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Patents Grants
last 30 patents
Information
Patent Grant
Plasma processing apparatus
Patent number
10,665,436
Issue date
May 26, 2020
HITACHI HIGH-TECH CORPORATION
Takashi Uemura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Upper chamber for a plasma processing apparatus
Patent number
D812578
Issue date
Mar 13, 2018
Hitachi High-Technologies Corporation
Takashi Uemura
D13 - Equipment for production, distribution, or transformation of energy
Information
Patent Grant
Upper chamber for a plasma processing apparatus
Patent number
D804436
Issue date
Dec 5, 2017
Hitachi High-Technologies Corporation
Susumu Tauchi
D13 - Equipment for production, distribution, or transformation of energy
Information
Patent Grant
Lower chamber for a plasma processing apparatus
Patent number
D802545
Issue date
Nov 14, 2017
Hitachi High-Technologies Corporation
Susumu Tauchi
D13 - Equipment for production, distribution, or transformation of energy
Information
Patent Grant
Cover ring for a plasma processing apparatus
Patent number
D802790
Issue date
Nov 14, 2017
Hitachi High-Technologies Corporation
Susumu Tauchi
D24 - Medical and laboratory equipment
Information
Patent Grant
Electrode cover for a plasma processing apparatus
Patent number
D770992
Issue date
Nov 8, 2016
Hitachi High-Technologies Corporation
Susumu Tauchi
D13 - Equipment for production, distribution, or transformation of energy
Information
Patent Grant
Vacuum processing apparatus
Patent number
9,343,340
Issue date
May 17, 2016
Hitachi High-Technologies Corporation
Keita Nogi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Vacuum processing apparatus and operating method of the same
Patent number
9,245,780
Issue date
Jan 26, 2016
Hitachi High-Technologies Corporation
Takahiro Shimomura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Vacuum processing apparatus and operating method of vacuum processi...
Patent number
9,011,065
Issue date
Apr 21, 2015
Hitachi High-Technologies Corporation
Susumu Tauchi
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Vacuum processing apparatus and program
Patent number
8,849,446
Issue date
Sep 30, 2014
Hitachi High-Technologies Corporation
Teruo Nakata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Vacuum processing apparatus
Patent number
8,747,046
Issue date
Jun 10, 2014
Hitachi High-Technologies Corporation
Ryoichi Isomura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Vacuum processing apparatus
Patent number
8,740,011
Issue date
Jun 3, 2014
Hitachi High-Technologies Corporation
Susumu Tauchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Vacuum processing apparatus and program
Patent number
8,538,573
Issue date
Sep 17, 2013
Hitachi High-Technologies Corporation
Teruo Nakata
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Vacuum processing apparatus
Patent number
8,460,467
Issue date
Jun 11, 2013
Hitachi High-Technologies Corporation
Akitaka Makino
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Vacuum processing apparatus
Patent number
8,286,822
Issue date
Oct 16, 2012
Hitachi High-Technologies Corporation
Susumu Tauchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma treatment apparatus and plasma treatment method
Patent number
8,148,268
Issue date
Apr 3, 2012
Hitachi High-Technologies Corporation
Kohei Sato
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus
Patent number
8,075,733
Issue date
Dec 13, 2011
Hitachi High-Technologies Corporation
Seiichi Watanabe
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Vacuum processing apparatus
Patent number
7,976,632
Issue date
Jul 12, 2011
Hitachi High-Technologies Corporation
Akitaka Makino
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Vacuum processing apparatus
Patent number
7,833,382
Issue date
Nov 16, 2010
Hitachi High-Technologies Corporation
Akitaka Makino
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Vacuum processing apparatus
Patent number
7,828,928
Issue date
Nov 9, 2010
Hitachi High-Technologies Corporation
Akitaka Makino
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Plasma processing apparatus and plasma processing method
Patent number
7,807,581
Issue date
Oct 5, 2010
Hitachi High-Technologies Corporation
Susumu Tauchi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma processing apparatus
Patent number
7,674,351
Issue date
Mar 9, 2010
Hitachi High-Technologies Corporation
Akitaka Makino
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Vacuum processing apparatus
Patent number
7,641,069
Issue date
Jan 5, 2010
Hitachi High-Technologies Corporation
Susumu Tauchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus
Patent number
7,416,633
Issue date
Aug 26, 2008
Hitachi High-Technologies Corporation
Akitaka Makino
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Vacuum processing apparatus
Patent number
7,335,277
Issue date
Feb 26, 2008
Hitachi High-Technologies Corporation
Akitaka Makino
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Vacuum processing apparatus
Patent number
7,322,561
Issue date
Jan 29, 2008
Hitachi High-Technologies Corporation
Susumu Tauchi
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information
Patent Grant
Cover ring for a plasma processing apparatus
Patent number
D557425
Issue date
Dec 11, 2007
Hitachi High-Technologies Corporation
Tsutomu Nakamura
D24 - Medical and laboratory equipment
Information
Patent Grant
Grounded electrode for a plasma processing apparatus
Patent number
D556704
Issue date
Dec 4, 2007
Hitachi High-Technologies Corporation
Tsutomu Nakamura
D13 - Equipment for production, distribution, or transformation of energy
Information
Patent Grant
Vacuum processing apparatus
Patent number
7,247,207
Issue date
Jul 24, 2007
Hitachi High-Technologies Corporation
Akitaka Makino
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Vacuum processing apparatus and vacuum processing method
Patent number
7,194,821
Issue date
Mar 27, 2007
Hitachi High-Technologies Corporation
Manabu Edamura
G05 - CONTROLLING REGULATING
Patents Applications
last 30 patents
Information
Patent Application
VACUUM PROCESSING APPARATUS
Publication number
20220389575
Publication date
Dec 8, 2022
HITACHI HIGH-TECH CORPORATION
Takashi Uemura
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PLASMA PROCESSING APPARATUS
Publication number
20160372305
Publication date
Dec 22, 2016
Hitachi High-Technologies Corporation
Takashi UEMURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
VACUUM PROCESSING APPARATUS
Publication number
20160217976
Publication date
Jul 28, 2016
Hitachi High-Technologies Corporation
Takashi UEMURA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
VACUUM PROCESSING SYSTEM AND VACUUM PROCESSING METHOD OF SEMICONDUC...
