SUSAN B. FELCH

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Los Altos, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Plasma-based material modification using a plasma source with magne...
- Patent number 9,653,253
- Issue date May 16, 2017
- Advanced Ion Beam Technology, Inc.
- William Divergilio
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for forming NMOS EPI layers
- Patent number 8,999,798
- Issue date Apr 7, 2015
- Applied Materials, Inc.
- Mitchell C. Taylor
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for obtaining dose uniformity in plasma doping (PLAD) ion...
- Patent number 5,711,812
- Issue date Jan 27, 1998
- Varian Associates, Inc.
- David LeRoy Chapek
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Charge monitor for high potential pulse current dose measurement ap...
- Patent number 5,572,038
- Issue date Nov 5, 1996
- Varian Associates, Inc.
- Terry T. Sheng
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA-BASED MATERIAL MODIFICATION USING A PLASMA SOURCE WITH MAGNE...
- Publication number 20150255242
- Publication date Sep 10, 2015
- ADVANCED ION BEAM TECHNOLOGY, INC.
- William DIVERGILIO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR FORMING NMOS EPI LAYERS
- Publication number 20110175140
- Publication date Jul 21, 2011
- Applied Materials, Inc.
- MITCHELL C. TAYLOR
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ULTRA SHALLOW JUNCTION WITH RAPID THERMAL ANNEAL
- Publication number 20080090393
- Publication date Apr 17, 2008
- Wolfgang Aderhold
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
USE OF CARBON CO-IMPLANTATION WITH MILLISECOND ANNEAL TO PRODUCE UL...
- Publication number 20080023732
- Publication date Jan 31, 2008
- SUSAN B. FELCH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods and apparatus for monitoring plasma parameters in plasma do...
- Publication number 20040016402
- Publication date Jan 29, 2004
- Steven R. Walther
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of forming ultra shallow junctions
- Publication number 20030096490
- Publication date May 22, 2003
- John Borland
- H01 - BASIC ELECTRIC ELEMENTS