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Porterville, CA, US
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last 30 patents
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Patent Grant
Methods and apparatus for processing a substrate
Patent number
11,651,966
Issue date
May 16, 2023
Applied Materials, Inc.
Kartik Ramaswamy
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma deposition of carbon hardmask
Patent number
11,043,375
Issue date
Jun 22, 2021
Applied Materials, Inc.
Yang Yang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Methods and apparatus for processing a substrate
Patent number
11,043,387
Issue date
Jun 22, 2021
Applied Materials, Inc.
Kartik Ramaswamy
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Chamber with individually controllable plasma generation regions fo...
Patent number
10,957,518
Issue date
Mar 23, 2021
Applied Materials, Inc.
Kartik Ramaswamy
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods and apparatus for electron beam etching process
Patent number
10,790,153
Issue date
Sep 29, 2020
Applied Materials, Inc.
Yue Guo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing reactor with a magnetic electron-blocking filter...
Patent number
10,784,085
Issue date
Sep 22, 2020
Applied Materials, Inc.
Kartik Ramaswamy
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Etching methods
Patent number
10,707,086
Issue date
Jul 7, 2020
Applied Materials, Inc.
Yang Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Deposition or treatment of diamond-like carbon in a plasma reactor
Patent number
10,544,505
Issue date
Jan 28, 2020
Applied Materials, Inc.
Yang Yang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of real time in-situ chamber condition monitoring using sens...
Patent number
10,395,904
Issue date
Aug 27, 2019
Applied Materials, Inc.
Lawrence Wong
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Magnet configurations for radial uniformity tuning of ICP plasmas
Patent number
10,249,479
Issue date
Apr 2, 2019
Applied Materials, Inc.
Joseph F. Aubuchon
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Diamond like carbon layer formed by an electron beam plasma process
Patent number
10,249,495
Issue date
Apr 2, 2019
Applied Materials, Inc.
Yang Yang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Inductively coupled plasma source
Patent number
10,170,278
Issue date
Jan 1, 2019
Applied Materials, Inc.
Andrew Nguyen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multiple electrode substrate support assembly and phase control system
Patent number
10,153,139
Issue date
Dec 11, 2018
Applied Materials, Inc.
Yang Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of real time in-situ chamber condition monitoring using sens...
Patent number
10,141,166
Issue date
Nov 27, 2018
Applied Materials, Inc.
Lawrence Wong
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method and apparatus for controlling a magnetic field in a plasma c...
Patent number
10,115,566
Issue date
Oct 30, 2018
Applied Materials, Inc.
Steven Lane
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for controlling plasma near the edge of a subs...
Patent number
10,017,857
Issue date
Jul 10, 2018
Applied Materials, Inc.
Andrew Nguyen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Electron beam plasma source with reduced metal contamination
Patent number
9,721,760
Issue date
Aug 1, 2017
Applied Materials, Inc.
Leonid Dorf
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System and method for selective coil excitation in inductively coup...
Patent number
9,659,751
Issue date
May 23, 2017
Applied Materials, Inc.
Kartik Ramaswamy
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for controlling a magnetic field in a plasma c...
Patent number
9,613,783
Issue date
Apr 4, 2017
Applied Materials, Inc.
Steven Lane
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electron beam plasma source with remote radical source
Patent number
9,564,297
Issue date
Feb 7, 2017
Applied Materials, Inc.
Ming-Feng Wu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of multiple zone symmetric gas injection for inductively cou...
Patent number
9,472,379
Issue date
Oct 18, 2016
Applied Materials, Inc.
Steven Lane
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Symmetrical inductively coupled plasma source with side RF feeds an...
Patent number
9,449,794
Issue date
Sep 20, 2016
Applied Materials, Inc.
Andrew Nguyen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Electron beam plasma source with segmented suppression electrode fo...
Patent number
9,443,700
Issue date
Sep 13, 2016
Applied Materials, Inc.
Leonid Dorf
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Spatially discrete multi-loop RF-driven plasma source having plural...
Patent number
9,412,563
Issue date
Aug 9, 2016
Applied Materials, Inc.
Kartik Ramaswamy
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Three-coil inductively coupled plasma source with individually cont...
Patent number
9,111,722
Issue date
Aug 18, 2015
Applied Materials, Inc.
Leonid Dorf
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Three-coil inductively coupled plasma source with individually cont...
Patent number
9,082,591
Issue date
Jul 14, 2015
Applied Materials, Inc.
Leonid Dorf
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of differential counter electrode tuning in an RF plasma rea...
Patent number
8,734,664
Issue date
May 27, 2014
Applied Materials, Inc.
Yang Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Matching network characterization using variable impedance analysis
Patent number
7,554,334
Issue date
Jun 30, 2009
Applied Marterials, Inc.
Steven C. Shannon
H03 - BASIC ELECTRONIC CIRCUITRY
Patents Applications
last 30 patents
Information
Patent Application
ETCHING APPARATUS
Publication number
20230162996
Publication date
May 25, 2023
Applied Materials, Inc.
Yang YANG
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
HIGH CURRENT RIBBON INDUCTOR
Publication number
20220359118
Publication date
Nov 10, 2022
Yue GUO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE
Publication number
20210296131
Publication date
Sep 23, 2021
Applied Materials, Inc.
Kartik Ramaswamy
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE
Publication number
20210287907
Publication date
Sep 16, 2021
Applied Materials, Inc.
Kartik Ramaswamy
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE
Publication number
20210134599
Publication date
May 6, 2021
Applied Materials, Inc.
