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Susumu Tauchi

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Patents Grantslast 30 patents

  • Information Patent Grant

    Plasma processing apparatus
    • Patent number 10,665,436
    • Issue date May 26, 2020
    • HITACHI HIGH-TECH CORPORATION
    • Takashi Uemura
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Upper chamber for a plasma processing apparatus
    • Patent number D812578
    • Issue date Mar 13, 2018
    • Hitachi High-Technologies Corporation
    • Takashi Uemura
    • D13 - Equipment for production, distribution, or transformation of energy
  • Information Patent Grant

    Upper chamber for a plasma processing apparatus
    • Patent number D804436
    • Issue date Dec 5, 2017
    • Hitachi High-Technologies Corporation
    • Susumu Tauchi
    • D13 - Equipment for production, distribution, or transformation of energy
  • Information Patent Grant

    Lower chamber for a plasma processing apparatus
    • Patent number D802545
    • Issue date Nov 14, 2017
    • Hitachi High-Technologies Corporation
    • Susumu Tauchi
    • D13 - Equipment for production, distribution, or transformation of energy
  • Information Patent Grant

    Cover ring for a plasma processing apparatus
    • Patent number D802790
    • Issue date Nov 14, 2017
    • Hitachi High-Technologies Corporation
    • Susumu Tauchi
    • D24 - Medical and laboratory equipment
  • Information Patent Grant

    Electrode cover for a plasma processing apparatus
    • Patent number D770992
    • Issue date Nov 8, 2016
    • Hitachi High-Technologies Corporation
    • Susumu Tauchi
    • D13 - Equipment for production, distribution, or transformation of energy
  • Information Patent Grant

    Vacuum processing apparatus
    • Patent number 9,343,340
    • Issue date May 17, 2016
    • Hitachi High-Technologies Corporation
    • Keita Nogi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Vacuum processing apparatus and operating method of the same
    • Patent number 9,245,780
    • Issue date Jan 26, 2016
    • Hitachi High-Technologies Corporation
    • Takahiro Shimomura
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Vacuum processing apparatus and operating method of vacuum processi...
    • Patent number 9,011,065
    • Issue date Apr 21, 2015
    • Hitachi High-Technologies Corporation
    • Susumu Tauchi
    • Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
  • Information Patent Grant

    Vacuum processing apparatus and program
    • Patent number 8,849,446
    • Issue date Sep 30, 2014
    • Hitachi High-Technologies Corporation
    • Teruo Nakata
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Vacuum processing apparatus
    • Patent number 8,747,046
    • Issue date Jun 10, 2014
    • Hitachi High-Technologies Corporation
    • Ryoichi Isomura
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Vacuum processing apparatus
    • Patent number 8,740,011
    • Issue date Jun 3, 2014
    • Hitachi High-Technologies Corporation
    • Susumu Tauchi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Vacuum processing apparatus and program
    • Patent number 8,538,573
    • Issue date Sep 17, 2013
    • Hitachi High-Technologies Corporation
    • Teruo Nakata
    • G06 - COMPUTING CALCULATING COUNTING
  • Information Patent Grant

    Vacuum processing apparatus
    • Patent number 8,460,467
    • Issue date Jun 11, 2013
    • Hitachi High-Technologies Corporation
    • Akitaka Makino
    • Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
  • Information Patent Grant

    Vacuum processing apparatus
    • Patent number 8,286,822
    • Issue date Oct 16, 2012
    • Hitachi High-Technologies Corporation
    • Susumu Tauchi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Plasma treatment apparatus and plasma treatment method
    • Patent number 8,148,268
    • Issue date Apr 3, 2012
    • Hitachi High-Technologies Corporation
    • Kohei Sato
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Plasma processing apparatus
    • Patent number 8,075,733
    • Issue date Dec 13, 2011
    • Hitachi High-Technologies Corporation
    • Seiichi Watanabe
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Vacuum processing apparatus
    • Patent number 7,976,632
    • Issue date Jul 12, 2011
    • Hitachi High-Technologies Corporation
    • Akitaka Makino
    • Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
  • Information Patent Grant

