Steven W. Meeks

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Angle independent optical surface inspector
- Patent number 12,130,243
- Issue date Oct 29, 2024
- Lumina Instruments Inc.
- Steven W. Meeks
- G01 - MEASURING TESTING
Information Patent Grant
Region prober optical inspector
- Patent number 11,988,615
- Issue date May 21, 2024
- Lumina Instruments Inc.
- Steven W. Meeks
- G01 - MEASURING TESTING
Information Patent Grant
Time domain multiplexed defect scanner
- Patent number 11,852,592
- Issue date Dec 26, 2023
- Steven W. Meeks
- G01 - MEASURING TESTING
Information Patent Grant
Time domain multiplexed defect scanner
- Patent number 11,733,173
- Issue date Aug 22, 2023
- Lumina Instruments Inc.
- Steven W. Meeks
- G01 - MEASURING TESTING
Information Patent Grant
Region prober optical inspector
- Patent number 11,255,796
- Issue date Feb 22, 2022
- Lumina Instruments Inc.
- Steven W. Meeks
- G01 - MEASURING TESTING
Information Patent Grant
Scattered radiation defect depth detection
- Patent number 10,767,977
- Issue date Sep 8, 2020
- Lumina Instruments Inc.
- Steven W. Meeks
- G01 - MEASURING TESTING
Information Patent Grant
Dual mode inspector
- Patent number 10,769,769
- Issue date Sep 8, 2020
- KLA-Tencor Corporation
- Steven W. Meeks
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Scattered radiation optical scanner
- Patent number 10,648,928
- Issue date May 12, 2020
- Lumina Instruments Inc.
- Steven W. Meeks
- G02 - OPTICS
Information Patent Grant
Phase retardance optical scanner
- Patent number 10,641,713
- Issue date May 5, 2020
- Lumina Instruments Inc.
- Steven W. Meeks
- G02 - OPTICS
Information Patent Grant
Dual mode inspector
- Patent number 10,475,173
- Issue date Nov 12, 2019
- KLA-Tencor Corporation
- Steven W. Meeks
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and apparatus to detect defects in transparent solids
- Patent number 10,338,009
- Issue date Jul 2, 2019
- KLA-Tencor Corporation
- Steven W. Meeks
- G01 - MEASURING TESTING
Information Patent Grant
Multi-surface specular reflection inspector
- Patent number 10,094,787
- Issue date Oct 9, 2018
- KLA-Tencor Corporation
- Steven W. Meeks
- G01 - MEASURING TESTING
Information Patent Grant
Method of detecting defect location using multi-surface specular re...
- Patent number 9,921,169
- Issue date Mar 20, 2018
- Zeta Instruments, Inc.
- Steven W. Meeks
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus to optically detect defects in transparent solids
- Patent number 9,784,691
- Issue date Oct 10, 2017
- Zeta Instruments, Inc.
- Steven W. Meeks
- G01 - MEASURING TESTING
Information Patent Grant
Defect inspection and photoluminescence measurement system
- Patent number 9,163,987
- Issue date Oct 20, 2015
- KLA-Tencor Corporation
- Roman Sappey
- G01 - MEASURING TESTING
Information Patent Grant
Optical inspector
- Patent number 8,896,825
- Issue date Nov 25, 2014
- Zeta Instruments, Inc.
- Steven W. Meeks
- G01 - MEASURING TESTING
Information Patent Grant
Multi-surface scattered radiation differentiation
- Patent number 8,848,181
- Issue date Sep 30, 2014
- Zeta Instruments, Inc.
- Steven W. Meeks
- G01 - MEASURING TESTING
Information Patent Grant
Optical inspector with selective scattered radiation blocker
- Patent number 8,836,935
- Issue date Sep 16, 2014
- Zeta Instruments, Inc.
- Steven W. Meeks
- G01 - MEASURING TESTING
Information Patent Grant
Optical inspector
- Patent number 8,830,456
- Issue date Sep 9, 2014
- Zeta Instruments, Inc.
- Steven W. Meeks
- G01 - MEASURING TESTING
Information Patent Grant
Multi-surface optical inspector
- Patent number 8,830,457
- Issue date Sep 9, 2014
- Zeta Instruments, Inc.
- Steven W. Meeks
- G01 - MEASURING TESTING
Information Patent Grant
Detecting and classifying surface defects with multiple radiation c...
