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Somchintana Norasetthekul
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Boxford, MA, US
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Patents Grants
last 30 patents
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Patent Grant
Techniques for forming low stress mask using implantation
Patent number
10,515,802
Issue date
Dec 24, 2019
Varian Semiconductor Equipment Associates, Inc.
Rajesh Prasad
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Etch rate modulation through ion implantation
Patent number
10,332,748
Issue date
Jun 25, 2019
Varian Semiconductor Equipment Associates, Inc.
Rajesh Prasad
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Etch rate modulation through ion implantation
Patent number
9,934,982
Issue date
Apr 3, 2018
Varian Semiconductor Equipment Associates, Inc.
Rajesh Prasad
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
TECHNIQUES FOR FORMING LOW STRESS MASK USING IMPLANTATION
Publication number
20190326116
Publication date
Oct 24, 2019
Varian Semiconductor Equipment Associates, Inc.
Rajesh Prasad
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Etch Rate Modulation Through Ion Implantation
Publication number
20180182636
Publication date
Jun 28, 2018
Varian Semiconductor Equipment Associates, Inc.
Rajesh Prasad
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Etch Rate Modulation Through Ion Implantation
Publication number
20170178914
Publication date
Jun 22, 2017
Varian Semiconductor Equipment Associates, Inc.
Rajesh Prasad
H01 - BASIC ELECTRIC ELEMENTS