Stefan Lanio

Person

Erding, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Secondary charged particle imaging system
- Patent number 11,094,501
- Issue date Aug 17, 2021
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Matthias Firnkes
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device, objective lens module, electrode devi...
- Patent number 10,991,544
- Issue date Apr 27, 2021
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Matthias Firnkes
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Simplified particle emitter and method of operating thereof
- Patent number 10,699,867
- Issue date Jun 30, 2020
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Stefan Lanio
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of operating a charged particle beam specimen inspection system
- Patent number 10,522,327
- Issue date Dec 31, 2019
- Applied Materials Israel Ltd.
- Gilad Erel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
On-axis illumination and alignment for charge control during charge...
- Patent number 10,168,614
- Issue date Jan 1, 2019
- Applied Materials Israel Ltd.
- Alex Goldenshtein
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System and method for imaging a secondary charged particle beam wit...
- Patent number 10,103,004
- Issue date Oct 16, 2018
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Matthias Firnkes
- G01 - MEASURING TESTING
Information Patent Grant
Charged particle beam specimen inspection system and method for ope...
- Patent number 10,056,228
- Issue date Aug 21, 2018
- Applied Materials Israel Ltd.
- Gilad Erel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System for imaging a secondary charged particle beam with adaptive...
- Patent number 9,953,805
- Issue date Apr 24, 2018
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Matthias Firnkes
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Signal charged particle deflection device, signal charged particle...
- Patent number 9,805,908
- Issue date Oct 31, 2017
- Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Matthias Firnkes
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thermal field emitter tip, electron beam device including a thermal...
- Patent number 9,697,983
- Issue date Jul 4, 2017
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Stefan Lanio
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device, system for a charged particle beam de...
- Patent number 9,666,406
- Issue date May 30, 2017
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Stefan Lanio
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System for imaging a signal charged particle beam, method for imagi...
- Patent number 9,666,405
- Issue date May 30, 2017
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Stefan Lanio
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Beam separator device, charged particle beam device and methods of...
- Patent number 9,472,373
- Issue date Oct 18, 2016
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Stefan Lanio
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam device with dispersion compensation, and method of op...
- Patent number 9,048,068
- Issue date Jun 2, 2015
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik GmbH
- Stefan Lanio
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Switchable multi perspective detector, optics therefore and method...
- Patent number 8,963,083
- Issue date Feb 24, 2015
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Matthias Firnkes
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Contamination reduction electrode for particle detector
- Patent number 8,963,084
- Issue date Feb 24, 2015
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik GmbH
- Stefan Lanio
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Octopole device and method for spot size improvement
- Patent number 8,816,270
- Issue date Aug 26, 2014
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Aleksandra Kramer
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Switchable multi perspective detector, optics therefor and method o...
- Patent number 8,723,117
- Issue date May 13, 2014
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Stefan Lanio
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Shielding member having a charge control electrode, and a charged p...
- Patent number 8,563,927
- Issue date Oct 22, 2013
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Dieter Winkler
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Multi-axis lens, beam system making use of the compound lens, and m...
- Patent number 8,481,958
- Issue date Jul 9, 2013
