Stephen C. Schultz

Person

Gilbert, AZ, US

People

Patents Grantslast 30 patents

Information Patent Grant
Chemical mechanical polishing with multi-zone slurry delivery
- Patent number 8,128,461
- Issue date Mar 6, 2012
- Novellus Systems, Inc.
- Fergal O'Moore
- B24 - GRINDING POLISHING
Information Patent Grant
CMP apparatuses with polishing assemblies that provide for the pass...
- Patent number 7,632,170
- Issue date Dec 15, 2009
- Novellus Systems, Inc.
- Fergal O'Moore
- B24 - GRINDING POLISHING
Information Patent Grant
Carrier head for workpiece planarization/polishing
- Patent number 7,402,098
- Issue date Jul 22, 2008
- Novellus Systems, Inc.
- Brian Severson
- B24 - GRINDING POLISHING
Information Patent Grant
Carrier head for workpiece planarization/polishing
- Patent number 7,335,092
- Issue date Feb 26, 2008
- Novellus Systems, Inc.
- Brian Severson
- B24 - GRINDING POLISHING
Information Patent Grant
Work piece carrier with adjustable pressure zones and barriers and...
- Patent number 7,140,956
- Issue date Nov 28, 2006
- SpeedFam-IPEC Corporation
- Nikolay N. Korovin
- B24 - GRINDING POLISHING
Information Patent Grant
Platen and manifold for polishing workpieces
- Patent number 7,040,957
- Issue date May 9, 2006
- Novellus Systems Inc.
- Stephen C. Schultz
- B24 - GRINDING POLISHING
Information Patent Grant
Work piece carrier with adjustable pressure zones and barriers and...
- Patent number 7,025,664
- Issue date Apr 11, 2006
- SpeedFam-IPEC Corporation
- Nikolay N. Korovin
- B24 - GRINDING POLISHING
Information Patent Grant
Work piece carrier with adjustable pressure zones and barriers and...
- Patent number 7,014,541
- Issue date Mar 21, 2006
- SpeedFam-IPEC Corporation
- Nikolay N. Korovin
- B24 - GRINDING POLISHING
Information Patent Grant
Method for controlling a chemical mechanical polishing (CMP) operation
- Patent number 6,932,671
- Issue date Aug 23, 2005
- Novellus Systems, Inc.
- Nikolay Korovin
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing pad window for a chemical-mechanical polishing tool
- Patent number 6,878,039
- Issue date Apr 12, 2005
- SpeedFam-IPEC Corporation
- Charles Chiun-Chieh Yang
- B24 - GRINDING POLISHING
Information Patent Grant
Method for processing a work piece in a multi-zonal processing appa...
- Patent number 6,790,123
- Issue date Sep 14, 2004
- SpeedFam-IPEC Corporation
- Nikolay Korovin
- B24 - GRINDING POLISHING
Information Patent Grant
Laminated wear ring
- Patent number 6,758,939
- Issue date Jul 6, 2004
- SpeedFam-IPEC Corporation
- David Marquardt
- B24 - GRINDING POLISHING
Information Patent Grant
Work piece carrier with adjustable pressure zones and barriers and...
- Patent number 6,659,850
- Issue date Dec 9, 2003
- SpeedFam-IPEC Corporation
- Nikolay N. Korovin
- B24 - GRINDING POLISHING
Information Patent Grant
Workpiece carrier with adjustable pressure zones and barriers
- Patent number 6,612,903
- Issue date Sep 2, 2003
- SpeedFam-IPEC Corporation
- Nikolay N. Korovin
- B24 - GRINDING POLISHING
Information Patent Grant
Apparatus for distributing a fluid through a polishing pad
- Patent number 6,599,175
- Issue date Jul 29, 2003
- Speedfam-IPECA Corporation
- John D. Herb
- B24 - GRINDING POLISHING
Information Patent Grant
Method and apparatus for sensing a wafer in a carrier
- Patent number 6,568,991
- Issue date May 27, 2003
- SpeedFam-IPEC Corporation
- John D. Herb
- B24 - GRINDING POLISHING
Information Patent Grant
Carrier head with reduced moment wear ring
- Patent number 6,540,592
- Issue date Apr 1, 2003
- SpeedFam-IPEC Corporation
- Stephen C. Schultz
- B24 - GRINDING POLISHING
Information Patent Grant
Oscillating orbital polisher and method
- Patent number 6,500,055
- Issue date Dec 31, 2002
- SpeedFam-IPEC Corporation
- John A. Adams
- B24 - GRINDING POLISHING
Information Patent Grant
Carrier including a multi-volume diaphragm for polishing a semicond...
- Patent number 6,447,379
- Issue date Sep 10, 2002
- SpeedFam-IPEC Corporation
- Robert D. Gromko
- B24 - GRINDING POLISHING
Information Patent Grant
Workpiece carrier with adjustable pressure zones and barriers
- Patent number 6,390,905
- Issue date May 21, 2002
- SpeedFam-IPEC Corporation
- Nikolay N. Korovin
- B24 - GRINDING POLISHING
Information Patent Grant
Carrier having pistons for distributing a pressing force on the bac...
- Patent number 6,336,853
- Issue date Jan 8, 2002
- SpeedFam-IPEC Corporation
- Stephen C. Schultz
- B24 - GRINDING POLISHING
Information Patent Grant
Oscillating orbital polisher and method
- Patent number 6,184,139
- Issue date Feb 6, 2001
- SpeedFam-IPEC Corporation
- John A. Adams
- B24 - GRINDING POLISHING
Information Patent Grant
Pneumatic polishing head for CMP apparatus
- Patent number 5,643,061
- Issue date Jul 1, 1997
- Integrated Process Equipment Corporation
- Paul David Jackson
- B24 - GRINDING POLISHING
Information Patent Grant
Conditioner for a polishing pad and method therefor
- Patent number 5,456,627
- Issue date Oct 10, 1995
- Westech Systems, Inc.
- Paul D. Jackson
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
CMP APPARATUSES WITH POLISHING ASSEMBLIES THAT PROVIDE FOR THE PASS...
- Publication number 20080318495
- Publication date Dec 25, 2008
- Novellus Systems, Inc.
- Fergal O'Moore
- B24 - GRINDING POLISHING
Information Patent Application
CARRIER HEAD FOR WORKPIECE PLANARIZATION/POLISHING
- Publication number 20080102732
- Publication date May 1, 2008
- Novellus Systems, Inc.
- Brian Severson
- B24 - GRINDING POLISHING
Information Patent Application
INTEGRATED PRESSURE CONTROL SYSTEM FOR WORKPIECE CARRIER
- Publication number 20050070205
- Publication date Mar 31, 2005
- SpeedFam-IPEC Corporation
- Nikolay Korovin
- B24 - GRINDING POLISHING
Information Patent Application
Work piece carrier with adjustable pressure zones and barriers and...
- Publication number 20040259476
- Publication date Dec 23, 2004
- Nikolay N. Korovin
- B24 - GRINDING POLISHING
Information Patent Application
Work piece carrier with adjustable pressure zones and barriers and...
- Publication number 20040067717
- Publication date Apr 8, 2004
- Nikolay N. Korovin
- B24 - GRINDING POLISHING
Information Patent Application
Platen and manifold for polishing workpieces
- Publication number 20040033759
- Publication date Feb 19, 2004
- Stephen C. Schultz
- B24 - GRINDING POLISHING
Information Patent Application
Method for processing a work piece in a multi-zonal processing appa...
- Publication number 20030216104
- Publication date Nov 20, 2003
- Nikolay Korovin
- B24 - GRINDING POLISHING
Information Patent Application
Polishing pad window for a chemical-mechanical polishing tool
- Publication number 20030143925
- Publication date Jul 31, 2003
- Charles Chiun-Chieh Yang
- B24 - GRINDING POLISHING
Information Patent Application
Front-reference carrier on orbital solid platen
- Publication number 20030077986
- Publication date Apr 24, 2003
- SpeedFam-IPEC Corporation
- Stephen C. Schultz
- B24 - GRINDING POLISHING
Information Patent Application
Laminated wear ring
- Publication number 20030041967
- Publication date Mar 6, 2003
- SpeedFam-IPEC Corporation
- David Marquardt
- B24 - GRINDING POLISHING
Information Patent Application
Method and apparatus for sensing a wafer in a carrier
- Publication number 20030045205
- Publication date Mar 6, 2003
- John D. Herb
- B24 - GRINDING POLISHING
Information Patent Application
Apparatus for distributing a fluid through a polishing pad
- Publication number 20030027506
- Publication date Feb 6, 2003
- John D. Herb
- B24 - GRINDING POLISHING
Information Patent Application
Work piece carrier with adjustable pressure zones and barriers and...
- Publication number 20020111122
- Publication date Aug 15, 2002
- Nikolay N. Korovin
- B24 - GRINDING POLISHING
Information Patent Application
Workpiece carrier with adjustable pressure zones and barriers
- Publication number 20020061716
- Publication date May 23, 2002
- SpeedFam-IPEC Corporation
- Nikolay N. Korovin
- B24 - GRINDING POLISHING

