Subhadra Gupta

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Valley Cottage, NY, US

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Patents Grantslast 30 patents

Information Patent Grant
Stable high rate reactive sputtering
- Patent number 6,537,428
- Issue date Mar 25, 2003
- Veeco Instruments, Inc.
- Wei Xiong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process equipment with simultaneous or sequential deposition and et...
- Patent number 5,958,134
- Issue date Sep 28, 1999
- Tokyo Electron Limited
- Tugrul Yasar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...