    Vacuum processing apparatus
    • Patent number 7,833,382
    • Issue date Nov 16, 2010
    • Hitachi High-Technologies Corporation
    • Akitaka Makino
    • Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
  • Information Patent Grant

    Vacuum processing apparatus
    • Patent number 7,828,928
    • Issue date Nov 9, 2010
    • Hitachi High-Technologies Corporation
    • Akitaka Makino
    • Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
  • Information Patent Grant

    Plasma processing apparatus and plasma processing method
    • Patent number 7,807,581
    • Issue date Oct 5, 2010
    • Hitachi High-Technologies Corporation
    • Susumu Tauchi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Plasma processing apparatus
    • Patent number 7,674,351
    • Issue date Mar 9, 2010
    • Hitachi High-Technologies Corporation
    • Akitaka Makino
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Vacuum processing apparatus
    • Patent number 7,641,069
    • Issue date Jan 5, 2010
    • Hitachi High-Technologies Corporation
    • Susumu Tauchi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Plasma processing apparatus
    • Patent number 7,416,633
    • Issue date Aug 26, 2008
    • Hitachi High-Technologies Corporation
    • Akitaka Makino
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Vacuum processing apparatus
    • Patent number 7,335,277
    • Issue date Feb 26, 2008
    • Hitachi High-Technologies Corporation
    • Akitaka Makino
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Vacuum processing apparatus
    • Patent number 7,322,561
    • Issue date Jan 29, 2008
    • Hitachi High-Technologies Corporation
    • Susumu Tauchi
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
  • Information Patent Grant

    Cover ring for a plasma processing apparatus
    • Patent number D557425
    • Issue date Dec 11, 2007
    • Hitachi High-Technologies Corporation
    • Tsutomu Nakamura
    • D24 - Medical and laboratory equipment
  • Information Patent Grant

    Grounded electrode for a plasma processing apparatus
    • Patent number D556704
    • Issue date Dec 4, 2007
    • Hitachi High-Technologies Corporation
    • Tsutomu Nakamura
    • D13 - Equipment for production, distribution, or transformation of energy
  • Information Patent Grant

    Vacuum processing apparatus
    • Patent number 7,247,207
    • Issue date Jul 24, 2007
    • Hitachi High-Technologies Corporation
    • Akitaka Makino
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Vacuum processing apparatus and vacuum processing method
    • Patent number 7,194,821
    • Issue date Mar 27, 2007
    • Hitachi High-Technologies Corporation
    • Manabu Edamura
    • G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents

  • Information Patent Application

    VACUUM PROCESSING APPARATUS
    • Publication number 20220389575
    • Publication date Dec 8, 2022
    • HITACHI HIGH-TECH CORPORATION
    • Takashi Uemura
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PLASMA PROCESSING APPARATUS
    • Publication number 20160372305
    • Publication date Dec 22, 2016
    • Hitachi High-Technologies Corporation
    • Takashi UEMURA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    VACUUM PROCESSING APPARATUS
    • Publication number 20160217976
    • Publication date Jul 28, 2016
    • Hitachi High-Technologies Corporation
    • Takashi UEMURA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    VACUUM PROCESSING SYSTEM AND VACUUM PROCESSING METHOD OF SEMICONDUC...
    • Publication number 20150194327
    • Publication date Jul 9, 2015
    • Hitachi High-Technologies Corporation
    • Susumu TAUCHI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    VACUUM PROCESSING APPARATUS AND OPERATING METHOD OF THE SAME
    • Publication number 20140295672
    • Publication date Oct 2, 2014
    • Hitachi High-Technologies Corporation
    • Susumu Tauchi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    VACUUM PROCESSING APPARATUS
    • Publication number 20130183121
    • Publication date Jul 18, 2013
    • Hitachi High-Technologies Corporation
    • Ryoichi Isomura
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    VACUUM PROCESSING APPARATUS AND OPERATING METHOD OF THE SAME
    • Publication number 20130142595
    • Publication date Jun 6, 2013
    • Hitachi High-Technologies Corporation
    • Takahiro SHIMOMURA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    VACUUM PROCESSING APPARATUS
    • Publication number 20120163943
    • Publication date Jun 28, 2012
    • Hitachi High-Technologies Corporation
    • Ryoichi ISOMURA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    VACUUM PROCESSING APPARATUS
    • Publication number 20120091386
    • Publication date Apr 19, 2012
    • Susumu Tauchi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Vacuum processor
    • Publication number 20120027542
    • Publication date Feb 2, 2012
    • Ryoichi Isomura
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    VACUUM PROCESSING APPARATUS
    • Publication number 20110318143
    • Publication date Dec 29, 2011
    • Hitachi High-Technologies Corporation
    • Ryoichi ISOMURA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Vacuum Processing Apparatus
    • Publication number 20110259522
    • Publication date Oct 27, 2011
    • Akitaka Makino
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    VACUUM PROCESSING APPARATUS
    • Publication number 20110229289
    • Publication date Sep 22, 2011
    • Keita Nogi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    VACUUM PROCESSING APPARATUS AND PROGRAM
    • Publication number 20110217148
    • Publication date Sep 8, 2011
    • Teruo NAKATA
    • Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
  • Information Patent Application

