Susan Ellingboe

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Fremont, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Technique for etching a low capacitance dielectric layer
- Patent number 6,696,366
- Issue date Feb 24, 2004
- Lam Research Corporation
- Ian J. Morey
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Convertible hot edge ring to improve low-K dielectric etch
- Patent number 6,653,734
- Issue date Nov 25, 2003
- Lam Research Corporation
- Janet M. Flanner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Convertible hot edge ring to improve low-K dielectric etch
- Patent number 6,383,931
- Issue date May 7, 2002
- Lam Research Corporation
- Janet M. Flanner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Techniques for etching a low capacitance dielectric layer on a subs...
- Patent number 6,114,250
- Issue date Sep 5, 2000
- Lam Research Corporation
- Susan Ellingboe
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Convertible hot edge ring to improve low-K dielectric etch
- Publication number 20030045101
- Publication date Mar 6, 2003
- Janet M Flanner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Convertible hot edge ring to improve low-k dielectric etch
- Publication number 20020022281
- Publication date Feb 21, 2002
- Janet M Flanner
- H01 - BASIC ELECTRIC ELEMENTS