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik GmbH
- Stefan Lanio
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Achromatic beam deflector, achromatic beam separator, charged parti...
- Patent number 8,373,136
- Issue date Feb 12, 2013
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Gerald Schoenecker
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-axis lens, beam system making use of the compound lens, and m...
- Patent number 8,158,954
- Issue date Apr 17, 2012
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Stefan Lanio
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Charged particle beam device with aperture
- Patent number 7,763,866
- Issue date Jul 27, 2010
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Jürgen Frosien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Double stage charged particle beam energy width reduction system fo...
- Patent number 7,679,054
- Issue date Mar 16, 2010
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Jürgen Frosien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-axis lens, beam system making use of the compound lens, and m...
- Patent number 7,576,917
- Issue date Aug 18, 2009
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Stefan Lanio
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam energy width reduction system for charged par...
- Patent number 7,507,956
- Issue date Mar 24, 2009
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Jürgen Frosien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Single stage charged particle beam energy width reduction system fo...
- Patent number 7,468,517
- Issue date Dec 23, 2008
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiternruftechnik mbH
- Jürgen Frosien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Analyzing system and charged particle beam device
- Patent number 7,439,500
- Issue date Oct 21, 2008
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Juergen Frosien
- G01 - MEASURING TESTING
Information Patent Grant
High current density particle beam system
- Patent number 7,335,894
- Issue date Feb 26, 2008
- ICT Integrated Circuit Testing Gesselschaft
- Juergen Frosien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Particle beam apparatus
- Patent number 6,667,478
- Issue date Dec 23, 2003
- Advantest Corp.
- Jurgen Frosien
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SECONDARY CHARGED PARTICLE IMAGING SYSTEM
- Publication number 20210151284
- Publication date May 20, 2021
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Matthias Firnkes
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM DEVICE, OBJECTIVE LENS MODULE, ELECTRODE DEVI...
- Publication number 20200381208
- Publication date Dec 3, 2020
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Matthias Firnkes
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ON-AXIS ILLUMINATION AND ALIGNMENT FOR CHARGE CONTROL DURING CHARGE...
- Publication number 20180364564
- Publication date Dec 20, 2018
- APPLIED MATERIALS ISRAEL LTD.
- Alex Goldenshtein
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD OF OPERATING A CHARGED PARTICLE BEAM SPECIMEN INSPECTION SYSTEM
- Publication number 20180330919
- Publication date Nov 15, 2018
- Applied Materials Isarael Ltd.
- Gilad Erel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SIMPLIFIED PARTICLE EMITTER AND METHOD OF OPERATING THEREOF
- Publication number 20180254165
- Publication date Sep 6, 2018
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Stefan LANIO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM FOR IMAGING A SECONDARY CHARGED PARTICLE BEAM WITH ADAPTIVE...
- Publication number 20170076910
- Publication date Mar 16, 2017
- ICT Integrated Circuit Testing Gesellscaft für Halbleiterprüftechnik mbH
- Matthias Firnkes
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR IMAGING A SECONDARY CHARGED PARTICLE BEAM WIT...
- Publication number 20170003235
- Publication date Jan 5, 2017
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Matthias Firnkes
- G01 - MEASURING TESTING
Information Patent Application
SIGNAL CHARGED PARTICLE DEFLECTION DEVICE, SIGNAL CHARGED PARTICLE...
- Publication number 20160240347
- Publication date Aug 18, 2016
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Matthias Firnkes
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SCANNING CHARGED PARTICLE BEAM DEVICE HAVING AN ABERRATION CORRECTI...
- Publication number 20160189916
- Publication date Jun 30, 2016
- APPLIED MATERIALS ISRAEL LTD.
- Jürgen Frosien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM SPECIMEN INSPECTION SYSTEM AND METHOD FOR OPE...
- Publication number 20160035537
