Soichi Katagiri

Person

Hachiouji, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Small electron gun
- Patent number 8,232,712
- Issue date Jul 31, 2012
- Hitachi I High-Technologies Corporation
- Soichi Katagiri
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus
- Patent number 7,339,167
- Issue date Mar 4, 2008
- Hitachi High-Technologies Corporation
- Takashi Ohshima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Small electron gun
- Patent number 7,238,939
- Issue date Jul 3, 2007
- Hitachi High-Technologies Corporation
- Soichi Katagiri
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Polishing apparatus and method for producing semiconductors using t...
- Patent number 7,166,013
- Issue date Jan 23, 2007
- Hitachi, Ltd.
- Shigeo Moriyama
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus and method for producing semiconductors using t...
- Patent number 7,137,866
- Issue date Nov 21, 2006
- Hitachi Ltd.
- Shigeo Moriyama
- B24 - GRINDING POLISHING
Information Patent Grant
Method for manufacturing a semiconductor device that includes plana...
- Patent number 6,849,542
- Issue date Feb 1, 2005
- Hitachi, Ltd.
- Soichi Katagiri
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing method for semiconductors and apparatus therefor
- Patent number 6,099,393
- Issue date Aug 8, 2000
- Hitachi, Ltd.
- Soichi Katagiri
- B24 - GRINDING POLISHING
Information Patent Grant
Methods for measuring optical system, and method and apparatus for...
- Patent number 5,420,436
- Issue date May 30, 1995
- Hitachi, Ltd.
- Eiichi Seya
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Workpiece having alignment marks for positioning a pattern at a dif...
- Patent number 5,408,320
- Issue date Apr 18, 1995
- Hitachi, Ltd.
- Soichi Katagiri
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of forming patterns and apparatus for carrying out the same
- Patent number 5,331,369
- Issue date Jul 19, 1994
- Hitachi, Ltd.
- Tsuneo Terasawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
X-ray pattern masking by a reflective reduction projection optical...
- Patent number 5,222,112
- Issue date Jun 22, 1993
- Hitachi, Ltd.
- Tsuneo Terasawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of position detection and the method and apparatus of printi...
- Patent number 5,200,798
- Issue date Apr 6, 1993
- Hitachi, Ltd.
- Soichi Katagiri
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for measuring minute displacement by subject l...
- Patent number 5,164,789
- Issue date Nov 17, 1992
- Hitachi, Ltd.
- Yasuhiro Yoshitake
- G01 - MEASURING TESTING
Information Patent Grant
Optical projection printing apparatus wherein wafer mark has a grat...
- Patent number 4,857,744
- Issue date Aug 15, 1989
- Hitachi, Ltd.
- Keiji Kataoka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Small electron gun
- Publication number 20090289186
- Publication date Nov 26, 2009
- Hitachi High-Technologies Corporation
- Soichi Katagiri
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Small electron gun
- Publication number 20070236143
- Publication date Oct 11, 2007
- Hitachi High-Technologies Corporation
- Soichi Katagiri
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged particle beam apparatus
- Publication number 20060076489
- Publication date Apr 13, 2006
- Takashi Ohshima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Polishing apparatus and method for producing semiconductors using t...
- Publication number 20060057940
- Publication date Mar 16, 2006
- Shigeo Moriyama
- B24 - GRINDING POLISHING
Information Patent Application
Polishing apparatus and method for producing semiconductors using t...
- Publication number 20050095960
- Publication date May 5, 2005
- Shigeo Moriyama
- B24 - GRINDING POLISHING
Information Patent Application
Small electron gun
- Publication number 20050052103
- Publication date Mar 10, 2005
- Soichi Katagiri
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Polishing apparatus and method for producing semiconductors using t...
- Publication number 20030199238
- Publication date Oct 23, 2003
- Shigeo Moriyama
- B24 - GRINDING POLISHING
Information Patent Application
Manufacturing method of semiconductor device and apparatus thereof
- Publication number 20030077906
- Publication date Apr 24, 2003
- Soichi Katagiri
- B24 - GRINDING POLISHING

Soichi Katagiri

Person

Patents Grantslast 30 patents

Small electron gun

Charged particle beam apparatus

Small electron gun

Polishing apparatus and method for producing semiconductors using t...

Polishing apparatus and method for producing semiconductors using t...

Method for manufacturing a semiconductor device that includes plana...

Polishing method for semiconductors and apparatus therefor

Methods for measuring optical system, and method and apparatus for...

Workpiece having alignment marks for positioning a pattern at a dif...

Method of forming patterns and apparatus for carrying out the same

X-ray pattern masking by a reflective reduction projection optical...

Method of position detection and the method and apparatus of printi...

Method and apparatus for measuring minute displacement by subject l...

Optical projection printing apparatus wherein wafer mark has a grat...

Patents Applicationslast 30 patents

Small electron gun

Small electron gun

Charged particle beam apparatus

Polishing apparatus and method for producing semiconductors using t...

Polishing apparatus and method for producing semiconductors using t...

Small electron gun

Polishing apparatus and method for producing semiconductors using t...

Manufacturing method of semiconductor device and apparatus thereof