Srivatsa Kundalgurki

Person

Dresden, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Method for cleaning a semiconductor wafer
- Patent number 7,579,253
- Issue date Aug 25, 2009
- Infineon Technologies AG
- Srivatsa Kundalgurki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for characterizing a recess located on a surfa...
- Patent number 7,319,223
- Issue date Jan 15, 2008
- Infineon Technologies AG
- Srivatsa Kundalgurki
- G01 - MEASURING TESTING
Information Patent Grant
Enhanced megasonic based clean using an alternative cleaning chemistry
- Patent number 7,284,558
- Issue date Oct 23, 2007
- Infineon Technologies AG
- Srivatsa Kundalgurki
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Method for forming a capacitor for an integrated circuit and integr...
- Patent number 7,259,061
- Issue date Aug 21, 2007
- Infineon Technologies AG
- Srivatsa Kundalgurki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for fabricating bottom electrodes of stacked capacitor memor...
- Patent number 7,208,095
- Issue date Apr 24, 2007
- Infineon Technologies AG
- Srivatsa Kundalgurki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for fabricating a hole trench storage capacitor in a semicon...
- Patent number 7,084,029
- Issue date Aug 1, 2006
- Infineon Technologies, AG
- Srivatsa Kundalgurki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for fabricating bottom electrodes of stacked capacitor memor...
- Patent number 7,018,893
- Issue date Mar 28, 2006
- Infineon Technologies, AG
- Srivatsa Kundalgurki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for removing a resist mask with high selectivity to a carbon...
- Patent number 7,005,385
- Issue date Feb 28, 2006
- Infineon Technologies AG
- Srivatsa Kundalgurki
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Method for Cleaning a Semiconductor Wafer
- Publication number 20070184659
- Publication date Aug 9, 2007
- Infineon Technologies AG
- Srivatsa Kundalgurki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Enhanced megasonic based clean using an alternative cleaning chemistry
- Publication number 20060180172
- Publication date Aug 17, 2006
- Srivatsa Kundalgurki
- B08 - CLEANING
Information Patent Application
Method for fabricating bottom electrodes of stacked capacitor memor...
- Publication number 20060124582
- Publication date Jun 15, 2006
- Srivatsa Kundalgurki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for characterizing a recess located on a surfa...
- Publication number 20060054812
- Publication date Mar 16, 2006
- Srivatsa Kundalgurki
- G01 - MEASURING TESTING
Information Patent Application
Method for the recovery of ash rate following metal etching
- Publication number 20060032516
- Publication date Feb 16, 2006
- Infineon Technologies AG
- Srivatsa Kundalgurki
- B08 - CLEANING
Information Patent Application
Method for forming a capacitor for an integrated circuit and integr...
- Publication number 20060014343
- Publication date Jan 19, 2006
- Srivatsa Kundalgurki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for removing a resist mask with high selectivity to a carbon...
- Publication number 20050130421
- Publication date Jun 16, 2005
- Infineon Technologies AG
- Srivatsa Kundalgurki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for fabricating a hole trench storage capacitor in a semicon...
- Publication number 20050093049
- Publication date May 5, 2005
- Srivatsa Kundalgurki
- H01 - BASIC ELECTRIC ELEMENTS

Srivatsa Kundalgurki

Person

Patents Grantslast 30 patents

Method for cleaning a semiconductor wafer

Method and apparatus for characterizing a recess located on a surfa...

Enhanced megasonic based clean using an alternative cleaning chemistry

Method for forming a capacitor for an integrated circuit and integr...

Method for fabricating bottom electrodes of stacked capacitor memor...

Method for fabricating a hole trench storage capacitor in a semicon...

Method for fabricating bottom electrodes of stacked capacitor memor...

Method for removing a resist mask with high selectivity to a carbon...

Patents Applicationslast 30 patents

Method for Cleaning a Semiconductor Wafer

Enhanced megasonic based clean using an alternative cleaning chemistry

Method for fabricating bottom electrodes of stacked capacitor memor...

Method and apparatus for characterizing a recess located on a surfa...

Method for the recovery of ash rate following metal etching

Method for forming a capacitor for an integrated circuit and integr...

Method for removing a resist mask with high selectivity to a carbon...

Method for fabricating a hole trench storage capacitor in a semicon...