- Patent number 8,823,935
- Issue date Sep 2, 2014
- KLA-Tencor Corporation
- Steven W. Meeks
- G01 - MEASURING TESTING
Information Patent Grant
Substrate inspection
- Patent number 8,736,831
- Issue date May 27, 2014
- KLA-Tencor Corp.
- Mahendra Prabhu Ramachandran
- G01 - MEASURING TESTING
Information Patent Grant
Substrate edge inspection
- Patent number 8,325,334
- Issue date Dec 4, 2012
- KLA-Tencor Corporation
- Mahendra P. Ramachandran
- G01 - MEASURING TESTING
Information Patent Grant
Scattered light separation
- Patent number 7,907,269
- Issue date Mar 15, 2011
- KLA-Tencor Corporation
- Steven W. Meeks
- G01 - MEASURING TESTING
Information Patent Grant
Material independent profiler
- Patent number 7,714,995
- Issue date May 11, 2010
- KLA-Tencor Corporation
- Steven W. Meeks
- G01 - MEASURING TESTING
Information Patent Grant
Detecting and classifying surface features or defects by controllin...
- Patent number 7,688,435
- Issue date Mar 30, 2010
- KLA-Tencor Corporation
- Steven W. Meeks
- G01 - MEASURING TESTING
Information Patent Grant
Multi-wavelength system and method for detecting epitaxial layer de...
- Patent number 7,684,032
- Issue date Mar 23, 2010
- KLA-Tencor Corporation
- Steven W. Meeks
- G01 - MEASURING TESTING
Information Patent Grant
Wafer edge inspection
- Patent number 7,656,519
- Issue date Feb 2, 2010
- KLA-Tencor Corporation
- Steven W. Meeks
- G01 - MEASURING TESTING
Information Patent Grant
Surface finish roughness measurement
- Patent number 7,630,086
- Issue date Dec 8, 2009
- KLA-Tencor Corporation
- Dave S. Oak
- G01 - MEASURING TESTING
Information Patent Grant
Surface characteristic analysis
- Patent number 7,554,654
- Issue date Jun 30, 2009
- KLA-Tencor Corporation
- Steven W. Meeks
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
TIME DOMAIN MULTIPLEXED DEFECT SCANNER
- Publication number 20230341332
- Publication date Oct 26, 2023
- Steven W. Meeks
- G01 - MEASURING TESTING
Information Patent Application
SCANNING MICRO PROFILER
- Publication number 20220269071
- Publication date Aug 25, 2022
- Lumina Instruments
- Steven W. Meeks
- G02 - OPTICS
Information Patent Application
SURFACE CONTOUR MEASUREMENT
- Publication number 20220187057
- Publication date Jun 16, 2022
- Lumina Instruments
- Steven W. Meeks
- G01 - MEASURING TESTING
Information Patent Application
SLOPE, P-COMPONENT AND S-COMPONENT MEASUREMENT
- Publication number 20220187204
- Publication date Jun 16, 2022
- Lumina Instruments
- Steven W. Meeks
- G01 - MEASURING TESTING
Information Patent Application
ANGLE INDEPENDENT OPTICAL SURFACE INSPECTOR
- Publication number 20220187218
- Publication date Jun 16, 2022
- Steven W. Meeks
- G02 - OPTICS
Information Patent Application
REGION PROBER OPTICAL INSPECTOR
- Publication number 20220136982
- Publication date May 5, 2022
- Lumina Instruments
- Steven W. Meeks
- G01 - MEASURING TESTING
Information Patent Application
REGION PROBER OPTICAL INSPECTOR
- Publication number 20200319116
- Publication date Oct 8, 2020
- Lumina Instruments Inc.
- Steven W. Meeks
- G01 - MEASURING TESTING
Information Patent Application
SCATTERED RADIATION DEFECT DEPTH DETECTION
- Publication number 20200278192
- Publication date Sep 3, 2020
- Lumina Instruments Inc.
- Steven W. Meeks
- G01 - MEASURING TESTING
Information Patent Application
DUAL MODE INSPECTOR
- Publication number 20180005364
- Publication date Jan 4, 2018
- Zeta Instruments, Inc.
- Steven W. Meeks
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD OF DETECTING DEFECT LOCATION USING MULTI-SURFACE SPECULAR RE...
- Publication number 20170336330
- Publication date Nov 23, 2017
- Zeta Instruments, Inc.
- Steven W. Meeks
- G01 - MEASURING TESTING
Information Patent Application
MULTI-SURFACE SPECULAR REFLECTION INSPECTOR
- Publication number 20170336331
