Stefan BANGERT

Person

Steinau, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Material deposition apparatus, method of depositing material on a s...
- Patent number 12,203,164
- Issue date Jan 21, 2025
- Applied Materials, Inc.
- Tamara Heintz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Roller for transporting a flexible substrate, vacuum processing app...
- Patent number 12,060,634
- Issue date Aug 13, 2024
- Applied Materials, Inc.
- Stefan Bangert
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Temperature-controlled shield, material deposition apparatus and me...
- Patent number 12,049,691
- Issue date Jul 30, 2024
- Applied Materials, Inc.
- Andreas Lopp
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Flanged joint and method of fluidly connecting two components
- Patent number 11,906,087
- Issue date Feb 20, 2024
- Applied Materials, Inc.
- Lukas Kremser
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Material deposition apparatus having at least one heating assembly...
- Patent number 11,905,589
- Issue date Feb 20, 2024
- Applied Materials, Inc.
- Andreas Lopp
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vapor deposition apparatus and method for coating a substrate in a...
- Patent number 11,732,345
- Issue date Aug 22, 2023
- Applied Materials, Inc.
- Stefan Bangert
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Mask arrangement for masking a substrate in a processing chamber, a...
- Patent number 11,718,904
- Issue date Aug 8, 2023
- Applied Materials, Inc.
- Stefan Bangert
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Evaporator, deposition arrangement, deposition apparatus and method...
- Patent number 11,713,506
- Issue date Aug 1, 2023
- Applied Materials, Inc.
- Stefan Keller
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Holding arrangement for supporting a substrate carrier and a mask c...
- Patent number 10,837,111
- Issue date Nov 17, 2020
- Applied Materials, Inc.
- Tommaso Vercesi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputter deposition source, apparatus for sputter deposition and met...
- Patent number 10,546,732
- Issue date Jan 28, 2020
- Applied Materials, Inc.
- Stefan Keller
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of operating a deposition apparatus, and deposition apparatus
- Patent number 10,483,465
- Issue date Nov 19, 2019
- Applied Materials, Inc.
- Jose Manuel Dieguez-Campo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Shadow mask alignment and management system
- Patent number 10,199,660
- Issue date Feb 5, 2019
- Applied Materials, Inc.
- Byung-Sung Leo Kwak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for plasma activation of evaporated precursors in a process...
- Patent number 9,905,723
- Issue date Feb 27, 2018
- Applied Materials, Inc.
- Byung-sung Kwak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System for depositing one or more layers on a substrate supported b...
- Patent number 9,899,635
- Issue date Feb 20, 2018
- Applied Materials, Inc.
- Stefan Bangert
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma enhanced thermal evaporator
- Patent number 9,450,135
- Issue date Sep 20, 2016
- Applied Materials, Inc.
- Byung-sung Kwak
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coating apparatus with rotation module
- Patent number 9,353,436
- Issue date May 31, 2016
- Applied Materials, Inc.
- Michael Koenig
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of and factories for thin-film battery manufacturing
- Patent number 9,350,040
- Issue date May 24, 2016
- Applied Materials, Inc.
- Byung-Sung Kwak
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Shadow mask alignment and management system
- Patent number 9,325,007
- Issue date Apr 26, 2016
- Applied Materials, Inc.
- Byung-Sung Leo Kwak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of and hybrid factories for thin-film battery manufacturing
- Patent number 9,130,238
- Issue date Sep 8, 2015
- Applied Materials, Inc.
- Byung-Sung Kwak
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Mask support, mask assembly, and assembly comprising a mask support...
- Patent number 8,733,277
- Issue date May 27, 2014
- Applied Materials, Inc.
- Heike Landgraf
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Magnetic holding device and method for holding a substrate
- Patent number 8,686,819
- Issue date Apr 1, 2014
