Steve Zuniga

Person

Soquel, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Wafer processing tools and methods thereof
- Patent number 12,142,513
- Issue date Nov 12, 2024
- Applied Materials, Inc.
- Jagan Rangarajan
- B24 - GRINDING POLISHING
Information Patent Grant
Roller for location-specific wafer polishing
- Patent number 12,138,733
- Issue date Nov 12, 2024
- Applied Materials, Inc.
- Ekaterina A. Mikhaylichenko
- B24 - GRINDING POLISHING
Information Patent Grant
Membrane for carrier head with segmented substrate chuck
- Patent number 12,128,524
- Issue date Oct 29, 2024
- Applied Materials, Inc.
- Steven M. Zuniga
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing platens and polishing platen manufacturing methods
- Patent number 12,076,877
- Issue date Sep 3, 2024
- Applied Materials, Inc.
- Bum Jick Kim
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Retaining ring having inner surfaces with features
- Patent number 12,048,981
- Issue date Jul 30, 2024
- Applied Materials, Inc.
- Steven Mark Reedy
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing head with membrane position control
- Patent number 12,042,899
- Issue date Jul 23, 2024
- Applied Materials, Inc.
- Steven M. Zuniga
- B24 - GRINDING POLISHING
Information Patent Grant
Retaining ring having inner surfaces with facets
- Patent number 12,033,865
- Issue date Jul 9, 2024
- Applied Materials, Inc.
- Jeonghoon Oh
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing head with local wafer pressure
- Patent number 11,986,923
- Issue date May 21, 2024
- Applied Materials, Inc.
- Andrew Nagengast
- B24 - GRINDING POLISHING
Information Patent Grant
Stepped retaining ring
- Patent number 11,958,164
- Issue date Apr 16, 2024
- Applied Materials, Inc.
- Shaun Van Der Veen
- B24 - GRINDING POLISHING
Information Patent Grant
Dual membrane carrier head for chemical mechanical polishing
- Patent number 11,945,073
- Issue date Apr 2, 2024
- Applied Materials, Inc.
- Steven M. Zuniga
- B24 - GRINDING POLISHING
Information Patent Grant
Deformable substrate chuck
- Patent number 11,931,857
- Issue date Mar 19, 2024
- Applied Materials, Inc.
- Steven M. Zuniga
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing system with contactless platen edge control
- Patent number 11,919,120
- Issue date Mar 5, 2024
- Applied Materials, Inc.
- David J. Lischka
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate polishing apparatus with contact extension or adjustable...
- Patent number 11,904,429
- Issue date Feb 20, 2024
- Applied Materials, Inc.
- Steven M. Zuniga
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing system with platen for substrate edge control
- Patent number 11,890,717
- Issue date Feb 6, 2024
- Applied Materials, Inc.
- Jay Gurusamy
- B24 - GRINDING POLISHING
Information Patent Grant
Method of forming retaining ring with shaped surface
- Patent number 11,850,703
- Issue date Dec 26, 2023
- Applied Materials, Inc.
- Hung Chih Chen
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing system with annular platen or polishing pad
- Patent number 11,780,046
- Issue date Oct 10, 2023
- Applied Materials, Inc.
- Paul D. Butterfield
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing carrier head with multiple angular pressurizable zones
- Patent number 11,780,049
- Issue date Oct 10, 2023
- Applied Materials, Inc.
- Steven M. Zuniga
- B24 - GRINDING POLISHING
Information Patent Grant
Carrier head with segmented substrate chuck
- Patent number 11,759,911
- Issue date Sep 19, 2023
- Applied Materials, Inc.
- Steven M. Zuniga
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate cleaning devices and methods thereof
- Patent number 11,745,227
- Issue date Sep 5, 2023
- Applied Materials, Inc.
- Steven M. Zuniga
- B08 - CLEANING
Information Patent Grant
Wafer processing tools and methods thereof
- Patent number 11,749,552
- Issue date Sep 5, 2023
- Applied Materials, Inc.
- Jagan Rangarajan
- B24 - GRINDING POLISHING
Information Patent Grant
Pivotable substrate retaining ring
- Patent number 11,724,357
- Issue date Aug 15, 2023
