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CHAMBER COATINGS
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Publication date Aug 6, 2015
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Applied Materials, Inc.
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LOW PROFILE PROCESS KIT
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High density plasma CVD chamber
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Publication number 20060191478
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Publication date Aug 31, 2006
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Applied Materials, Inc.
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Upper chamber for high density plasma CVD
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Publication number 20030213434
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Publication date Nov 20, 2003
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Applied Materials, Inc.
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Sudhir Gondhalekar
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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High density plasma CVD chamber
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Publication number 20030213562
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Publication date Nov 20, 2003
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Applied Materials, Inc.
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Sudhir Gondhalekar
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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