- Publication date Nov 23, 2017
- Zeta Instruments, Inc.
- Steven W. Meeks
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS TO DETECT DEFECTS IN TRANSPARENT SOLIDS
- Publication number 20170261440
- Publication date Sep 14, 2017
- Zeta Instruments, Inc.
- Steven W. Meeks
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS TO DETECT DEFECTS IN TRANSPARENT SOLIDS
- Publication number 20160033421
- Publication date Feb 4, 2016
- Zeta Instruments, Inc.
- Steven W. Meeks
- G01 - MEASURING TESTING
Information Patent Application
MULTI-SURFACE SCATTERED RADIATION DIFFERENTIATION
- Publication number 20140307255
- Publication date Oct 16, 2014
- Zeta Instruments, Inc.
- Steven W. Meeks
- G01 - MEASURING TESTING
Information Patent Application
Optical Inspector
- Publication number 20140218722
- Publication date Aug 7, 2014
- Zeta Instruments, Inc.
- Steven W. Meeks
- G02 - OPTICS
Information Patent Application
Optical Inspector
- Publication number 20140218724
- Publication date Aug 7, 2014
- Zeta Instruments, Inc.
- Steven W. Meeks
- G01 - MEASURING TESTING
Information Patent Application
Substrate Inspection
- Publication number 20130308124
- Publication date Nov 21, 2013
- KLA-Tencor Corporation
- Mahendra Prabhu Ramachandran
- G01 - MEASURING TESTING
Information Patent Application
DEFECT INSPECTION AND PHOTOLUMINESCENCE MEASUREMENT SYSTEM
- Publication number 20120049085
- Publication date Mar 1, 2012
- KLA-Tencor Corporation
- Roman Sappey
- G01 - MEASURING TESTING
Information Patent Application
Substrate Edge Inspection
- Publication number 20110058174
- Publication date Mar 10, 2011
- KLA-Tencor Corporation
- Mahendra P. Ramachandran
- G01 - MEASURING TESTING
Information Patent Application
Scattered Light Separation
- Publication number 20110019197
- Publication date Jan 27, 2011
- KLA-Tencor Corporation
- Steven W. Meeks
- G01 - MEASURING TESTING
Information Patent Application
Wafer Edge Inspection
- Publication number 20090059236
- Publication date Mar 5, 2009
- KLA-Tencor Technologies Corporation
- Steven W. Meeks
- G01 - MEASURING TESTING
Information Patent Application
SURFACE CHARACTERISTIC ANALYSIS
- Publication number 20080180656
- Publication date Jul 31, 2008
- KLA-Tencor Technologies Corporation
- Steven W. Meeks
- G01 - MEASURING TESTING
Information Patent Application
MATERIAL INDEPENDENT PROFILER
- Publication number 20070153273
- Publication date Jul 5, 2007
- Steven W. Meeks
- G01 - MEASURING TESTING
Information Patent Application
WAFER EDGE INSPECTION
- Publication number 20070127016
- Publication date Jun 7, 2007
- Steven W. Meeks
- G01 - MEASURING TESTING
Information Patent Application
SURFACE FINISH ROUGHNESS MEASUREMENT
- Publication number 20070115483
- Publication date May 24, 2007
- Dave S. Oak
- G01 - MEASURING TESTING
Information Patent Application
Wafer edge inspection
- Publication number 20060250609
- Publication date Nov 9, 2006
- KLA-Tencor Technologies Corp.
- Steven W. Meeks
- G01 - MEASURING TESTING
Information Patent Application
Wafer edge inspection
- Publication number 20060250610
- Publication date Nov 9, 2006
- KLA-Tencor Technologies Corp.
- Steven W. Meeks
- G01 - MEASURING TESTING
Information Patent Application
Detecting and classifying surface features or defects by controllin...
- Publication number 20060250612
- Publication date Nov 9, 2006
- Steven W. Meeks
- G01 - MEASURING TESTING
Information Patent Application
Wafer edge inspection
- Publication number 20060250611
- Publication date Nov 9, 2006
- KLA-Tencor Technologies Corp.
- Vamsi Velidandla
- G01 - MEASURING TESTING
Information Patent Application
Servo pattern characterization on magnetic disks
- Publication number 20060215289
- Publication date Sep 28, 2006
- KLA-Tencor Technologies Corp.
- Zhen Hou
- G11 - INFORMATION STORAGE

