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Fremont, CA, US
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Patents Grants
last 30 patents
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Patent Grant
Profile and CD uniformity control by plasma oxidation treatment
Patent number
8,671,878
Issue date
Mar 18, 2014
Lam Research Corporation
Qinghua Zhong
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Profile and CD uniformity control by plasma oxidation treatment
Patent number
8,298,949
Issue date
Oct 30, 2012
Lam Research Corporation
Qinghua Zhong
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
PROFILE AND CD UNIFORMITY CONTROL BY PLASMA OXIDATION TREATMENT
Publication number
20130025785
Publication date
Jan 31, 2013
LAM RESEARCH CORPORATION
Qinghua Zhong
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PROFILE AND CD UNIFORMITY CONTROL BY PLASMA OXIDATION TREATMENT
Publication number
20100173496
Publication date
Jul 8, 2010
LAM RESEARCH CORPORATION
Qinghua Zhong
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR PROCESSING INCLUDING ETCHED LAYER PASSIVATION USING S...
Publication number
20080064214
Publication date
Mar 13, 2008
LAM RESEARCH CORPORATION
Taejoon Han
H01 - BASIC ELECTRIC ELEMENTS