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Patents Grants
last 30 patents
Information
Patent Grant
Multi-layer dielectric stack for plasma damage protection
Patent number
9,391,024
Issue date
Jul 12, 2016
Applied Materials, Inc.
Bo Xie
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Post treatment for dielectric constant reduction with pore generati...
Patent number
9,324,571
Issue date
Apr 26, 2016
Applied Materials, Inc.
Kang Sub Yim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Adhesion layer to minimize dielectric constant increase with good a...
Patent number
9,165,998
Issue date
Oct 20, 2015
Applied Materials, Inc.
Kang Sub Yim
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Microelectronic structure including a low k dielectric and a method...
Patent number
8,349,746
Issue date
Jan 8, 2013
Applied Materials, Inc.
Bo Xie
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
SYSTEMS AND METHODS FOR DEPOSITING LOW-K DIELECTRIC FILMS
Publication number
20220084815
Publication date
Mar 17, 2022
Applied Materials, Inc.
Bo Xie
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEMS AND METHODS FOR CLEANING LOW-K DEPOSITION CHAMBERS
Publication number
20220081765
Publication date
Mar 17, 2022
Applied Materials, Inc.
Bo Xie
B08 - CLEANING
Information
Patent Application
MULTI-LAYER DIELECTRIC STACK FOR PLASMA DAMAGE PROTECTION
Publication number
20160111373
Publication date
Apr 21, 2016
Applied Materials, Inc.
Bo XIE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
POST TREATMENT FOR DIELECTRIC CONSTANT REDUCTION WITH PORE GENERATI...
Publication number
20150380265
Publication date
Dec 31, 2015
Applied Materials, Inc.
Kang Sub YIM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ADHESION LAYER TO MINIMIZE DIELECTRIC CONSTANT INCREASE WITH GOOD A...
Publication number
20140264780
Publication date
Sep 18, 2014
Applied Materials, Inc.
Kang Sub YIM
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
IN-SITU LOW-K CAPPING TO IMPROVE INTEGRATION DAMAGE RESISTANCE
Publication number
20120156890
Publication date
Jun 21, 2012
Applied Materials, Inc.
KANG SUB YIM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Microelectronic structure including a low K dielectric and a method...
Publication number
20110204492
Publication date
Aug 25, 2011
APPLIED MATERIALS, INC.
Bo Xie
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...