Sung Lee

Person

Pleasanton, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Systems and methods for correcting non-uniformities in plasma proce...
- Patent number 10,872,748
- Issue date Dec 22, 2020
- Lam Research Corporation
- Harmeet Singh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Component of a substrate support assembly producing localized magne...
- Patent number 10,388,493
- Issue date Aug 20, 2019
- Lam Research Corporation
- Harmeet Singh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Edge seal for lower electrode assembly
- Patent number 9,869,392
- Issue date Jan 16, 2018
- Lam Research Corporation
- David Schaefer
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Edge seal for lower electrode assembly
- Patent number 9,859,142
- Issue date Jan 2, 2018
- Lam Research Corporation
- David Schaefer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Installation fixture for elastomer bands and methods of using the same
- Patent number 9,355,884
- Issue date May 31, 2016
- Lam Research Corporation
- Rish Chhatre
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Installation fixture for elastomer bands and methods of using the same
- Patent number 8,844,106
- Issue date Sep 30, 2014
- Lam Research Corporation
- Rish Chhatre
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SYSTEMS AND METHODS FOR CORRECTING NON-UNIFORMITIES IN PLASMA PROCE...
- Publication number 20190371576
- Publication date Dec 5, 2019
- LAM RESEARCH CORPORATION
- Harmeet Singh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EDGE SEAL FOR LOWER ELECTRODE ASSEMBLY
- Publication number 20180106371
- Publication date Apr 19, 2018
- LAM RESEARCH CORPORATION
- David Schaefer
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
INSTALLATION FIXTURE FOR ELASTOMER BANDS AND METHODS OF USING THE SAME
- Publication number 20140366360
- Publication date Dec 18, 2014
- Rish Chhatre
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EDGE SEAL FOR LOWER ELECTRODE ASSEMBLY
- Publication number 20130340942
- Publication date Dec 26, 2013
- LAM RESEARCH CORPORATION
- David Schaefer
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
INSTALLATION FIXTURE FOR ELASTOMER BANDS AND METHODS OF USING THE SAME
- Publication number 20130117986
- Publication date May 16, 2013
- LAM RESEARCH CORPORATION
- Rish Chhatre
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EDGE SEAL FOR LOWER ELECTRODE ASSEMBLY
- Publication number 20130097840
- Publication date Apr 25, 2013
- LAM RESEARCH CORPORATION
- David Schaefer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COMPONENT OF A SUBSTRATE SUPPORT ASSEMBLY PRODUCING LOCALIZED MAGNE...
- Publication number 20130072025
- Publication date Mar 21, 2013
- LAM RESEARCH CORPORATION
- Harmeet Singh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Rapid Prototyping of Microstructures Using a Cutting Plotter
- Publication number 20090211690
- Publication date Aug 27, 2009
- Daniel A. Bartholomeusz
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL

Person

Patents Grantslast 30 patents

Systems and methods for correcting non-uniformities in plasma proce...

Component of a substrate support assembly producing localized magne...

Edge seal for lower electrode assembly

Edge seal for lower electrode assembly

Installation fixture for elastomer bands and methods of using the same

Installation fixture for elastomer bands and methods of using the same

Patents Applicationslast 30 patents

SYSTEMS AND METHODS FOR CORRECTING NON-UNIFORMITIES IN PLASMA PROCE...

EDGE SEAL FOR LOWER ELECTRODE ASSEMBLY

INSTALLATION FIXTURE FOR ELASTOMER BANDS AND METHODS OF USING THE SAME

EDGE SEAL FOR LOWER ELECTRODE ASSEMBLY

INSTALLATION FIXTURE FOR ELASTOMER BANDS AND METHODS OF USING THE SAME

EDGE SEAL FOR LOWER ELECTRODE ASSEMBLY

COMPONENT OF A SUBSTRATE SUPPORT ASSEMBLY PRODUCING LOCALIZED MAGNE...

Rapid Prototyping of Microstructures Using a Cutting Plotter