- Applied Materials, Inc.
- Uwe Schuessler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Methods of and factories for thin-film battery manufacturing
- Patent number 8,464,419
- Issue date Jun 18, 2013
- Applied Materials, Inc.
- Byung-Sung Kwak
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Laminated electrically tintable windows
- Patent number 8,218,224
- Issue date Jul 10, 2012
- Applied Materials, Inc.
- Byung-Sung Leo Kwak
- B32 - LAYERED PRODUCTS
Information Patent Grant
Coater with a large-area assembly of rotatable magnetrons
- Patent number 8,137,510
- Issue date Mar 20, 2012
- Applied Materials GmbH & Co. KG
- Stefan Bangert
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Arrangement and method for removing alkali- or alkaline earth-metal...
- Patent number 8,083,859
- Issue date Dec 27, 2011
- Applied Materials, Inc.
- Stefan Bangert
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Arrangement for transporting a flat substrate in a vacuum chamber
- Patent number 7,837,799
- Issue date Nov 23, 2010
- Applied Materials GmbH & Co. KG
- Stefan Bangert
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Laminated electrically tintable windows
- Patent number 7,710,671
- Issue date May 4, 2010
- Applied Materials, Inc.
- Byung-Sung Leo Kwak
- E06 - DOORS, WINDOWS, SHUTTERS, OR ROLLER BLINDS IN GENERAL LADDERS
Information Patent Grant
Method for operating a sputter cathode with a target
- Patent number 7,575,662
- Issue date Aug 18, 2009
- Applied Materials GmbH & Co. KG
- Stefan Bangert
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Coating plant with a charging lock and device therefor
- Patent number 7,479,189
- Issue date Jan 20, 2009
- Applied Films GmbH & Co. KG
- Uwe Schüssler
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Drive mechanism for a vacuum treatment apparatus
- Patent number 7,153,367
- Issue date Dec 26, 2006
- Applied Materials GmbH & Co. KG
- Ralph Lindenberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
TEMPERATURE-CONTROLLED SHIELD, MATERIAL DEPOSITION APPARATUS AND ME...
- Publication number 20240360546
- Publication date Oct 31, 2024
- Applied Materials, Inc.
- Andreas LOPP
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EVAPORATION APPARATUS, VAPOR DEPOSITION APPARATUS, AND EVAPORATION...
- Publication number 20240117484
- Publication date Apr 11, 2024
- Applied Materials, Inc.
- Wolfgang BUSCHBECK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESSING SYSTEM FOR PROCESSING A FLEXIBLE SUBSTRATE AND METHOD OF...
- Publication number 20230137506
- Publication date May 4, 2023
- Applied Materials, Inc.
- Thomas DEPPISCH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LASER PROCESSING OF LITHIUM BATTERY WEB
- Publication number 20230113276
- Publication date Apr 13, 2023
- Applied Materials, Inc.
- Wei-Sheng LEI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ROLLER FOR TRANSPORTING A FLEXIBLE SUBSTRATE, VACUUM PROCESSING APP...
- Publication number 20220364223
- Publication date Nov 17, 2022
- Applied Materials, Inc.
- Stefan BANGERT
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ROLLER FOR TRANSPORTING A FLEXIBLE SUBSTRATE, VACUUM PROCESSING APP...
- Publication number 20220356027
- Publication date Nov 10, 2022
- Applied Materials, Inc.
- Thomas DEPPISCH
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
MATERIAL DEPOSITION APPARATUS, METHOD OF DEPOSITING MATERIAL ON A S...
- Publication number 20220341031
- Publication date Oct 27, 2022
- Applied Materials, Inc.
- Tamara HEINTZ
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EVAPORATION APPARATUS, VAPOR DEPOSITION APPARATUS, AND EVAPORATION...
- Publication number 20220090256
- Publication date Mar 24, 2022
- Applied Materials, Inc.
- Wolfgang BUSCHBECK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FLANGED JOINT AND METHOD OF FLUIDLY CONNECTING TWO COMPONENTS
- Publication number 20220090713
- Publication date Mar 24, 2022
- Applied Materials, Inc.
- Lukas KREMSER
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
MATERIAL DEPOSITION APPARATUS HAVING AT LEAST ONE HEATING ASSEMBLY...
- Publication number 20220056575
- Publication date Feb 24, 2022
- Applied Materials, Inc.
- Andreas LOPP
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESSING SYSTEM FOR PROCESSING A FLEXIBLE SUBSTRATE AND METHOD OF...
- Publication number 20220056576
- Publication date Feb 24, 2022