Steven W. Meeks

Person

Patents Grantslast 30 patents

Angle independent optical surface inspector

Region prober optical inspector

Time domain multiplexed defect scanner

Time domain multiplexed defect scanner

Region prober optical inspector

Scattered radiation defect depth detection

Dual mode inspector

Scattered radiation optical scanner

Phase retardance optical scanner

Dual mode inspector

Method and apparatus to detect defects in transparent solids

Multi-surface specular reflection inspector

Method of detecting defect location using multi-surface specular re...

Method and apparatus to optically detect defects in transparent solids

Defect inspection and photoluminescence measurement system

Optical inspector

Multi-surface scattered radiation differentiation

Optical inspector with selective scattered radiation blocker

Optical inspector

Multi-surface optical inspector

Detecting and classifying surface defects with multiple radiation c...

Substrate inspection

Substrate edge inspection

Scattered light separation

Material independent profiler

Detecting and classifying surface features or defects by controllin...

Multi-wavelength system and method for detecting epitaxial layer de...

Wafer edge inspection

Surface finish roughness measurement

Surface characteristic analysis

Patents Applicationslast 30 patents

TIME DOMAIN MULTIPLEXED DEFECT SCANNER

SCANNING MICRO PROFILER

SURFACE CONTOUR MEASUREMENT

SLOPE, P-COMPONENT AND S-COMPONENT MEASUREMENT

ANGLE INDEPENDENT OPTICAL SURFACE INSPECTOR

REGION PROBER OPTICAL INSPECTOR

REGION PROBER OPTICAL INSPECTOR

SCATTERED RADIATION DEFECT DEPTH DETECTION

DUAL MODE INSPECTOR

METHOD OF DETECTING DEFECT LOCATION USING MULTI-SURFACE SPECULAR RE...

MULTI-SURFACE SPECULAR REFLECTION INSPECTOR

METHOD AND APPARATUS TO DETECT DEFECTS IN TRANSPARENT SOLIDS

METHOD AND APPARATUS TO DETECT DEFECTS IN TRANSPARENT SOLIDS

MULTI-SURFACE SCATTERED RADIATION DIFFERENTIATION

Optical Inspector

Optical Inspector

Substrate Inspection

DEFECT INSPECTION AND PHOTOLUMINESCENCE MEASUREMENT SYSTEM

Substrate Edge Inspection

Scattered Light Separation

Wafer Edge Inspection

SURFACE CHARACTERISTIC ANALYSIS

MATERIAL INDEPENDENT PROFILER

WAFER EDGE INSPECTION

SURFACE FINISH ROUGHNESS MEASUREMENT

Wafer edge inspection

Wafer edge inspection

Detecting and classifying surface features or defects by controllin...

Wafer edge inspection

Servo pattern characterization on magnetic disks