Publication number
20150194327
Publication date
Jul 9, 2015
Hitachi High-Technologies Corporation
Susumu TAUCHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
VACUUM PROCESSING APPARATUS AND OPERATING METHOD OF THE SAME
Publication number
20140295672
Publication date
Oct 2, 2014
Hitachi High-Technologies Corporation
Susumu Tauchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
VACUUM PROCESSING APPARATUS
Publication number
20130183121
Publication date
Jul 18, 2013
Hitachi High-Technologies Corporation
Ryoichi Isomura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
VACUUM PROCESSING APPARATUS AND OPERATING METHOD OF THE SAME
Publication number
20130142595
Publication date
Jun 6, 2013
Hitachi High-Technologies Corporation
Takahiro SHIMOMURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
VACUUM PROCESSING APPARATUS
Publication number
20120163943
Publication date
Jun 28, 2012
Hitachi High-Technologies Corporation
Ryoichi ISOMURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
VACUUM PROCESSING APPARATUS
Publication number
20120091386
Publication date
Apr 19, 2012
Susumu Tauchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Vacuum processor
Publication number
20120027542
Publication date
Feb 2, 2012
Ryoichi Isomura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
VACUUM PROCESSING APPARATUS
Publication number
20110318143
Publication date
Dec 29, 2011
Hitachi High-Technologies Corporation
Ryoichi ISOMURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Vacuum Processing Apparatus
Publication number
20110259522
Publication date
Oct 27, 2011
Akitaka Makino
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
VACUUM PROCESSING APPARATUS
Publication number
20110229289
Publication date
Sep 22, 2011
Keita Nogi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
VACUUM PROCESSING APPARATUS AND PROGRAM
Publication number
20110217148
Publication date
Sep 8, 2011
Teruo NAKATA
Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information
Patent Application
VACUUM PROCESSING APPARATUS AND PROGRAM
Publication number
20110218662
Publication date
Sep 8, 2011
Teruo Nakata
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
VACUUM PROCESSING SYSTEM AND VACUUM PROCESSING METHOD OF SEMICONDUC...
Publication number
20110110752
Publication date
May 12, 2011
Hitachi High-Technologies Corporation
Susumu TAUCHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
VACUUM PROCESSING SYSTEM AND VACUUM PROCESSING METHOD OF SEMICONDUC...
Publication number
20110110751
Publication date
May 12, 2011
Susumu TAUCHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
VACUUM PROCESSING APPARATUS
Publication number
20100171061
Publication date
Jul 8, 2010
Susumu Tauchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS
Publication number
20100043976
Publication date
Feb 25, 2010
Hitachi High-Technologies Corporation
Seiichi WATANABE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
VACUUM PROCESSING APPARATUS
Publication number
20090165952
Publication date
Jul 2, 2009
Susumu Tauchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA TREATMENT APPARATUS AND PLASMA TREATMENT METHOD
Publication number
20090152242
Publication date
Jun 18, 2009
Kohei Sato
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Vacuum processing apparatus
Publication number
20090000739
Publication date
Jan 1, 2009
Akitaka Makino
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Vacuum Processing Apparatus
Publication number
20080317581
Publication date
Dec 25, 2008
Akitaka MAKINO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
Publication number
20080217295
Publication date
Sep 11, 2008
SUSUMU TAUCHI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Vacuum Processing Apparatus
Publication number
20080145193
Publication date
Jun 19, 2008
Akitaka Makino
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Vacuum processing apparatus and vacuum processing method
Publication number
20060168844
Publication date
Aug 3, 2006
Manabu Edamura
G05 - CONTROLLING REGULATING
Information
Patent Application
Vacuum processing apparatus
Publication number
20060057008
Publication date
Mar 16, 2006
Susumu Tauchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Plasma processing apparatus
Publication number
20060054278
Publication date
Mar 16, 2006
Akitaka Makino
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Vacuum processing apparatus
Publication number
20060054854
Publication date
Mar 16, 2006
Susumu Tauchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Plasma processing apparatus
Publication number
20050194093
Publication date
Sep 8, 2005
Akitaka Makino
H01 - BASIC ELECTRIC ELEMENTS