of p...

Method for Correcting Measured Values Resulting from the Bending of...

Coordinate measuring machine and method for calibrating the coordin...