Subhas Bothra

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method of using films having optimized optical properties for chemi...
- Patent number 6,916,525
- Issue date Jul 12, 2005
- Koninklijke Philips Electronics N.V.
- Subhas Bothra
- B24 - GRINDING POLISHING
Information Patent Grant
Semiconductor pressure transducer structures and methods for making...
- Patent number 6,756,316
- Issue date Jun 29, 2004
- Koninklijke Philips Electronics N.V.
- Subhas Bothra
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of using films having optimized optical properties for chemi...
- Patent number 6,649,253
- Issue date Nov 18, 2003
- Koninklijke Philips Electronics N.V.
- Subhas Bothra
- B24 - GRINDING POLISHING
Information Patent Grant
Programmable semiconductor device structures and methods for making...
- Patent number 6,472,253
- Issue date Oct 29, 2002
- VLSI Technology, Inc.
- Subhas Bothra
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Modified optics for imaging of lens limited subresolution features
- Patent number 6,411,367
- Issue date Jun 25, 2002
- VLSI Technology, Inc.
- Daniel C. Baker
- G02 - OPTICS
Information Patent Grant
Process to control poly silicon profiles in a dual doped poly silic...
- Patent number 6,399,432
- Issue date Jun 4, 2002
- Philips Semiconductors Inc.
- Tammy Zheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for reducing the capacitance between interconnects by formin...
- Patent number 6,387,797
- Issue date May 14, 2002
- Philips Electronics No. America Corp.
- Subhas Bothra
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Use of optimized film stacks for increasing absorption for laser re...
- Patent number 6,372,522
- Issue date Apr 16, 2002
- VLSI Technology, Inc.
- Milind Ganesh Weling
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Automated design of on-chip capacitive structures for suppressing i...
- Patent number 6,327,695
- Issue date Dec 4, 2001
- Philips Electronics North America Corporation
- Subhas Bothra
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for determining nitrogen concentration in a film of nitrided...
- Patent number 6,313,466
- Issue date Nov 6, 2001
- Philips Electronics North America Corp.
- Christopher S. Olsen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process to improve adhesion of PECVD cap layers in integrated circuits
- Patent number 6,303,192
- Issue date Oct 16, 2001
- Philips Semiconductor Inc.
- Rao V. Annapragada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reliable aluminum interconnect via structures
- Patent number 6,297,557
- Issue date Oct 2, 2001
- Philips Electronics North America Corp.
- Subhas Bothra
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor structures for suppressing gate oxide plasma charging...
- Patent number 6,277,708
- Issue date Aug 21, 2001
- Philips Electronics North America Corp.
- Subhas Bothra
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for design rule checking
- Patent number 6,275,971
- Issue date Aug 14, 2001
- Philips Electronics North America Corporation
- Harold J. Levy
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Apparatus for automated pillar layout
- Patent number 6,226,782
- Issue date May 1, 2001
- Philips Electronics North America Corp.
- Edward D. Nowak
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for forming aligned vias under trenches in a dual damascene...
- Patent number 6,221,759
- Issue date Apr 24, 2001
- Philips Electronics North America Corp.
- Subhas Bothra
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of using films having optimized optical properties for chemi...
- Patent number 6,214,734
- Issue date Apr 10, 2001
- VLSI Technology, Inc.
- Subhas Bothra
- B24 - GRINDING POLISHING
Information Patent Grant
Electromigration impeding composite metallization lines and methods...
- Patent number 6,191,481
- Issue date Feb 20, 2001
- Philips Electronics North America Corp.
- Subhas Bothra
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Design level optical proximity correction methods
- Patent number 6,189,136
- Issue date Feb 13, 2001
- Philips Electronics, North America Corp.
- Subhas Bothra
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Methods of forming a semiconductor device
- Patent number 6,176,983
- Issue date Jan 23, 2001
- VLSI Technology, Inc.
- Subhas Bothra
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for substantially preventing footings in chemically amplifie...
- Patent number 6,162,586
- Issue date Dec 19, 2000
- Philips Electronics North America Corp.
- Samit S. Sengupta
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for preventing electrochemical erosion of interconnect struc...
- Patent number 6,153,531
- Issue date Nov 28, 2000
- Philips Electronics North America Corporation
- Subhas Bothra
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Programmable semiconductor structures and methods for making the same
- Patent number 6,143,642
- Issue date Nov 7, 2000
- VLSI Technology, Inc.
- Harlan Lee Sur
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device having load device with trench isolation regio...
- Patent number 6,140,188
- Issue date Oct 31, 2000
- Philips Semiconductors, Inc.
- Harlan Sur
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for forming vias through porous dielectric material and devi...
- Patent number 6,140,221
- Issue date Oct 31, 2000
- Philips Electronics North America Corp.
- Rao Venkateswara Annapragada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of making photo alignment structure
- Patent number 6,133,111
- Issue date Oct 17, 2000
- Philips Electronics North America Corporation
- Harlan Sur
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Process for making self-aligned conductive via structures
- Patent number 6,133,635
- Issue date Oct 17, 2000
- Philips Electronics North America Corp.
- Subhas Bothra
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor manufacturing apparatus and method for measuring in-s...
- Patent number 6,129,613
- Issue date Oct 10, 2000
- Philips Electronics North America Corp.
- Subhas Bothra
- B24 - GRINDING POLISHING
Information Patent Grant
Micro-electromechanical system and voltage shifter, method of synch...
- Patent number 6,127,811
- Issue date Oct 3, 2000
- VLSI Technology, Inc.
- Jayarama N. Shenoy
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for making reliable interconnect structures
- Patent number 6,093,658
- Issue date Jul 25, 2000
- Philips Electronics North America Corporation
- Subhas Bothra
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Method of using films having optimized optical properties for chemi...
- Publication number 20040058543
- Publication date Mar 25, 2004
- Subhas Bothra
- B24 - GRINDING POLISHING
Information Patent Application
Reduced gate length transistor structures and methods for fabricati...
- Publication number 20010009792
- Publication date Jul 26, 2001
- Subhas Bothra
- H01 - BASIC ELECTRIC ELEMENTS