- Applied Materials, Inc.
- Thomas DEPPISCH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EVAPORATION SOURCE, VAPOR DEPOSITION APPARATUS, AND METHOD FOR COAT...
- Publication number 20220033958
- Publication date Feb 3, 2022
- Applied Materials, Inc.
- Thomas DEPPISCH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VAPOR DEPOSITION APPARATUS AND METHOD FOR COATING A SUBSTRATE IN A...
- Publication number 20210381097
- Publication date Dec 9, 2021
- Applied Materials, Inc.
- Stefan BANGERT
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VAPOR DEPOSITION APPARATUS AND METHOD FOR COATING A SUBSTRATE IN A...
- Publication number 20210381095
- Publication date Dec 9, 2021
- Applied Materials, Inc.
- Stefan BANGERT
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TEMPERATURE-CONTROLLED SHIELD, MATERIAL DEPOSITION APPARATUS AND ME...
- Publication number 20210381102
- Publication date Dec 9, 2021
- Applied Materials, Inc.
- Andreas LOPP
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VACUUM PROCESSING SYSTEM AND METHOD OF OPERATING A VACUUM PROCESSIN...
- Publication number 20210363627
- Publication date Nov 25, 2021
- Applied Materials, Inc.
- Stefan BANGERT
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND VACUUM SYSTEM FOR CARRIER ALIGNMENT IN A VACUUM CHAMB...
- Publication number 20210328146
- Publication date Oct 21, 2021
- Applied Materials, Inc.
- Matthias HEYMANNS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EVAPORATION SOURCE FOR ORGANIC MATERIAL, DEPOSITION APPARATUS FOR D...
- Publication number 20210269912
- Publication date Sep 2, 2021
- Applied Materials, Inc.
- Stefan BANGERT
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION SYSTEM, DEPOSITION APPARATUS, AND METHOD OF OPERATING A...
- Publication number 20200224305
- Publication date Jul 16, 2020
- Applied Materials, Inc.
- Stefan BANGERT
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS FOR VACUUM PROCESSING OF A SUBSTRATE, SYSTEM FOR VACUUM P...
- Publication number 20200083452
- Publication date Mar 12, 2020
- Applied Materials, Inc.
- Matthias HEYMANNS
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS FOR ROUTING A CARRIER IN A PROCESSING SYSTEM, A SYSTEM FO...
- Publication number 20190393064
- Publication date Dec 26, 2019
- Applied Materials, Inc.
- Sebastian Gunther ZANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
POSITIONING ARRANGEMENT FOR A SUBSTRATE CARRIER AND A MASK CARRIER,...
- Publication number 20190368024
- Publication date Dec 5, 2019
- Applied Materials, Inc.
- Matthias HEYMANNS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MATERIAL DEPOSITION ARRANGEMENT, VACUUM DEPOSITION SYSTEM AND METHO...
- Publication number 20190338412
- Publication date Nov 7, 2019
- Applied Materials, Inc.
- Srinivas SALUGU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MASK ARRANGEMENT FOR MASKING A SUBSTRATE IN A PROCESSING CHAMBER, A...
- Publication number 20190301002
- Publication date Oct 3, 2019
- Applied Materials, Inc.
- Stefan BANGERT
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHOD FOR TRANSPORTATION OF A DEPOSITION SOURCE
- Publication number 20190292653
- Publication date Sep 26, 2019
- Applied Materials, Inc.
- Stefan BANGERT
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS OF OPERATING A DEPOSITION APPARATUS, AND DEPOSITION APPARATUS
- Publication number 20190148642
- Publication date May 16, 2019
- Applied Materials, Inc.
- Jose Manuel DIEGUEZ-CAMPO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EVAPORATOR, DEPOSITION ARRANGEMENT, DEPOSITION APPARATUS AND METHOD...
- Publication number 20190071772
- Publication date Mar 7, 2019
- Applied Materials, Inc.
- Stefan KELLER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
A PROCESSING APPARATUS FOR PROCESSING DEVICES, PARTICULARLY DEVICES...
- Publication number 20190032194
- Publication date Jan 31, 2019
- Applied Materials, Inc.
- Jose Manuel DIEGUEZ-CAMPO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EVAPORATION SOURCE
- Publication number 20180245206
- Publication date Aug 30, 2018
- Applied Materials, Inc.
- Stefan BANGERT
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MEASUREMENT ASSEMBLY FOR MEASURING A DEPOSITION RATE AND METHOD THE...
- Publication number 20180187302
- Publication date Jul 5, 2018
- Applied Materials, Inc.
- Jose Manuel DIEGUEZ-CAMPO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Stefan BANGERT