- Publication date Feb 4, 2016
- APPLIED MATERIALS ISRAEL, LTD.
- Gilad Erel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SECONDARY ELECTRON OPTICS AND DETECTION DEVICE
- Publication number 20150228452
- Publication date Aug 13, 2015
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik GmbH
- Stefan LANIO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SWITCHABLE MULTI PERSPECTIVE DETECTOR, OPTICS THEREFORE AND METHOD...
- Publication number 20150021474
- Publication date Jan 22, 2015
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik GmbH
- Matthias FIRNKES
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONTAMINATION REDUCTION ELECTRODE FOR PARTICLE DETECTOR
- Publication number 20140191127
- Publication date Jul 10, 2014
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik GmbH
- Stefan Lanio
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SECONDARY ELECTRON OPTICS AND DETECTION DEVICE
- Publication number 20140175277
- Publication date Jun 26, 2014
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik GmbH
- Stefan Lanio
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OCTOPOLE DEVICE AND METHOD FOR SPOT SIZE IMPROVEMENT
- Publication number 20140103201
- Publication date Apr 17, 2014
- Aleksandra Kramer
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
CONTAMINATION REDUCTION ELECTRODE FOR PARTICLE DETECTOR
- Publication number 20130320228
- Publication date Dec 5, 2013
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik GmbH
- Stefan Lanio
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SWITCHABLE MULTI PERSPECTIVE DETECTOR, OPTICS THEREFOR AND METHOD O...
- Publication number 20130270438
- Publication date Oct 17, 2013
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik GmbH
- Stefan LANIO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SHIELDING MEMBER HAVING A CHARGE CONTROL ELECTRODE, AND A CHARGED P...
- Publication number 20130026385
- Publication date Jan 31, 2013
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Dieter WINKLER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SIMPLIFIED PARTICLE EMITTER AND METHOD OF OPERATING THEREOF
- Publication number 20120091359
- Publication date Apr 19, 2012
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Stefan LANIO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-AXIS LENS, BEAM SYSTEM MAKING USE OF THE COMPOUND LENS, AND M...
- Publication number 20120037813
- Publication date Feb 16, 2012
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Stefan LANIO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON BEAM DEVICE WITH DISPERSION COMPENSATION, AND METHOD OF OP...
- Publication number 20110272577
- Publication date Nov 10, 2011
- ICT Integrated Circuit Testing Gesellschaft fuer Halbleiterprueftechnik GmbH
- Stefan LANIO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ACHROMATIC BEAM DEFLECTOR, ACHROMATIC BEAM SEPARATOR, CHARGED PARTI...
- Publication number 20110089322
- Publication date Apr 21, 2011
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Gerald SCHOENECKER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-AXIS LENS, BEAM SYSTEM MAKING USE OF THE COMPOUND LENS, AND M...
- Publication number 20090261266
- Publication date Oct 22, 2009
- Stefan Lanio
- B82 - NANO-TECHNOLOGY
Information Patent Application
ADJUSTABLE APERTURE ELEMENT FOR PARTICLE BEAM DEVICE, METHOD OF OPE...
- Publication number 20080135786
- Publication date Jun 12, 2008
- Stefan Lanio
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam Device with Aperture
- Publication number 20070257207
- Publication date Nov 8, 2007
- Jurgen Frosien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Double Stage Charged Particle Beam Energy Width Reduction System Fo...
- Publication number 20070200069
- Publication date Aug 30, 2007
- Jürgen Frosien
- B82 - NANO-TECHNOLOGY
Information Patent Application
Single stage charged particle beam energy width reduction system fo...
- Publication number 20070158561
- Publication date Jul 12, 2007
- Jurgen Frosien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged particle beam energy width reduction system for charged par...
- Publication number 20070069150
- Publication date Mar 29, 2007
- Jürgen Frosien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Analyzing system and charged particle beam device
- Publication number 20060226361
- Publication date Oct 12, 2006
- Juergen Frosien
- G01 - MEASURING TESTING
Information Patent Application
Stabilized emitter and method for stabilizing same
- Publication number 20060226753
- Publication date Oct 12, 2006
- Pavel Adamec
- H01 - BASIC ELECTRIC ELEMENTS