- Applied Materials, Inc.
- Steven M. Zuniga
- B24 - GRINDING POLISHING
Information Patent Grant
Methods for a web-based CMP system
- Patent number 11,717,936
- Issue date Aug 8, 2023
- Applied Materials, Inc.
- Dmitry Sklyar
- B24 - GRINDING POLISHING
Information Patent Grant
Non-contact clean module
- Patent number 11,721,563
- Issue date Aug 8, 2023
- Applied Materials, Inc.
- Jagan Rangarajan
- B08 - CLEANING
Information Patent Grant
Retaining ring having inner surfaces with facets
- Patent number 11,682,561
- Issue date Jun 20, 2023
- Applied Materials, Inc.
- Jeonghoon Oh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dual loading retaining ring
- Patent number 11,660,721
- Issue date May 30, 2023
- Applied Materials, Inc.
- Steven M. Zuniga
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing head retaining ring tilting moment control
- Patent number 11,623,321
- Issue date Apr 11, 2023
- Applied Materials, Inc.
- Andrew Nagengast
- B24 - GRINDING POLISHING
Information Patent Grant
Retaining ring with shaped surface and method of forming
- Patent number 11,577,361
- Issue date Feb 14, 2023
- Applied Materials, Inc.
- Hung Chih Chen
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Polishing system with support post and annular platen or polishing pad
- Patent number 11,511,388
- Issue date Nov 29, 2022
- Applied Materials, Inc.
- Paul D. Butterfield
- B24 - GRINDING POLISHING
Information Patent Grant
Pivotable substrate retaining ring
- Patent number 11,511,390
- Issue date Nov 29, 2022
- Applied Materials, Inc.
- Steven M. Zuniga
- B24 - GRINDING POLISHING
Information Patent Grant
Retaining ring having inner surfaces with features
- Patent number 11,453,099
- Issue date Sep 27, 2022
- Applied Materials, Inc.
- Steven Mark Reedy
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE CLEANING IMPROVEMENT
- Publication number 20240363371
- Publication date Oct 31, 2024
- Applied Materials, Inc.
- Edward GOLUBOVSKY
- B08 - CLEANING
Information Patent Application
POLISHING HEAD WITH MEMBRANE POSITION CONTROL
- Publication number 20240342853
- Publication date Oct 17, 2024
- Applied Materials, Inc.
- Steven M. Zuniga
- B24 - GRINDING POLISHING
Information Patent Application
RETAINING RING HAVING INNER SURFACES WITH FEATURES
- Publication number 20240316723
- Publication date Sep 26, 2024
- Applied Materials, Inc.
- Steven Mark Reedy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR UPPER PLATEN MANUFACTURING
- Publication number 20240307963
- Publication date Sep 19, 2024
- Applied Materials, Inc.
- Ximeng XUE
- B22 - CASTING POWDER METALLURGY
Information Patent Application
POLISHING HEAD WITH LOCAL WAFER PRESSURE
- Publication number 20240253179
- Publication date Aug 1, 2024
- Applied Materials, Inc.
- Andrew NAGENGAST
- B24 - GRINDING POLISHING
Information Patent Application
APPARATUS AND METHOD FOR CONTROLLING SUBSTRATE POLISH EDGE UNIFORMITY
- Publication number 20240253183
- Publication date Aug 1, 2024
- Applied Materials, Inc.
- Priscilla Michelle Diep LAROSA
- B24 - GRINDING POLISHING
Information Patent Application
DEFORMABLE SUBSTRATE CHUCK
- Publication number 20240173816
- Publication date May 30, 2024
- Applied Materials, Inc.
- Steven M. Zuniga
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONTROL OF CARRIER HEAD SWEEP AND PLATEN SHAPE
- Publication number 20240139906
- Publication date May 2, 2024
- Applied Materials, Inc.
- Jeonghoon Oh
- B24 - GRINDING POLISHING
Information Patent Application
ACOUSTIC CARRIER HEAD MONITORING
- Publication number 20240139900
- Publication date May 2, 2024
- Applied Materials, Inc.
- Jeonghoon Oh
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING SYSTEM WITH PLATEN FOR SUBSTRATE EDGE CONTROL
- Publication number 20240100646
- Publication date Mar 28, 2024
- Applied Materials, Inc.
- Jay Gurusamy
- B24 - GRINDING POLISHING
Information Patent Application
METHOD AND APPARATUS FOR PROCESSING A SUBSTRATE IN CLEANING MODULES
- Publication number 20240100713
- Publication date Mar 28, 2024
- Applied Materials, Inc.
- Jagan RANGARAJAN
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