Person

Patents Grantslast 30 patents

Material deposition apparatus, method of depositing material on a s...

Roller for transporting a flexible substrate, vacuum processing app...

Temperature-controlled shield, material deposition apparatus and me...

Flanged joint and method of fluidly connecting two components

Material deposition apparatus having at least one heating assembly...

Vapor deposition apparatus and method for coating a substrate in a...

Mask arrangement for masking a substrate in a processing chamber, a...

Evaporator, deposition arrangement, deposition apparatus and method...

Holding arrangement for supporting a substrate carrier and a mask c...

Sputter deposition source, apparatus for sputter deposition and met...

Methods of operating a deposition apparatus, and deposition apparatus

Shadow mask alignment and management system

Methods for plasma activation of evaporated precursors in a process...

System for depositing one or more layers on a substrate supported b...

Plasma enhanced thermal evaporator

Coating apparatus with rotation module

Methods of and factories for thin-film battery manufacturing

Shadow mask alignment and management system

Methods of and hybrid factories for thin-film battery manufacturing

Mask support, mask assembly, and assembly comprising a mask support...

Magnetic holding device and method for holding a substrate

Methods of and factories for thin-film battery manufacturing

Laminated electrically tintable windows

Coater with a large-area assembly of rotatable magnetrons

Arrangement and method for removing alkali- or alkaline earth-metal...

Arrangement for transporting a flat substrate in a vacuum chamber

Laminated electrically tintable windows

Method for operating a sputter cathode with a target

Coating plant with a charging lock and device therefor

Drive mechanism for a vacuum treatment apparatus

Patents Applicationslast 30 patents

TEMPERATURE-CONTROLLED SHIELD, MATERIAL DEPOSITION APPARATUS AND ME...

EVAPORATION APPARATUS, VAPOR DEPOSITION APPARATUS, AND EVAPORATION...

PROCESSING SYSTEM FOR PROCESSING A FLEXIBLE SUBSTRATE AND METHOD OF...

LASER PROCESSING OF LITHIUM BATTERY WEB

ROLLER FOR TRANSPORTING A FLEXIBLE SUBSTRATE, VACUUM PROCESSING APP...

ROLLER FOR TRANSPORTING A FLEXIBLE SUBSTRATE, VACUUM PROCESSING APP...

MATERIAL DEPOSITION APPARATUS, METHOD OF DEPOSITING MATERIAL ON A S...

EVAPORATION APPARATUS, VAPOR DEPOSITION APPARATUS, AND EVAPORATION...

FLANGED JOINT AND METHOD OF FLUIDLY CONNECTING TWO COMPONENTS

MATERIAL DEPOSITION APPARATUS HAVING AT LEAST ONE HEATING ASSEMBLY...

PROCESSING SYSTEM FOR PROCESSING A FLEXIBLE SUBSTRATE AND METHOD OF...

EVAPORATION SOURCE, VAPOR DEPOSITION APPARATUS, AND METHOD FOR COAT...

VAPOR DEPOSITION APPARATUS AND METHOD FOR COATING A SUBSTRATE IN A...

VAPOR DEPOSITION APPARATUS AND METHOD FOR COATING A SUBSTRATE IN A...

TEMPERATURE-CONTROLLED SHIELD, MATERIAL DEPOSITION APPARATUS AND ME...

VACUUM PROCESSING SYSTEM AND METHOD OF OPERATING A VACUUM PROCESSIN...

APPARATUS AND VACUUM SYSTEM FOR CARRIER ALIGNMENT IN A VACUUM CHAMB...

EVAPORATION SOURCE FOR ORGANIC MATERIAL, DEPOSITION APPARATUS FOR D...

DEPOSITION SYSTEM, DEPOSITION APPARATUS, AND METHOD OF OPERATING A...

APPARATUS FOR VACUUM PROCESSING OF A SUBSTRATE, SYSTEM FOR VACUUM P...

APPARATUS FOR ROUTING A CARRIER IN A PROCESSING SYSTEM, A SYSTEM FO...

POSITIONING ARRANGEMENT FOR A SUBSTRATE CARRIER AND A MASK CARRIER,...

MATERIAL DEPOSITION ARRANGEMENT, VACUUM DEPOSITION SYSTEM AND METHO...

MASK ARRANGEMENT FOR MASKING A SUBSTRATE IN A PROCESSING CHAMBER, A...

APPARATUS AND METHOD FOR TRANSPORTATION OF A DEPOSITION SOURCE

METHODS OF OPERATING A DEPOSITION APPARATUS, AND DEPOSITION APPARATUS

EVAPORATOR, DEPOSITION ARRANGEMENT, DEPOSITION APPARATUS AND METHOD...

A PROCESSING APPARATUS FOR PROCESSING DEVICES, PARTICULARLY DEVICES...

EVAPORATION SOURCE

MEASUREMENT ASSEMBLY FOR MEASURING A DEPOSITION RATE AND METHOD THE...