Steven Robert Sherman

Person

Newton, MA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Methods for reducing transfer pattern defects in a semiconductor de...
- Patent number 11,217,448
- Issue date Jan 4, 2022
- Applied Materials, Inc.
- Regina Freed
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Techniques for processing substrates using directional reactive ion...
- Patent number 10,971,368
- Issue date Apr 6, 2021
- Varian Semiconductor Equipment Associates, Inc.
- Steven R. Sherman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for reducing transfer pattern defects in a semiconductor de...
- Patent number 10,777,414
- Issue date Sep 15, 2020
- Applied Materials, Inc.
- Regina Freed
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Techniques and structure for forming dynamic random-access device u...
- Patent number 10,629,437
- Issue date Apr 21, 2020
- Varian Semiconductor Equipment Associates, Inc.
- Sony Varghese
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etch rate modulation through ion implantation
- Patent number 10,332,748
- Issue date Jun 25, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Rajesh Prasad
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Multiple patterning approach using ion implantation
- Patent number 10,310,379
- Issue date Jun 4, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Tristan Y. Ma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Techniques for forming patterned features using directional ions
- Patent number 10,229,832
- Issue date Mar 12, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Steven R. Sherman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Non-uniform gate oxide thickness for DRAM device
- Patent number 10,204,909
- Issue date Feb 12, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Simon Ruffell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etch rate modulation through ion implantation
- Patent number 9,934,982
- Issue date Apr 3, 2018
- Varian Semiconductor Equipment Associates, Inc.
- Rajesh Prasad
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Techniques for processing substrates using directional reactive ion...
- Patent number 9,934,981
- Issue date Apr 3, 2018
- Varian Semiconductor Equipment Associates, Inc.
- Steven R. Sherman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Replacement metal gate transistor
- Patent number 9,728,623
- Issue date Aug 8, 2017
- Varian Semiconductor Equipment Associates, Inc.
- Ying Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for improving critical dimension variability by implanting a...
- Patent number 9,613,813
- Issue date Apr 4, 2017
- Varian Semiconductor Equipment Associates, Inc.
- Steven Robert Sherman
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Process flow for replacement metal gate transistors
- Patent number 9,153,444
- Issue date Oct 6, 2015
- Varian Semiconductor Equipment Associates, Inc.
- Ying Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Magnetic memory and method of fabrication
- Patent number 9,082,949
- Issue date Jul 14, 2015
- Varian Semiconductor Equipment Associates, Inc.
- Alexander C. Kontos
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Magnetic memory and method of fabrication
- Patent number 8,946,836
- Issue date Feb 3, 2015
- Varian Semiconductor Equipment Associates, Inc.
- Alexander C. Kontos
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method to improve electrical leakage performance and to minimize el...
- Patent number 8,192,805
- Issue date Jun 5, 2012
- TEL Epion Inc.
- Noel Russell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method to improve electrical leakage performance and to minimize el...
- Patent number 7,981,483
- Issue date Jul 19, 2011
- TEL Epion Inc.
- Noel Russell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming capping structures on one or more material layer...
- Patent number 7,838,423
- Issue date Nov 23, 2010
- TEL Epion Inc.
- Arthur J. Learn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Copper interconnect wiring and method and apparatus for forming the...
- Patent number 7,799,683
- Issue date Sep 21, 2010
- TEL Epion, Inc.
- Arthur J. Learn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method to improve a copper/dielectric interface in semiconductor de...
- Patent number 7,754,588
- Issue date Jul 13, 2010
- TEL Epion Inc.
- Noel Russell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Copper interconnect wiring and method of forming thereof
- Patent number 7,291,558
- Issue date Nov 6, 2007
- TEL Epion Inc.
- Robert M. Geffken
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
METHODS FOR REDUCING TRANSFER PATTERN DEFECTS IN A SEMICONDUCTOR DE...
- Publication number 20200357639
- Publication date Nov 12, 2020
- Applied Materials, Inc.
- Regina Freed
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR REDUCING TRANSFER PATTERN DEFECTS IN A SEMICONDUCTOR DE...
- Publication number 20200294802
- Publication date Sep 17, 2020
- Applied Materials, Inc.
- Regina Freed
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TECHNIQUES AND STRUCTURE FOR FORMING DYNAMIC RANDOM-ACCESS DEVICE U...