Subhas Bothra

Person

Patents Grantslast 30 patents

Method of using films having optimized optical properties for chemi...

Semiconductor pressure transducer structures and methods for making...

Method of using films having optimized optical properties for chemi...

Programmable semiconductor device structures and methods for making...

Modified optics for imaging of lens limited subresolution features

Process to control poly silicon profiles in a dual doped poly silic...

Method for reducing the capacitance between interconnects by formin...

Use of optimized film stacks for increasing absorption for laser re...

Automated design of on-chip capacitive structures for suppressing i...

Method for determining nitrogen concentration in a film of nitrided...

Process to improve adhesion of PECVD cap layers in integrated circuits

Reliable aluminum interconnect via structures

Semiconductor structures for suppressing gate oxide plasma charging...

Methods and apparatus for design rule checking

Apparatus for automated pillar layout

Method for forming aligned vias under trenches in a dual damascene...

Method of using films having optimized optical properties for chemi...

Electromigration impeding composite metallization lines and methods...

Design level optical proximity correction methods

Methods of forming a semiconductor device

Method for substantially preventing footings in chemically amplifie...

Method for preventing electrochemical erosion of interconnect struc...

Programmable semiconductor structures and methods for making the same

Semiconductor device having load device with trench isolation regio...

Method for forming vias through porous dielectric material and devi...

Method of making photo alignment structure

Process for making self-aligned conductive via structures

Semiconductor manufacturing apparatus and method for measuring in-s...

Micro-electromechanical system and voltage shifter, method of synch...

Method for making reliable interconnect structures

Patents Applicationslast 30 patents

Method of using films having optimized optical properties for chemi...

Reduced gate length transistor structures and methods for fabricati...