METHOD AND APPARATUS FOR PROCESSING A SUBSTRATE IN CLEANING MODULES
- Publication number 20240100714
- Publication date Mar 28, 2024
- Applied Materials, Inc.
- Jagan RANGARAJAN
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
RETAINER FOR CHEMICAL MECHANICAL POLISHING CARRIER HEAD
- Publication number 20240075584
- Publication date Mar 7, 2024
- Applied Materials, Inc.
- Andrew J. Nagengast
- B24 - GRINDING POLISHING
Information Patent Application
MODULAR CHEMICAL MECHANICAL POLISHER WITH SIMULTANEOUS POLISHING AN...
- Publication number 20240075582
- Publication date Mar 7, 2024
- Applied Materials, Inc.
- Steven M. Zuniga
- B24 - GRINDING POLISHING
Information Patent Application
MULTIPLE DISK PAD CONDITIONER
- Publication number 20240051081
- Publication date Feb 15, 2024
- Applied Materials, Inc.
- Jay GURUSAMY
- B24 - GRINDING POLISHING
Information Patent Application
DUAL MEMBRANE CARRIER HEAD FOR CHEMICAL MECHANICAL POLISHING
- Publication number 20240042574
- Publication date Feb 8, 2024
- Applied Materials, Inc.
- Steven M. Zuniga
- B24 - GRINDING POLISHING
Information Patent Application
MEMBRANE FOR CARRIER HEAD WITH SEGMENTED SUBSTRATE CHUCK
- Publication number 20240017373
- Publication date Jan 18, 2024
- Applied Materials, Inc.
- Steven M. Zuniga
- B24 - GRINDING POLISHING
Information Patent Application
CONTROL OF PLATEN SHAPE IN CHEMICAL MECHANICAL POLISHING
- Publication number 20230415295
- Publication date Dec 28, 2023
- Applied Materials, Inc.
- Steven M. Zuniga
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING CARRIER HEAD WITH MULTIPLE ZONES
- Publication number 20230405758
- Publication date Dec 21, 2023
- Applied Materials, Inc.
- Steven M. Zuniga
- B24 - GRINDING POLISHING
Information Patent Application
CONDENSED GAS PAD CONDITIONER
- Publication number 20230390894
- Publication date Dec 7, 2023
- Applied Materials, Inc.
- Jeonghoon Oh
- B24 - GRINDING POLISHING
Information Patent Application
CLAMPING RETAINER FOR CHEMICAL MECHANICAL POLISHING
- Publication number 20230381917
- Publication date Nov 30, 2023
- Applied Materials, Inc.
- Steven M. Zuniga
- B24 - GRINDING POLISHING
Information Patent Application
OPERATION OF CLAMPING RETAINER FOR CHEMICAL MECHANICAL POLISHING
- Publication number 20230381915
- Publication date Nov 30, 2023
- Applied Materials, Inc.
- Steven M. Zuniga
- B24 - GRINDING POLISHING
Information Patent Application
COMPLIANT INNER RING FOR A CHEMICAL MECHANICAL POLISHING SYSTEM
- Publication number 20230356354
- Publication date Nov 9, 2023
- Applied Materials, Inc.
- Jeonghoon Oh
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING HEAD WITH LOCAL INNER RING DOWNFORCE CONTROL
- Publication number 20230356355
- Publication date Nov 9, 2023
- Applied Materials, Inc.
- Jeonghoon Oh
- B24 - GRINDING POLISHING
Information Patent Application
WAFER PROCESSING TOOLS AND METHODS THEREOF
- Publication number 20230352337
- Publication date Nov 2, 2023
- Applied Materials, Inc.
- Jagan Rangarajan
- B24 - GRINDING POLISHING
Information Patent Application
Retaining Ring Having Inner Surfaces with Facets
- Publication number 20230290645
- Publication date Sep 14, 2023
- Applied Materials, Inc.
- Jeonghoon Oh
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING HEAD WITH MEMBRANE POSITION CONTROL
- Publication number 20230241744
- Publication date Aug 3, 2023
- Applied Materials, Inc.
- Steven M. Zuniga
- B24 - GRINDING POLISHING
Information Patent Application
METHOD OF FORMING RETAINING RING WITH SHAPED SURFACE
- Publication number 20230182261
- Publication date Jun 15, 2023
- Applied Materials, Inc.
- Hung Chih Chen
- B24 - GRINDING POLISHING
Information Patent Application
PIVOTABLE SUBSTRATE RETAINING RING
- Publication number 20230070746
- Publication date Mar 9, 2023
- Applied Materials, Inc.
- Steven M. Zuniga
- B24 - GRINDING POLISHING
Information Patent Application
RETAINING RING HAVING INNER SURFACES WITH FEATURES
- Publication number 20230019815
- Publication date Jan 19, 2023
- Applied Materials, Inc.
- Steven Mark Reedy
- B24 - GRINDING POLISHING

