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Extreme ultraviolet light source
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Patent number 7,368,741
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Issue date May 6, 2008
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Cymer, Inc.
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Stephan T. Melnychuk
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H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
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Extreme ultraviolet light source
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Patent number 6,972,421
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Issue date Dec 6, 2005
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Cymer, Inc.
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Stephan T. Melnychuk
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H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
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High current proton beam target
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Patent number 6,215,851
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Issue date Apr 10, 2001
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Northrop Grumman Corporation
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Raymond John Meilunas
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H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR