Steven T. FINK

Person

Mesa, AZ, US

People

Patents Grantslast 30 patents

Information Patent Grant
Photo-bioreactor system and method for production of bio-materials
- Patent number 9,605,238
- Issue date Mar 28, 2017
- Arizona Technology Innovation Group, Inc.
- Wayne L. Johnson
- C12 - BIOCHEMISTRY BEER SPIRITS WINE VINEGAR MICROBIOLOGY ENZYMOLOGY MUTATION...
Information Patent Grant
Photo-bioreactor system and method
- Patent number 9,587,211
- Issue date Mar 7, 2017
- Arizona Technology Innovation Group, Inc.
- Wayne L. Johnson
- C12 - BIOCHEMISTRY BEER SPIRITS WINE VINEGAR MICROBIOLOGY ENZYMOLOGY MUTATION...
Information Patent Grant
Thermally zoned substrate holder assembly
- Patent number 8,927,907
- Issue date Jan 6, 2015
- Tokyo Electron Limited
- Steven T. Fink
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thermally zoned substrate holder assembly
- Patent number 8,092,602
- Issue date Jan 10, 2012
- Tokyo Electron Limited
- Steven T. Fink
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Thermally zoned substrate holder assembly
- Patent number 7,850,782
- Issue date Dec 14, 2010
- Tokyo Electron Limited
- Steven T. Fink
Information Patent Grant
Chuck pedestal shield
- Patent number 7,789,963
- Issue date Sep 7, 2010
- Tokyo Electron Limited
- Andrej S. Mitrovic
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for removing external components from a proces...
- Patent number 7,604,701
- Issue date Oct 20, 2009
- Tokyo Electron Limited
- Steven T Fink
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing system and baffle assembly for use in plasma proc...
- Patent number 7,601,242
- Issue date Oct 13, 2009
- Tokyo Electron Limited
- Steven T. Fink
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for an improved focus ring in a plasma process...
- Patent number 7,582,186
- Issue date Sep 1, 2009
- Tokyo Electron Limited
- Eric J. Strang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for improved baffle plate
- Patent number 7,552,521
- Issue date Jun 30, 2009
- Tokyo Electron Limited
- Steven T. Fink
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for improved baffle plate
- Patent number 7,461,614
- Issue date Dec 9, 2008
- Tokyo Electron Limited
- Steven T Fink
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus to determine consumable part condition
- Patent number 7,350,476
- Issue date Apr 1, 2008
- Tokyo Electron Limited
- Steven T. Fink
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thermally zoned substrate holder assembly
- Patent number 7,347,901
- Issue date Mar 25, 2008
- Tokyo Electron Limited
- Steven T. Fink
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing device
- Patent number 7,311,784
- Issue date Dec 25, 2007
- Tokyo Electron Limited
- Steven T. Fink
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Hybrid ball-lock attachment apparatus
- Patent number 7,296,534
- Issue date Nov 20, 2007
- Tokyo Electron Limited
- Steven T. Fink
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Honeycomb optical window deposition shield and method for a plasma...
- Patent number 7,241,397
- Issue date Jul 10, 2007
- Tokyo Electron Limited
- Steven T. Fink
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-position stop mechanism
- Patent number 7,237,666
- Issue date Jul 3, 2007
- Tokyo Electron Limited
- Steven T. Fink
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for monitoring plasma conditions using a monit...
- Patent number 7,235,155
- Issue date Jun 26, 2007
- Tokyo Electron Limited
- Steven T. Fink
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for monitoring the condition of plasma equipment
- Patent number 7,227,624
- Issue date Jun 5, 2007
- Tokyo Electron Limited
- Steven T. Fink
- G01 - MEASURING TESTING
Information Patent Grant
Plasma chamber wall segment temperature control
- Patent number 7,186,313
- Issue date Mar 6, 2007
- Tokyo Electron Limited
- Andrej S Mitrovic
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cylinder-based plasma processing system
- Patent number 7,166,170
- Issue date Jan 23, 2007
- Tokyo Electron Limited
- Steven T. Fink
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma source assembly and method of manufacture
- Patent number 7,163,603
- Issue date Jan 16, 2007
- Tokyo Electron Limited
- Steven T. Fink
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of and apparatus for tailoring an etch profile
- Patent number 7,147,793
- Issue date Dec 12, 2006
- Tokyo Electron Limited
- Steven Fink
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-position stop mechanism
- Patent number 7,143,887
- Issue date Dec 5, 2006
- Tokyo Electron Limited
- Steven T. Fink
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sensing component used to monitor material buildup and material ero...
- Patent number 7,110,110
- Issue date Sep 19, 2006
- Tokyo Electron Limited
- Steven T. Fink
- G01 - MEASURING TESTING
Information Patent Grant
Integrated process tube and electrostatic shield, assembly thereof...
- Patent number 7,088,046
- Issue date Aug 8, 2006
- Tokyo Electron Limited
- Steven T. Fink
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of using a sensor gas to determine erosion level of consumab...
- Patent number 7,064,812
- Issue date Jun 20, 2006
- Tokyo Electron Limited
- Audunn Ludviksson
- G01 - MEASURING TESTING
Information Patent Grant
Method and device for measuring whether a process kit part meets a...
- Patent number 7,040,032
- Issue date May 9, 2006
- Tokyo Electron Limited
- Steven T. Fink
- G01 - MEASURING TESTING
Information Patent Grant
Probe cartridge assembly and multi-probe assembly
- Patent number 7,005,842
- Issue date Feb 28, 2006
- Tokyo Electron Limited
- Steven T. Fink
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for improved focus ring
- Patent number 7,001,482
- Issue date Feb 21, 2006
- Tokyo Electron Limited
- Michael Landis
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PHOTO-BIOREACTOR SYSTEM AND METHOD FOR PRODUCTION OF BIO-MATERIALS
- Publication number 20160083679
- Publication date Mar 24, 2016
- Wayne L. Johnson
- C12 - BIOCHEMISTRY BEER SPIRITS WINE VINEGAR MICROBIOLOGY ENZYMOLOGY MUTATION...
Information Patent Application
PHOTO-BIOREACTOR SYSTEM AND METHOD
- Publication number 20120270304
- Publication date Oct 25, 2012
- ARIZONA TECHNOLOGY INNOVATION GROUP, L.L.C.
- Wayne L. JOHNSON
- C12 - BIOCHEMISTRY BEER SPIRITS WINE VINEGAR MICROBIOLOGY ENZYMOLOGY MUTATION...
Information Patent Application
THERMALLY ZONED SUBSTRATE HOLDER ASSEMBLY
- Publication number 20120067866
- Publication date Mar 22, 2012
- TOKYO ELECTRON LIMITED
- Steven T. FINK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THERMALLY ZONED SUBSTRATE HOLDER ASSEMBLY
- Publication number 20080092818
- Publication date Apr 24, 2008
- TOKYO ELECTRON LIMITED
- Steven T. Fink
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma source assembly and method of manufacture
- Publication number 20070181064
- Publication date Aug 9, 2007
- TOKYO ELECTRON LIMITED
- Steven T. Fink
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for modifying an etch profile
- Publication number 20070170155
- Publication date Jul 26, 2007
- Steven T. Fink
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma chamber wall segment temperature control
- Publication number 20070131650
- Publication date Jun 14, 2007
- TOKYO ELECTRON LIMITED
- Andrej S. Mitrovic
- G05 - CONTROLLING REGULATING
Information Patent Application
Plasma chamber wall segment temperature control
- Publication number 20070113976
- Publication date May 24, 2007
- TOKYO ELECTRON LIMITED
- Andrej S. Mitrovic
- G05 - CONTROLLING REGULATING
Information Patent Application
Plasma chamber wall segment temperature control
- Publication number 20070114206
- Publication date May 24, 2007
- TOKYO ELECTRON LIMITED
- Andrej S. Mitrovic
- G05 - CONTROLLING REGULATING
Information Patent Application
Plasma source assembly and method of manufacture
- Publication number 20070034154
- Publication date Feb 15, 2007
- TOKYO ELECTRON LIMITED
- Steven T. Fink
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Multi-position stop mechanism
- Publication number 20060272920
- Publication date Dec 7, 2006
- TOKYO ELECTRON LIMITED
- Steven T. Fink
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus for attachment of semiconductor hardware
- Publication number 20060254512
- Publication date Nov 16, 2006
- TOKYO ELECTRON LIMITED
- Steven T. Fink
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Disposable plasma reactor materials and methods
- Publication number 20060225654
- Publication date Oct 12, 2006
- Steven T. Fink
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Application
Load bearing insulator in vacuum etch chambers
- Publication number 20060213617
- Publication date Sep 28, 2006
- Steven T. Fink
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Chuck pedestal shield
- Publication number 20060191484
- Publication date Aug 31, 2006
- TOKYO ELECTRON LIMITED
- Andrej S. Mitrovic
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Reduced volume, high conductance process chamber
- Publication number 20060162656
- Publication date Jul 27, 2006
- TOKYO ELECTRON LIMITED
- Steven T. Fink
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Plasma processing system and baffle assembly for use in plasma proc...
- Publication number 20060151114
- Publication date Jul 13, 2006
- Steven T. Fink
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Viewing window cleaning apparatus
- Publication number 20060144520
- Publication date Jul 6, 2006
- TOKYO ELECTRON LIMITED
- Steven T. Fink
- B08 - CLEANING
Information Patent Application
Method and apparatus to determine consumable part condition
- Publication number 20060130970
- Publication date Jun 22, 2006
- TOKYO ELECTRON LIMITED
- Steven T. Fink
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for improved baffle plate
- Publication number 20060118045
- Publication date Jun 8, 2006
- Steven T Fink
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma processing system and method
- Publication number 20060060303
- Publication date Mar 23, 2006
- TOKYO ELECTRON LIMITED
- Steven T. Fink
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Pressure control and plasma confinement in a plasma processing chamber
- Publication number 20050263070
- Publication date Dec 1, 2005
- TOKYO ELECTRON LIMITED
- Steven T. Fink
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for monitoring film deposition in a process ch...
- Publication number 20050235917
- Publication date Oct 27, 2005
- TOKYO ELECTRON LIMITED
- Jim N. Fordemwalt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Honeycomb optical window deposition shield and method for a plasma...
- Publication number 20050225248
- Publication date Oct 13, 2005
- TOKYO ELECTRON LIMITED
- Steven T. Fink
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and system for fastening components used in plasma processing
- Publication number 20050220568
- Publication date Oct 6, 2005
- TOKYO ELECTRON LIMITED
- Steven T. Fink
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
Method and device for measuring whether a process kit part meets a...
- Publication number 20050211004
- Publication date Sep 29, 2005
- TOKYO ELECTRON LIMITED
- Steven T. Fink
- G01 - MEASURING TESTING
Information Patent Application
Sensing component used to monitor material buildup and material ero...
- Publication number 20050213079
- Publication date Sep 29, 2005
- TOKYO ELECTRON LIMITED
- Steven T. Fink
- G01 - MEASURING TESTING
Information Patent Application
Reduced volume reactor
- Publication number 20050150458
- Publication date Jul 14, 2005
- TOKYO ELECTRON LIMITED
- Steven T. Fink
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Multi-position stop mechanism
- Publication number 20050132829
- Publication date Jun 23, 2005
- TOKYO ELECTRON LIMITED
- Steven T. Fink
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for improved electrode plate
- Publication number 20050098106
- Publication date May 12, 2005
- TOKYO ELECTRON LIMITED
- Steven T. Fink
- H01 - BASIC ELECTRIC ELEMENTS

Steven T. FINK

Person

Patents Grantslast 30 patents

Photo-bioreactor system and method for production of bio-materials

Photo-bioreactor system and method

Thermally zoned substrate holder assembly

Thermally zoned substrate holder assembly

Thermally zoned substrate holder assembly

Chuck pedestal shield

Method and apparatus for removing external components from a proces...

Plasma processing system and baffle assembly for use in plasma proc...

Method and apparatus for an improved focus ring in a plasma process...

Method and apparatus for improved baffle plate

Method and apparatus for improved baffle plate

Method and apparatus to determine consumable part condition

Thermally zoned substrate holder assembly

Plasma processing device

Hybrid ball-lock attachment apparatus

Honeycomb optical window deposition shield and method for a plasma...

Multi-position stop mechanism

Method and apparatus for monitoring plasma conditions using a monit...

Method and apparatus for monitoring the condition of plasma equipment

Plasma chamber wall segment temperature control

Cylinder-based plasma processing system

Plasma source assembly and method of manufacture

Method of and apparatus for tailoring an etch profile

Multi-position stop mechanism

Sensing component used to monitor material buildup and material ero...

Integrated process tube and electrostatic shield, assembly thereof...

Method of using a sensor gas to determine erosion level of consumab...

Method and device for measuring whether a process kit part meets a...

Probe cartridge assembly and multi-probe assembly

Method and apparatus for improved focus ring

Patents Applicationslast 30 patents

PHOTO-BIOREACTOR SYSTEM AND METHOD FOR PRODUCTION OF BIO-MATERIALS

PHOTO-BIOREACTOR SYSTEM AND METHOD

THERMALLY ZONED SUBSTRATE HOLDER ASSEMBLY

THERMALLY ZONED SUBSTRATE HOLDER ASSEMBLY

Plasma source assembly and method of manufacture

Method and apparatus for modifying an etch profile

Plasma chamber wall segment temperature control

Plasma chamber wall segment temperature control

Plasma chamber wall segment temperature control

Plasma source assembly and method of manufacture

Multi-position stop mechanism

Apparatus for attachment of semiconductor hardware

Disposable plasma reactor materials and methods

Load bearing insulator in vacuum etch chambers

Chuck pedestal shield

Reduced volume, high conductance process chamber

Plasma processing system and baffle assembly for use in plasma proc...

Viewing window cleaning apparatus

Method and apparatus to determine consumable part condition

Method and apparatus for improved baffle plate

Plasma processing system and method

Pressure control and plasma confinement in a plasma processing chamber

Method and apparatus for monitoring film deposition in a process ch...

Honeycomb optical window deposition shield and method for a plasma...

Method and system for fastening components used in plasma processing

Method and device for measuring whether a process kit part meets a...

Sensing component used to monitor material buildup and material ero...

Reduced volume reactor

Multi-position stop mechanism

Method and apparatus for improved electrode plate