Steve Zuniga

Person

Patents Grantslast 30 patents

Wafer processing tools and methods thereof

Roller for location-specific wafer polishing

Membrane for carrier head with segmented substrate chuck

Polishing platens and polishing platen manufacturing methods

Retaining ring having inner surfaces with features

Polishing head with membrane position control

Retaining ring having inner surfaces with facets

Polishing head with local wafer pressure

Stepped retaining ring

Dual membrane carrier head for chemical mechanical polishing

Deformable substrate chuck

Polishing system with contactless platen edge control

Substrate polishing apparatus with contact extension or adjustable...

Polishing system with platen for substrate edge control

Method of forming retaining ring with shaped surface

Polishing system with annular platen or polishing pad

Polishing carrier head with multiple angular pressurizable zones

Carrier head with segmented substrate chuck

Substrate cleaning devices and methods thereof

Wafer processing tools and methods thereof

Pivotable substrate retaining ring

Methods for a web-based CMP system

Non-contact clean module

Retaining ring having inner surfaces with facets

Dual loading retaining ring

Polishing head retaining ring tilting moment control

Retaining ring with shaped surface and method of forming

Polishing system with support post and annular platen or polishing pad

Pivotable substrate retaining ring

Retaining ring having inner surfaces with features

Patents Applicationslast 30 patents

SUBSTRATE CLEANING IMPROVEMENT

POLISHING HEAD WITH MEMBRANE POSITION CONTROL

RETAINING RING HAVING INNER SURFACES WITH FEATURES

METHODS FOR UPPER PLATEN MANUFACTURING

POLISHING HEAD WITH LOCAL WAFER PRESSURE

APPARATUS AND METHOD FOR CONTROLLING SUBSTRATE POLISH EDGE UNIFORMITY

DEFORMABLE SUBSTRATE CHUCK

CONTROL OF CARRIER HEAD SWEEP AND PLATEN SHAPE

ACOUSTIC CARRIER HEAD MONITORING

POLISHING SYSTEM WITH PLATEN FOR SUBSTRATE EDGE CONTROL

METHOD AND APPARATUS FOR PROCESSING A SUBSTRATE IN CLEANING MODULES

METHOD AND APPARATUS FOR PROCESSING A SUBSTRATE IN CLEANING MODULES

RETAINER FOR CHEMICAL MECHANICAL POLISHING CARRIER HEAD

MODULAR CHEMICAL MECHANICAL POLISHER WITH SIMULTANEOUS POLISHING AN...

MULTIPLE DISK PAD CONDITIONER

DUAL MEMBRANE CARRIER HEAD FOR CHEMICAL MECHANICAL POLISHING

MEMBRANE FOR CARRIER HEAD WITH SEGMENTED SUBSTRATE CHUCK

CONTROL OF PLATEN SHAPE IN CHEMICAL MECHANICAL POLISHING

POLISHING CARRIER HEAD WITH MULTIPLE ZONES

CONDENSED GAS PAD CONDITIONER

CLAMPING RETAINER FOR CHEMICAL MECHANICAL POLISHING

OPERATION OF CLAMPING RETAINER FOR CHEMICAL MECHANICAL POLISHING

COMPLIANT INNER RING FOR A CHEMICAL MECHANICAL POLISHING SYSTEM

POLISHING HEAD WITH LOCAL INNER RING DOWNFORCE CONTROL

WAFER PROCESSING TOOLS AND METHODS THEREOF

Retaining Ring Having Inner Surfaces with Facets

POLISHING HEAD WITH MEMBRANE POSITION CONTROL

METHOD OF FORMING RETAINING RING WITH SHAPED SURFACE

PIVOTABLE SUBSTRATE RETAINING RING

RETAINING RING HAVING INNER SURFACES WITH FEATURES