- Publication number 20190348287
- Publication date Nov 14, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Sony Varghese
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTIPLE PATTERNING APPROACH USING ION IMPLANTATION
- Publication number 20180204719
- Publication date Jul 19, 2018
- Tristan Y. Ma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Etch Rate Modulation Through Ion Implantation
- Publication number 20180182636
- Publication date Jun 28, 2018
- Varian Semiconductor Equipment Associates, Inc.
- Rajesh Prasad
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TECHNIQUES FOR PROCESSING SUBSTRATES USING DIRECTIONAL REACTIVE ION...
- Publication number 20180182637
- Publication date Jun 28, 2018
- Varian Semiconductor Equipment Associates, Inc.
- Steven R. Sherman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TECHNIQUES FOR FORMING PATTERNED FEATURES USING DIRECTIONAL IONS
- Publication number 20180082844
- Publication date Mar 22, 2018
- Steven R. Sherman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
NON-UNIFORM GATE OXIDE THICKNESS FOR DRAM DEVICE
- Publication number 20170179133
- Publication date Jun 22, 2017
- Varian Semiconductor Equipment Associates, Inc.
- Simon Ruffell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Etch Rate Modulation Through Ion Implantation
- Publication number 20170178914
- Publication date Jun 22, 2017
- Varian Semiconductor Equipment Associates, Inc.
- Rajesh Prasad
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method For Improving Critical Dimension Variability
- Publication number 20160133467
- Publication date May 12, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Steven Robert Sherman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Workpiece Processing Method And Apparatus
- Publication number 20160111254
- Publication date Apr 21, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Morgan D. Evans
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TECHNIQUES FOR PROCESSING SUBSTRATES USING DIRECTIONAL REACTIVE ION...
- Publication number 20150083581
- Publication date Mar 26, 2015
- Varian Semiconductor Equipment Associates, Inc.
- Steven R. Sherman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS FLOW FOR REPLACEMENT METAL GATE TRANSISTORS
- Publication number 20140377885
- Publication date Dec 25, 2014
- Ying Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REPLACEMENT METAL GATE TRANSISTOR
- Publication number 20140374843
- Publication date Dec 25, 2014
- Ying Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MAGNETIC MEMORY AND METHOD OF FABRICATION
- Publication number 20130288394
- Publication date Oct 31, 2013
- Varian Semiconductor Equipment Associates, Inc.
- Alexander C. Kontos
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MAGNETIC MEMORY AND METHOD OF FABRICATION
- Publication number 20130285177
- Publication date Oct 31, 2013
- Varian Semiconductor Equipment Associates, Inc.
- Alexander C. Kontos
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SHEET WAFER FURNACE WITH GAS PRESERVATION SYSTEM
- Publication number 20130167588
- Publication date Jul 4, 2013
- Steven Sherman
- C30 - CRYSTAL GROWTH
Information Patent Application
Wide Sheet Wafer
- Publication number 20120164379
- Publication date Jun 28, 2012
- Evergreen Solar, Inc
- Steven Sherman
- C30 - CRYSTAL GROWTH
Information Patent Application
METHOD AND SYSTEM FOR DEPOSITING SILICON CARBIDE FILM USING A GAS C...
- Publication number 20090233004
- Publication date Sep 17, 2009
- TEL Epion Inc.
- Steven Sherman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FORMING CAPPING STRUCTURES ON ONE OR MORE MATERIAL LAYER...
- Publication number 20090186482
- Publication date Jul 23, 2009
- TEL Epion Inc.
- Arthur J. Learn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD TO IMPROVE ELECTRICAL LEAKAGE PERFORMANCE AND TO MINIMIZE EL...
- Publication number 20090104754
- Publication date Apr 23, 2009
- TEL Epion Inc.
- Noel Russell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD TO IMPROVE ELECTRICAL LEAKAGE PERFORMANCE AND TO MINIMIZE EL...
- Publication number 20090087577
- Publication date Apr 2, 2009
- TEL Epion Inc.
- Noel Russell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD TO IMPROVE A COPPER/DIELECTRIC INTERFACE IN SEMICONDUCTOR DE...
- Publication number 20090087969
- Publication date Apr 2, 2009
- TEL Epion Inc.
- Noel Russell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GCIB Cluster Tool Apparatus and Method of Operation
- Publication number 20070184656
- Publication date Aug 9, 2007
- TEL Epion Inc.
- Steven R. Sherman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Copper Interconnect Wiring and Method and Apparatus for Forming The...
- Publication number 20070184655
- Publication date Aug 9, 2007
- TEL Epion Inc.
- Arthur J. Learn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Copper interconnect wiring and method of forming thereof
- Publication number 20060105570
- Publication date May 18, 2006
- Epion Corporation
- John J. Hautala
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Steven Robert Sherman

