Surinder Bedi

Person

Fremont, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Apparatus for reducing entrapment of foreign matter along a moveabl...
- Patent number 7,582,167
- Issue date Sep 1, 2009
- Applied Materials, Inc.
- Andrzej Kaszuba
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for reducing entrapment of foreign matter along a moveabl...
- Patent number 7,279,049
- Issue date Oct 9, 2007
- Applied Materials, Inc.
- Andrzej Kaszuba
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for monitoring the position of a semiconductor...
- Patent number 7,107,125
- Issue date Sep 12, 2006
- Applied Materials, Inc.
- Pyongwon Yim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate support having barrier capable of detecting fluid leakage
- Patent number 6,913,670
- Issue date Jul 5, 2005
- Applied Materials, Inc.
- Kadthala R. Narendrnath
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electrostatic chuck having heater and method
- Patent number 6,538,872
- Issue date Mar 25, 2003
- Applied Materials, Inc.
- You Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Support for supporting a substrate in a process chamber
- Patent number 6,490,144
- Issue date Dec 3, 2002
- Applied Materials, Inc.
- Kadthala R. Narendrnath
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Electrostatic chuck bonded to base with a bond layer and method
- Patent number 6,490,146
- Issue date Dec 3, 2002
- Applied Materials Inc.
- You Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck having improved electrical connector and method
- Patent number 6,462,928
- Issue date Oct 8, 2002
- Applied Materials, Inc.
- Shamouil Shamouilian
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Electrostatic chuck having gas cavity and method
- Patent number 6,310,755
- Issue date Oct 30, 2001
- Applied Materials, Inc.
- Arnold Kholodenko
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Grant
Electrostatic chuck with improved temperature control and puncture...
- Patent number 6,278,600
- Issue date Aug 21, 2001
- Applied Materials, Inc.
- Shamouil Shamouilian
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Polymer chuck with heater and method of manufacture
- Patent number 6,094,334
- Issue date Jul 25, 2000
- Applied Materials, Inc.
- Surinder S. Bedi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-electrode electrostatic chuck having fuses in hollow cavities
- Patent number 6,055,150
- Issue date Apr 25, 2000
- Applied Materials, Inc.
- Jon Clinton
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Puncture resistant electrostatic chuck
- Patent number 5,986,875
- Issue date Nov 16, 1999
- Applied Materials, Inc.
- Arik Donde
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Puncture resistant electrostatic chuck
- Patent number 5,729,423
- Issue date Mar 17, 1998
- Applied Materials, Inc.
- Arik Donde
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR MONITORING THE POSITION OF A SEMICONDUCTOR PROCESSING ROBOT
- Publication number 20100145513
- Publication date Jun 10, 2010
- Applied Materials, Inc.
- Pyongwon Yim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR REDUCING ENTRAPMENT OF FOREIGN MATTER ALONG A MOVEABL...
- Publication number 20080017115
- Publication date Jan 24, 2008
- Andrzej Kaszuba
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR MONITORING THE POSITION OF A SEMICONDUCTOR PROCESSING ROBOT
- Publication number 20060224276
- Publication date Oct 5, 2006
- Pyongwon Yim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus for reducing entrapment of foreign matter along a moveabl...
- Publication number 20050172905
- Publication date Aug 11, 2005
- APPLIED MATERIALS, INC.
- Andrzej Kaszuba
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and apparatus for monitoring the position of a semiconductor...
- Publication number 20050096794
- Publication date May 5, 2005
- APPLIED MATERIALS, INC.
- Pyongwon Yim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate support having barrier capable of detecting fluid leakage
- Publication number 20030188830
- Publication date Oct 9, 2003
- APPLIED MATERIALS, INC.
- Kadthala R. Narendrnath
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Electrostatic chuck bonded to base with a bond layer and method
- Publication number 20020075624
- Publication date Jun 20, 2002
- APPLIED MATERIALS, INC.
- You Wang
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Application
ELECTROSTATIC CHUCK HAVING COMPOSITE BASE AND METHOD
- Publication number 20020036881
- Publication date Mar 28, 2002
- SHAMOUIL SHAMOUILIAN
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES

Surinder Bedi

Person

Patents Grantslast 30 patents

Apparatus for reducing entrapment of foreign matter along a moveabl...

Apparatus for reducing entrapment of foreign matter along a moveabl...

Method and apparatus for monitoring the position of a semiconductor...

Substrate support having barrier capable of detecting fluid leakage

Electrostatic chuck having heater and method

Support for supporting a substrate in a process chamber

Electrostatic chuck bonded to base with a bond layer and method

Electrostatic chuck having improved electrical connector and method

Electrostatic chuck having gas cavity and method

Electrostatic chuck with improved temperature control and puncture...

Polymer chuck with heater and method of manufacture

Multi-electrode electrostatic chuck having fuses in hollow cavities

Puncture resistant electrostatic chuck

Puncture resistant electrostatic chuck

Patents Applicationslast 30 patents

METHOD FOR MONITORING THE POSITION OF A SEMICONDUCTOR PROCESSING ROBOT

APPARATUS FOR REDUCING ENTRAPMENT OF FOREIGN MATTER ALONG A MOVEABL...

METHOD FOR MONITORING THE POSITION OF A SEMICONDUCTOR PROCESSING ROBOT

Apparatus for reducing entrapment of foreign matter along a moveabl...

Method and apparatus for monitoring the position of a semiconductor...

Substrate support having barrier capable of detecting fluid leakage

Electrostatic chuck bonded to base with a bond layer and method

ELECTROSTATIC CHUCK HAVING COMPOSITE BASE AND METHOD