    VACUUM PROCESSING APPARATUS AND PROGRAM
    • Publication number 20110218662
    • Publication date Sep 8, 2011
    • Teruo Nakata
    • G06 - COMPUTING CALCULATING COUNTING
  • Information Patent Application

    VACUUM PROCESSING SYSTEM AND VACUUM PROCESSING METHOD OF SEMICONDUC...
    • Publication number 20110110752
    • Publication date May 12, 2011
    • Hitachi High-Technologies Corporation
    • Susumu TAUCHI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    VACUUM PROCESSING SYSTEM AND VACUUM PROCESSING METHOD OF SEMICONDUC...
    • Publication number 20110110751
    • Publication date May 12, 2011
    • Susumu TAUCHI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    VACUUM PROCESSING APPARATUS
    • Publication number 20100171061
    • Publication date Jul 8, 2010
    • Susumu Tauchi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING APPARATUS
    • Publication number 20100043976
    • Publication date Feb 25, 2010
    • Hitachi High-Technologies Corporation
    • Seiichi WATANABE
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    VACUUM PROCESSING APPARATUS
    • Publication number 20090165952
    • Publication date Jul 2, 2009
    • Susumu Tauchi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA TREATMENT APPARATUS AND PLASMA TREATMENT METHOD
    • Publication number 20090152242
    • Publication date Jun 18, 2009
    • Kohei Sato
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Vacuum processing apparatus
    • Publication number 20090000739
    • Publication date Jan 1, 2009
    • Akitaka Makino
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Vacuum Processing Apparatus
    • Publication number 20080317581
    • Publication date Dec 25, 2008
    • Akitaka MAKINO
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
    • Publication number 20080217295
    • Publication date Sep 11, 2008
    • SUSUMU TAUCHI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Vacuum Processing Apparatus
    • Publication number 20080145193
    • Publication date Jun 19, 2008
    • Akitaka Makino
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Vacuum processing apparatus and vacuum processing method
    • Publication number 20060168844
    • Publication date Aug 3, 2006
    • Manabu Edamura
    • G05 - CONTROLLING REGULATING
  • Information Patent Application

    Vacuum processing apparatus
    • Publication number 20060057008
    • Publication date Mar 16, 2006
    • Susumu Tauchi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Plasma processing apparatus
    • Publication number 20060054278
    • Publication date Mar 16, 2006
    • Akitaka Makino
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Vacuum processing apparatus
    • Publication number 20060054854
    • Publication date Mar 16, 2006
    • Susumu Tauchi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Plasma processing apparatus
    • Publication number 20050194093
    • Publication date Sep 8, 2005
    • Akitaka Makino
    • H01 - BASIC ELECTRIC ELEMENTS