Person

Patents Grantslast 30 patents

Methods for reducing transfer pattern defects in a semiconductor de...

Techniques for processing substrates using directional reactive ion...

Methods for reducing transfer pattern defects in a semiconductor de...

Techniques and structure for forming dynamic random-access device u...

Etch rate modulation through ion implantation

Multiple patterning approach using ion implantation

Techniques for forming patterned features using directional ions

Non-uniform gate oxide thickness for DRAM device

Etch rate modulation through ion implantation

Techniques for processing substrates using directional reactive ion...

Replacement metal gate transistor

Method for improving critical dimension variability by implanting a...

Process flow for replacement metal gate transistors

Magnetic memory and method of fabrication

Magnetic memory and method of fabrication

Method to improve electrical leakage performance and to minimize el...

Method to improve electrical leakage performance and to minimize el...

Method of forming capping structures on one or more material layer...

Copper interconnect wiring and method and apparatus for forming the...

Method to improve a copper/dielectric interface in semiconductor de...

Copper interconnect wiring and method of forming thereof

Patents Applicationslast 30 patents

METHODS FOR REDUCING TRANSFER PATTERN DEFECTS IN A SEMICONDUCTOR DE...

METHODS FOR REDUCING TRANSFER PATTERN DEFECTS IN A SEMICONDUCTOR DE...

TECHNIQUES AND STRUCTURE FOR FORMING DYNAMIC RANDOM-ACCESS DEVICE U...

MULTIPLE PATTERNING APPROACH USING ION IMPLANTATION

Etch Rate Modulation Through Ion Implantation

TECHNIQUES FOR PROCESSING SUBSTRATES USING DIRECTIONAL REACTIVE ION...

TECHNIQUES FOR FORMING PATTERNED FEATURES USING DIRECTIONAL IONS

NON-UNIFORM GATE OXIDE THICKNESS FOR DRAM DEVICE

Etch Rate Modulation Through Ion Implantation

Method For Improving Critical Dimension Variability

Workpiece Processing Method And Apparatus

TECHNIQUES FOR PROCESSING SUBSTRATES USING DIRECTIONAL REACTIVE ION...

PROCESS FLOW FOR REPLACEMENT METAL GATE TRANSISTORS

REPLACEMENT METAL GATE TRANSISTOR

MAGNETIC MEMORY AND METHOD OF FABRICATION

MAGNETIC MEMORY AND METHOD OF FABRICATION

SHEET WAFER FURNACE WITH GAS PRESERVATION SYSTEM

Wide Sheet Wafer

METHOD AND SYSTEM FOR DEPOSITING SILICON CARBIDE FILM USING A GAS C...

METHOD OF FORMING CAPPING STRUCTURES ON ONE OR MORE MATERIAL LAYER...

METHOD TO IMPROVE ELECTRICAL LEAKAGE PERFORMANCE AND TO MINIMIZE EL...

METHOD TO IMPROVE ELECTRICAL LEAKAGE PERFORMANCE AND TO MINIMIZE EL...

METHOD TO IMPROVE A COPPER/DIELECTRIC INTERFACE IN SEMICONDUCTOR DE...

GCIB Cluster Tool Apparatus and Method of Operation

Copper Interconnect Wiring and Method and Apparatus for Forming The...

Copper interconnect wiring and method of forming thereof