Stephen C. Schultz

Person

Patents Grantslast 30 patents

Chemical mechanical polishing with multi-zone slurry delivery

CMP apparatuses with polishing assemblies that provide for the pass...

Carrier head for workpiece planarization/polishing

Carrier head for workpiece planarization/polishing

Work piece carrier with adjustable pressure zones and barriers and...

Platen and manifold for polishing workpieces

Work piece carrier with adjustable pressure zones and barriers and...

Work piece carrier with adjustable pressure zones and barriers and...

Method for controlling a chemical mechanical polishing (CMP) operation

Polishing pad window for a chemical-mechanical polishing tool

Method for processing a work piece in a multi-zonal processing appa...

Laminated wear ring

Work piece carrier with adjustable pressure zones and barriers and...

Workpiece carrier with adjustable pressure zones and barriers

Apparatus for distributing a fluid through a polishing pad

Method and apparatus for sensing a wafer in a carrier

Carrier head with reduced moment wear ring

Oscillating orbital polisher and method

Carrier including a multi-volume diaphragm for polishing a semicond...

Workpiece carrier with adjustable pressure zones and barriers

Carrier having pistons for distributing a pressing force on the bac...

Oscillating orbital polisher and method

Pneumatic polishing head for CMP apparatus

Conditioner for a polishing pad and method therefor

Patents Applicationslast 30 patents

CMP APPARATUSES WITH POLISHING ASSEMBLIES THAT PROVIDE FOR THE PASS...

CARRIER HEAD FOR WORKPIECE PLANARIZATION/POLISHING

INTEGRATED PRESSURE CONTROL SYSTEM FOR WORKPIECE CARRIER

Work piece carrier with adjustable pressure zones and barriers and...

Work piece carrier with adjustable pressure zones and barriers and...

Platen and manifold for polishing workpieces

Method for processing a work piece in a multi-zonal processing appa...

Polishing pad window for a chemical-mechanical polishing tool

Front-reference carrier on orbital solid platen

Laminated wear ring

Method and apparatus for sensing a wafer in a carrier

Apparatus for distributing a fluid through a polishing pad

Work piece carrier with adjustable pressure zones and barriers and...

Workpiece carrier with adjustable pressure zones and barriers