Stephan H. Wolf

Person

San Luis Obispo, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Endpoint detection system for wafer polishing
- Patent number 7,918,712
- Issue date Apr 5, 2011
- Strasbaugh
- Stephan H. Wolf
- B24 - GRINDING POLISHING
Information Patent Grant
Endpoint detection system for wafer polishing
- Patent number 7,195,541
- Issue date Mar 27, 2007
- Strasbaugh
- Stephan H. Wolf
- B24 - GRINDING POLISHING
Information Patent Grant
Optical coupler hub for chemical-mechanical-planarization polishing...
- Patent number 7,074,110
- Issue date Jul 11, 2006
- Stephan H Wolf
- B24 - GRINDING POLISHING
Information Patent Grant
Endpoint detection system for wafer polishing
- Patent number 7,052,366
- Issue date May 30, 2006
- Strasbaugh
- Stephan H. Wolf
- B24 - GRINDING POLISHING
Information Patent Grant
Fiber optical sensor embedded into the polishing pad for in-situ, r...
- Patent number 6,780,085
- Issue date Aug 24, 2004
- Stephan H. Wolf
- B24 - GRINDING POLISHING
Information Patent Grant
Endpoint detection system for wafer polishing
- Patent number 6,695,681
- Issue date Feb 24, 2004
- Strasbaugh
- Stephan H. Wolf
- B24 - GRINDING POLISHING
Information Patent Grant
Optical view port for chemical mechanical planarization endpoint de...
- Patent number 6,488,568
- Issue date Dec 3, 2002
- Lam Research Corporation
- Randolph E. Treur
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing pad with built-in optical sensor
- Patent number 6,485,354
- Issue date Nov 26, 2002
- Strasbaugh
- Stephan H. Wolf
- B24 - GRINDING POLISHING
Information Patent Grant
Optical view port for chemical mechanical planarization endpoint de...
- Patent number 6,146,242
- Issue date Nov 14, 2000
- Strasbaugh, Inc.
- Randolph E. Treur
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
ENDPOINT DETECTION SYSTEM FOR WAFER POLISHING
- Publication number 20100144244
- Publication date Jun 10, 2010
- Stephan H. Wolf
- B24 - GRINDING POLISHING
Information Patent Application
Endpoint detection system for wafer polishing
- Publication number 20090061734
- Publication date Mar 5, 2009
- Strasbaugh
- Stephan H. Wolf
- B24 - GRINDING POLISHING
Information Patent Application
Endpoint detection system for wafer polishing
- Publication number 20060217038
- Publication date Sep 28, 2006
- Strasbaugh
- Stephan H. Wolf
- B24 - GRINDING POLISHING
Information Patent Application
Endpoint detection system for wafer polishing
- Publication number 20040229545
- Publication date Nov 18, 2004
- Strasbaugh
- Stephan H. Wolf
- B24 - GRINDING POLISHING
Information Patent Application
Optical coupler hub for chemical-mechanical-planarization polishing...
- Publication number 20030190866
- Publication date Oct 9, 2003
- Stephan H. Wolf
- B24 - GRINDING POLISHING
Information Patent Application
Endpoint detection system for wafer polishing
- Publication number 20030109196
- Publication date Jun 12, 2003
- Strasbaugh
- Stephan H. Wolf
- B24 - GRINDING POLISHING
Information Patent Application
Fiber optical sensor embedded into the polishing pad for in-situ, r...
- Publication number 20030100243
- Publication date May 29, 2003
- Stephan H. Wolf
- B24 - GRINDING POLISHING

Stephan H. Wolf

Person

Patents Grantslast 30 patents

Endpoint detection system for wafer polishing

Endpoint detection system for wafer polishing

Optical coupler hub for chemical-mechanical-planarization polishing...

Endpoint detection system for wafer polishing

Fiber optical sensor embedded into the polishing pad for in-situ, r...

Endpoint detection system for wafer polishing

Optical view port for chemical mechanical planarization endpoint de...

Polishing pad with built-in optical sensor

Optical view port for chemical mechanical planarization endpoint de...

Patents Applicationslast 30 patents

ENDPOINT DETECTION SYSTEM FOR WAFER POLISHING

Endpoint detection system for wafer polishing

Endpoint detection system for wafer polishing

Endpoint detection system for wafer polishing

Optical coupler hub for chemical-mechanical-planarization polishing...

Endpoint detection system for wafer polishing

Fiber optical sensor embedded into the polishing pad for in-situ, r...