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last 30 patents
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Patent Grant
Etching method, etching apparatus, and ring member
Patent number
9,441,292
Issue date
Sep 13, 2016
Tokyo Electron Limited
Ayuta Suzuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma processing apparatus, plasma processing method and storage m...
Patent number
9,252,001
Issue date
Feb 2, 2016
Tokyo Electron Limited
Ikuo Sawada
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Etching method, etching apparatus, and ring member
Patent number
8,945,413
Issue date
Feb 3, 2015
Tokyo Electron Limited
Ayuta Suzuki
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information
Patent Grant
Plasma processing apparatus, plasma processing method and storage m...
Patent number
8,636,871
Issue date
Jan 28, 2014
Tokyo Electron Limited
Ikuo Sawada
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus and method
Patent number
8,419,960
Issue date
Apr 16, 2013
Tokyo Electron Limited
Ikuo Sawada
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
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Patent Application
ETCHING METHOD, ETCHING APPARATUS, AND RING MEMBER
Publication number
20150206763
Publication date
Jul 23, 2015
TOKYO ELECTRON LIMITED
Ayuta Suzuki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Plasma Processing Apparatus, Plasma Processing Method and Storage M...
Publication number
20140138356
Publication date
May 22, 2014
TOKYO ELECTRON LIMITED
Ikuo Sawada
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCHING METHOD, ETCHING APPARATUS, AND RING MEMBER
Publication number
20130186858
Publication date
Jul 25, 2013
TOKYO ELECTRON LIMITED
Ayuta SUZUKI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PLASMA PROCESSING APPARATUS
Publication number
20110240222
Publication date
Oct 6, 2011
TOKYO ELECTRON LIMITED
Ikuo Sawada
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS AND METHOD
Publication number
20110174778
Publication date
Jul 21, 2011
TOKYO ELECTRON LIMITED
Ikuo Sawada
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
PLASMA PROCESSING APPARATUS
Publication number
20100307684
Publication date
Dec 9, 2010
TOKYO ELECTRON LIMITED
Ryosaku Ota
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
PLASMA PROCESSING APPARATUS, PLASMA PROCESSING METHOD AND STORAGE M...
Publication number
20100006543
Publication date
Jan 14, 2010
TOKYO ELECTRON LIMITED
Ikuo Sawada
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Film Forming Method and Film Forming Apparatus
Publication number
20080311313
Publication date
Dec 18, 2008
TOKYO ELECTRON LIMITED
Yasuo Kobayashi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...