Kartik Ramaswamy
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHAMBER WITH INDIVIDUALLY CONTROLLABLE PLASMA GENERATION REGIONS FO...
Publication number
20200312630
Publication date
Oct 1, 2020
Applied Materials, Inc.
Kartik Ramaswamy
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS AND APPARATUS FOR ELECTRON BEAM ETCHING PROCESS
Publication number
20200006036
Publication date
Jan 2, 2020
Applied Materials, Inc.
Yue GUO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCHING APPARATUS
Publication number
20190393053
Publication date
Dec 26, 2019
Applied Materials, Inc.
Yang YANG
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
DIAMOND LIKE CARBON LAYER FORMED BY AN ELECTRON BEAM PLASMA PROCESS
Publication number
20190228970
Publication date
Jul 25, 2019
Applied Materials, Inc.
Yang YANG
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ETCHING APPARATUS AND METHODS
Publication number
20190221437
Publication date
Jul 18, 2019
Applied Materials, Inc.
Yang YANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of Real Time In-Situ Chamber Condition Monitoring Using Sens...
Publication number
20190096641
Publication date
Mar 28, 2019
Applied Materials, Inc.
Lawrence Wong
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PLASMA DEPOSITION OF CARBON HARDMASK
Publication number
20190057862
Publication date
Feb 21, 2019
Applied Materials, Inc.
Yang YANG
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
MULTIPLE ELECTRODE SUBSTRATE SUPPORT ASSEMBLY AND PHASE CONTROL SYSTEM
Publication number
20180366306
Publication date
Dec 20, 2018
Applied Materials, Inc.
Yang YANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DEPOSITION OR TREATMENT OF DIAMOND-LIKE CARBON IN A PLASMA REACTOR
Publication number
20180274089
Publication date
Sep 27, 2018
Applied Materials, Inc.
Yang Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ALTERNATING BETWEEN DEPOSITION AND TREATMENT OF DIAMOND-LIKE CARBON
Publication number
20180274100
Publication date
Sep 27, 2018
Applied Materials, Inc.
Yang Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA REACTOR WITH ELECTRON BEAM OF SECONDARY ELECTRONS
Publication number
20180277340
Publication date
Sep 27, 2018
Yang Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DIAMOND LIKE CARBON LAYER FORMED BY AN ELECTRON BEAM PLASMA PROCESS
Publication number
20170372899
Publication date
Dec 28, 2017
Applied Materials, Inc.
Yang YANG
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD AND APPARATUS FOR CONTROLLING A MAGNETIC FIELD IN A PLASMA C...
Publication number
20170162365
Publication date
Jun 8, 2017
Applied Materials, Inc.
STEVEN LANE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA REACTOR FOR PROCESSING A WORKPIECE WITH AN ARRAY OF PLASMA P...
Publication number
20170092470
Publication date
Mar 30, 2017
Kartik Ramaswamy
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTIPLE ELECTRODE SUBSTRATE SUPPORT ASSEMBLY AND PHASE CONTROL SYSTEM
Publication number
20160372307
Publication date
Dec 22, 2016
Applied Materials, Inc.
YANG YANG
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD AND APPARATUS FOR CONTROLLING PLASMA NEAR THE EDGE OF A SUBS...
Publication number
20160322242
Publication date
Nov 3, 2016
Applied Materials, Inc.
Andrew NGUYEN
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
MAGNET CONFIGURATIONS FOR RADIAL UNIFORMITY TUNING OF ICP PLASMAS
Publication number
20160225590
Publication date
Aug 4, 2016
Applied Materials, Inc.
Joseph F. Aubuchon
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING REACTOR WITH A MAGNETIC ELECTRON-BLOCKING FILTER...
Publication number
20160225466
Publication date
Aug 4, 2016
Applied Materials, Inc.
Kartik Ramaswamy
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Application
METHOD OF REAL TIME IN-SITU CHAMBER CONDITION MONITORING USING SENS...
Publication number
20160048111
Publication date
Feb 18, 2016
Applied Materials, Inc.
Lawrence Wong
G05 - CONTROLLING REGULATING
Information
Patent Application
SYSTEM AND METHOD FOR SELECTIVE COIL EXCITATION IN INDUCTIVELY COUP...
Publication number
20160027616
Publication date
Jan 28, 2016
Applied Materials, Inc.
KARTIK RAMASWAMY
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND APPARATUS FOR CONTROLLING A MAGNETIC FIELD IN A PLASMA C...
Publication number
20160027613
Publication date
Jan 28, 2016
Applied Materials, Inc.
STEVEN LANE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF MULTIPLE ZONE SYMMETRIC GAS INJECTION FOR INDUCTIVELY COU...
Publication number
20150371824
Publication date
Dec 24, 2015
Applied Materials, Inc.
Steven LANE
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
INDUCTIVELY COUPLED SPATIALLY DISCRETE MULTI-LOOP RF-DRIVEN PLASMA...
Publication number
20150075717
Publication date
Mar 19, 2015
Applied Materials, Inc.
Kartik Ramaswamy
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SPATIALLY DISCRETE MULTI-LOOP RF-DRIVEN PLASMA SOURCE HAVING PLURAL...
Publication number
20150075716
Publication date
Mar 19, 2015
Applied Materials, Inc.
Kartik Ramaswamy
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTRON BEAM PLASMA SOURCE WITH REDUCED METAL CONTAMINATION
Publication number
20140338835
Publication date
Nov 20, 2014
Applied Materials, Inc.
Leonid Dorf
H01 - BASIC ELECTRIC ELEMENTS