Sridharan Srivatsan

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Sunnyvale, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for detecting planarization of metal films pri...
- Patent number 7,690,966
- Issue date Apr 6, 2010
- Lam Research Corporation
- Ramesh Gopalan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for detecting planarization of metal films pri...
- Patent number 7,413,988
- Issue date Aug 19, 2008
- Lam Research Corporation
- Ramesh Gopalan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for reducing or eliminating de-lamination of semiconductor w...
- Patent number 7,040,952
- Issue date May 9, 2006
- Lam Research Corporation
- Sridharan Srivatsan
- B24 - GRINDING POLISHING
Information Patent Grant
Method and apparatus for heating polishing pad
- Patent number 6,896,586
- Issue date May 24, 2005
- Lam Research Corporation
- Xuyen Pham
- B24 - GRINDING POLISHING
Information Patent Grant
Interlocking chemical mechanical polishing system
- Patent number 6,475,332
- Issue date Nov 5, 2002
- Lam Research Corporation
- John Boyd
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
TUNING VIA FACET WITH MINIMAL RIE LAG
- Publication number 20090068767
- Publication date Mar 12, 2009
- LAM RESEARCH CORPORATION
- Stephen Sirard
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for heating polishing pad
- Publication number 20030186623
- Publication date Oct 2, 2003
- Lam Research Corp.
- Xuyen Pham
- B24 - GRINDING POLISHING
Information Patent Application
Multi-step polishing system and process of using same
- Publication number 20030060145
- Publication date Mar 27, 2003
- Youlin J. Li
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
INTERLOCKING CHEMICAL MECHANICAL POLISHING SYSTEM
- Publication number 20020185467
- Publication date Dec 12, 2002
- Lam Research Corporation
- John Boyd
- B24 - GRINDING POLISHING