Susumu IIDA

Follow

Person

Yoshikawa Saitama, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate and method for calibration of measurement apparatus
- Patent number 11,549,807
- Issue date Jan 10, 2023
- Kioxia Corporation
- Susumu Iida
- G01 - MEASURING TESTING
Information Patent Grant
Ultrafine lithography pattern inspection using multi-stage TDI imag...
- Patent number 8,254,663
- Issue date Aug 28, 2012
- Kabushiki Kaisha Toshiba
- Akira Kataoka
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Mask inspection apparatus
- Patent number 8,154,719
- Issue date Apr 10, 2012
- Nuflare Technology, Inc.
- Susumu Iida
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE AND METHOD FOR CALIBRATION OF MEASUREMENT APPARATUS
- Publication number 20210082662
- Publication date Mar 18, 2021
- KIOXIA Corporation
- Susumu IIDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IMAGE ACQUISITION APPARATUS, IMAGE ACQUISITION METHOD AND DEFECT IN...
- Publication number 20150041645
- Publication date Feb 12, 2015
- Kabushiki Kaisha Toshiba
- Susumu IIDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MASK INSPECTION APPARATUS
- Publication number 20090244530
- Publication date Oct 1, 2009
- Advanced Mask Inspection Technology, Inc.
- Susumu Iida
- G01 - MEASURING TESTING
Information Patent Application
ULTRAFINE LITHOGRAPHY PATTERN INSPECTION USING MULTI-STAGE TDI IMAG...
- Publication number 20090238446
- Publication date Sep 24, 2009
- Advanced Mask Inspection Technology, Inc.
- Akira Kataoka
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
WAVELENGTH CONVERTER SYSTEM, CRYSTAL STORAGE APPARATUS, AND CRYSTAL...
- Publication number 20080291528
- Publication date Nov 27, 2008
- Advanced Mask Inspection Technology, Inc.
- Iida SUSUMU
- G02 - OPTICS