Stefan Finkbeiner

Person

Gomaringen, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Chip module and method for producing a chip module having plains of...
- Patent number 8,198,130
- Issue date Jun 12, 2012
- Robert Bosch GmbH
- Stefan Finkbeiner
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micropump having a pump diaphragm and a polysilicon layer
- Patent number 7,740,459
- Issue date Jun 22, 2010
- Robert Bosch GmbH
- Matthias Fuertsch
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information Patent Grant
Electrical through-plating of semiconductor chips
- Patent number 7,572,660
- Issue date Aug 11, 2009
- Robert Bosch GmbH
- Hubert Benzel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing a micromechanical sensor element
- Patent number 7,572,661
- Issue date Aug 11, 2009
- Robert Bosch GmbH
- Hubert Benzel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Sensor element with trenched cavity
- Patent number 7,354,786
- Issue date Apr 8, 2008
- Robert Bosch GmbH
- Hubert Benzel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing a membrane
- Patent number 6,511,913
- Issue date Jan 28, 2003
- Robert Bosch GmbH
- Hubert Benzel
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
Micromechanical Capacitive Sensor Element
- Publication number 20110108932
- Publication date May 12, 2011
- Hubert Benzel
- G01 - MEASURING TESTING
Information Patent Application
CHIP MODULE AND METHOD FOR PRODUCING A CHIP MODULE
- Publication number 20100252939
- Publication date Oct 7, 2010
- Stefan Finkbeiner
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Microfluidic device, in particular for metering a fluid or for the...
- Publication number 20080041151
- Publication date Feb 21, 2008
- Matthias Fuertsch
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
Micronozzle plate and manufacturing method
- Publication number 20070128755
- Publication date Jun 7, 2007
- Matthias Fuertsch
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for the production of a micromechanical part preferably used...
- Publication number 20060186085
- Publication date Aug 24, 2006
- Matthias Fuertsch
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information Patent Application
Micromechanical sensor element
- Publication number 20060063293
- Publication date Mar 23, 2006
- Hubert Benzel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Sensor element with trenched cavity
- Publication number 20060057816
- Publication date Mar 16, 2006
- Hubert Benzel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method and micromechanical component
- Publication number 20060037932
- Publication date Feb 23, 2006
- Gerhard Lammel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Microstructured infrared sensor and method for its manufacture
- Publication number 20060016995
- Publication date Jan 26, 2006
- Nils Kummer
- G01 - MEASURING TESTING
Information Patent Application
Electrical through-plating of semiconductor chips
- Publication number 20050133880
- Publication date Jun 23, 2005
- Hubert Benzel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Fluid flow sensor
- Publication number 20050022593
- Publication date Feb 3, 2005
- Jochen Franz
- G01 - MEASURING TESTING

Stefan Finkbeiner

Person

Patents Grantslast 30 patents

Chip module and method for producing a chip module having plains of...

Micropump having a pump diaphragm and a polysilicon layer

Electrical through-plating of semiconductor chips

Method for manufacturing a micromechanical sensor element

Sensor element with trenched cavity

Method for manufacturing a membrane

Patents Applicationslast 30 patents

Micromechanical Capacitive Sensor Element

CHIP MODULE AND METHOD FOR PRODUCING A CHIP MODULE

Microfluidic device, in particular for metering a fluid or for the...

Micronozzle plate and manufacturing method

Method for the production of a micromechanical part preferably used...

Micromechanical sensor element

Sensor element with trenched cavity

Method and micromechanical component

Microstructured infrared sensor and method for its manufacture

Electrical through-plating of semiconductor chips

Fluid flow sensor