Stefan Lanio

Person

Patents Grantslast 30 patents

Secondary charged particle imaging system

Charged particle beam device, objective lens module, electrode devi...

Simplified particle emitter and method of operating thereof

Method of operating a charged particle beam specimen inspection system

On-axis illumination and alignment for charge control during charge...

System and method for imaging a secondary charged particle beam wit...

Charged particle beam specimen inspection system and method for ope...

System for imaging a secondary charged particle beam with adaptive...

Signal charged particle deflection device, signal charged particle...

Thermal field emitter tip, electron beam device including a thermal...

Charged particle beam device, system for a charged particle beam de...

System for imaging a signal charged particle beam, method for imagi...

Beam separator device, charged particle beam device and methods of...

Electron beam device with dispersion compensation, and method of op...

Switchable multi perspective detector, optics therefore and method...

Contamination reduction electrode for particle detector

Octopole device and method for spot size improvement

Switchable multi perspective detector, optics therefor and method o...

Shielding member having a charge control electrode, and a charged p...

Multi-axis lens, beam system making use of the compound lens, and m...

Achromatic beam deflector, achromatic beam separator, charged parti...

Multi-axis lens, beam system making use of the compound lens, and m...

Charged particle beam device with aperture

Double stage charged particle beam energy width reduction system fo...

Multi-axis lens, beam system making use of the compound lens, and m...

Charged particle beam energy width reduction system for charged par...

Single stage charged particle beam energy width reduction system fo...

Analyzing system and charged particle beam device

High current density particle beam system

Particle beam apparatus

Patents Applicationslast 30 patents

SECONDARY CHARGED PARTICLE IMAGING SYSTEM

CHARGED PARTICLE BEAM DEVICE, OBJECTIVE LENS MODULE, ELECTRODE DEVI...

ON-AXIS ILLUMINATION AND ALIGNMENT FOR CHARGE CONTROL DURING CHARGE...

METHOD OF OPERATING A CHARGED PARTICLE BEAM SPECIMEN INSPECTION SYSTEM

SIMPLIFIED PARTICLE EMITTER AND METHOD OF OPERATING THEREOF

SYSTEM FOR IMAGING A SECONDARY CHARGED PARTICLE BEAM WITH ADAPTIVE...

SYSTEM AND METHOD FOR IMAGING A SECONDARY CHARGED PARTICLE BEAM WIT...

SIGNAL CHARGED PARTICLE DEFLECTION DEVICE, SIGNAL CHARGED PARTICLE...

SCANNING CHARGED PARTICLE BEAM DEVICE HAVING AN ABERRATION CORRECTI...

CHARGED PARTICLE BEAM SPECIMEN INSPECTION SYSTEM AND METHOD FOR OPE...

SECONDARY ELECTRON OPTICS AND DETECTION DEVICE

SWITCHABLE MULTI PERSPECTIVE DETECTOR, OPTICS THEREFORE AND METHOD...

CONTAMINATION REDUCTION ELECTRODE FOR PARTICLE DETECTOR

SECONDARY ELECTRON OPTICS AND DETECTION DEVICE

OCTOPOLE DEVICE AND METHOD FOR SPOT SIZE IMPROVEMENT

CONTAMINATION REDUCTION ELECTRODE FOR PARTICLE DETECTOR

SWITCHABLE MULTI PERSPECTIVE DETECTOR, OPTICS THEREFOR AND METHOD O...

SHIELDING MEMBER HAVING A CHARGE CONTROL ELECTRODE, AND A CHARGED P...

SIMPLIFIED PARTICLE EMITTER AND METHOD OF OPERATING THEREOF

MULTI-AXIS LENS, BEAM SYSTEM MAKING USE OF THE COMPOUND LENS, AND M...

ELECTRON BEAM DEVICE WITH DISPERSION COMPENSATION, AND METHOD OF OP...

ACHROMATIC BEAM DEFLECTOR, ACHROMATIC BEAM SEPARATOR, CHARGED PARTI...

MULTI-AXIS LENS, BEAM SYSTEM MAKING USE OF THE COMPOUND LENS, AND M...

ADJUSTABLE APERTURE ELEMENT FOR PARTICLE BEAM DEVICE, METHOD OF OPE...

Charged Particle Beam Device with Aperture

Double Stage Charged Particle Beam Energy Width Reduction System Fo...

Single stage charged particle beam energy width reduction system fo...

Charged particle beam energy width reduction system for charged par...

Analyzing system and charged particle beam device

Stabilized emitter and method for stabilizing same