Slobodan MITROVIC

Person

Union City, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
In situ real-time sensing and compensation of non-uniformities in s...
- Patent number 12,142,464
- Issue date Nov 12, 2024
- Lam Research Corporation
- Changyou Jing
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
IN SITU REAL-TIME SENSING AND COMPENSATION OF NON-UNIFORMITIES IN S...
- Publication number 20250069866
- Publication date Feb 27, 2025
- LAM RESEARCH CORPORATION
- Changyou JING
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE SUPPORTS WITH MULTILAYER STRUCTURE INCLUDING COUPLED HEAT...
- Publication number 20230274954
- Publication date Aug 31, 2023
- LAM RESEARCH CORPORATION
- Harmeet SINGH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IN SITU REAL-TIME SENSING AND COMPENSATION OF NON-UNIFORMITIES IN S...
- Publication number 20220277928
- Publication date Sep 1, 2022
- LAM RESEARCH CORPORATION
- Changyou JING
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEALANT COATING FOR PLASMA PROCESSING CHAMBER COMPONENTS
- Publication number 20220246404
- Publication date Aug 4, 2022
- LAM RESEARCH CORPORATION
- Benjamin Philip HEINE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTROSTATIC CHUCK WITH POWDER COATING
- Publication number 20220130705
- Publication date Apr 28, 2022
- LAM RESEARCH CORPORATION
- Jeremy George SMITH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SURFACE COATING FOR PLASMA PROCESSING CHAMBER COMPONENTS
- Publication number 20210292893
- Publication date Sep 23, 2021
- LAM RESEARCH CORPORATION
- Slobodan MITROVIC
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Slobodan MITROVIC

Person

Patents Grantslast 30 patents

In situ real-time sensing and compensation of non-uniformities in s...

Patents Applicationslast 30 patents

IN SITU REAL-TIME SENSING AND COMPENSATION OF NON-UNIFORMITIES IN S...

SUBSTRATE SUPPORTS WITH MULTILAYER STRUCTURE INCLUDING COUPLED HEAT...

IN SITU REAL-TIME SENSING AND COMPENSATION OF NON-UNIFORMITIES IN S...

SEALANT COATING FOR PLASMA PROCESSING CHAMBER COMPONENTS

ELECTROSTATIC CHUCK WITH POWDER COATING

SURFACE COATING FOR PLASMA PROCESSING CHAMBER COMPONENTS