Suguru SATO

Person

Miyagi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus, substrate processing system, and ma...
- Patent number 12,040,166
- Issue date Jul 16, 2024
- Tokyo Electron Limited
- Atsushi Sawachi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Measuring device, measuring method, and vacuum processing apparatus
- Patent number 12,002,666
- Issue date Jun 4, 2024
- Tokyo Electron Limited
- Atsushi Sawachi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Part replacement system and part replacement device
- Patent number 11,992,912
- Issue date May 28, 2024
- Tokyo Electron Limited
- Atsushi Sawachi
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method for driving member and processing apparatus
- Patent number 10,825,662
- Issue date Nov 3, 2020
- Tokyo Electron Limited
- Rumiko Moriya
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING SYSTEM, AND MA...
- Publication number 20240339306
- Publication date Oct 10, 2024
- TOKYO ELECTRON LIMITED
- Atsushi SAWACHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MEASURING DEVICE, MEASURING METHOD, AND VACUUM PROCESSING APPARATUS
- Publication number 20240290591
- Publication date Aug 29, 2024
- TOKYO ELECTRON LIMITED
- Atsushi SAWACHI
- G01 - MEASURING TESTING
Information Patent Application
PART REPLACEMENT SYSTEM AND PART REPLACEMENT DEVICE
- Publication number 20240261918
- Publication date Aug 8, 2024
- TOKYO ELECTRON LIMITED
- Atsushi Sawachi
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
COMPONENT REPLACEMENT METHOD, COMPONENT REPLACEMENT DEVICE, AND COM...
- Publication number 20240128064
- Publication date Apr 18, 2024
- TOKYO ELECTRON LIMITED
- Hiroki ENDO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND MAINTENANCE METHOD FOR SUBSTRATE...
- Publication number 20230071478
- Publication date Mar 9, 2023
- TOKYO ELECTRON LIMITED
- Hiroki Endo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING SYSTEM, AND MA...
- Publication number 20220122818
- Publication date Apr 21, 2022
- TOKYO ELECTRON LIMITED
- Atsushi SAWACHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20210407768
- Publication date Dec 30, 2021
- TOKYO ELECTRON LIMITED
- Atsushi SAWACHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PART REPLACEMENT SYSTEM AND PART REPLACEMENT DEVICE
- Publication number 20210339350
- Publication date Nov 4, 2021
- TOKYO ELECTRON LIMITED
- Atsushi Sawachi
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
MEASURING DEVICE, MEASURING METHOD, AND VACUUM PROCESSING APPARATUS
- Publication number 20210175055
- Publication date Jun 10, 2021
- TOKYO ELECTRON LIMITED
- Atsushi SAWACHI
- G01 - MEASURING TESTING
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20210020416
- Publication date Jan 21, 2021
- TOKYO ELECTRON LIMITED
- Rumiko MORIYA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR DRIVING MEMBER AND PROCESSING APPARATUS
- Publication number 20190355557
- Publication date Nov 21, 2019
- TOKYO ELECTRON LIMITED
- Rumiko MORIYA
- H01 - BASIC ELECTRIC ELEMENTS

Suguru SATO

Person

Patents Grantslast 30 patents

Substrate processing apparatus, substrate processing system, and ma...

Measuring device, measuring method, and vacuum processing apparatus

Part replacement system and part replacement device

Method for driving member and processing apparatus

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING SYSTEM, AND MA...

MEASURING DEVICE, MEASURING METHOD, AND VACUUM PROCESSING APPARATUS

PART REPLACEMENT SYSTEM AND PART REPLACEMENT DEVICE

COMPONENT REPLACEMENT METHOD, COMPONENT REPLACEMENT DEVICE, AND COM...

SUBSTRATE PROCESSING APPARATUS AND MAINTENANCE METHOD FOR SUBSTRATE...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING SYSTEM, AND MA...

SUBSTRATE PROCESSING APPARATUS

PART REPLACEMENT SYSTEM AND PART REPLACEMENT DEVICE

MEASURING DEVICE, MEASURING METHOD, AND VACUUM PROCESSING APPARATUS

PLASMA PROCESSING APPARATUS

METHOD FOR DRIVING MEMBER AND PROCESSING APPARATUS