Sven Lindfors

Person

Espoo, FI

People

Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for depositing thin films on a surface
- Patent number RE48871
- Issue date Jan 4, 2022
- ASM IP Holding B.V.
- Pekka J. Soininen
Information Patent Grant
Deposition reactor with plasma source
- Patent number 10,494,718
- Issue date Dec 3, 2019
- Picosun Oy
- Vaino Kilpi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System and method for loading a substrate holder carrying a batch o...
- Patent number 10,041,169
- Issue date Aug 7, 2018
- Picosun Oy
- Sven Lindfors
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Atomic layer deposition apparatus and loading methods
- Patent number 10,011,904
- Issue date Jul 3, 2018
- Picosun Oy
- Sven Lindfors
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Atomic layer deposition with plasma source
- Patent number 9,868,131
- Issue date Jan 16, 2018
- Picosun Oy
- Vaino Kilpi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Atomic layer deposition with plasma source
- Patent number 9,095,869
- Issue date Aug 4, 2015
- Picosun Oy
- Vaino Kilpi
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Method of depositing material using a deposition reactor
- Patent number 8,753,716
- Issue date Jun 17, 2014
- Picosun Oy
- Pekka J. Soininen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and methods for deposition reactors
- Patent number 8,741,062
- Issue date Jun 3, 2014
- Picosun Oy
- Sven Lindfors
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for growing thin films
- Patent number 8,507,039
- Issue date Aug 13, 2013
- ASM America, Inc.
- Tuomo Suntola
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Atomic layer deposition apparatus and loading methods
- Patent number 8,282,334
- Issue date Oct 9, 2012
- Picosun Oy
- Sven Lindfors
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatuses and methods for deposition of material on surfaces
- Patent number 8,211,235
- Issue date Jul 3, 2012
- Picosun Oy
- Sven Lindfors
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for removing substances from gases
- Patent number 7,799,300
- Issue date Sep 21, 2010
- ASM International N.V
- Sven Lindfors
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Showerhead assembly and ALD methods
- Patent number 7,601,223
- Issue date Oct 13, 2009
- ASM International N.V
- Sven Lindfors
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for depositing thin films on a surface
- Patent number 7,537,662
- Issue date May 26, 2009
- ASM International N.V
- Pekka J. Soininen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for growing thin films
- Patent number 7,498,059
- Issue date Mar 3, 2009
- ASM America, Inc.
- Tuomo Suntola
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for growing thin films
- Patent number 7,404,984
- Issue date Jul 29, 2008
- ASM America, Inc.
- Tuomo Suntola
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus of growing a thin film onto a substrate
- Patent number 7,105,054
- Issue date Sep 12, 2006
- ASM International N.V
- Sven Lindfors
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus of growing a thin film
- Patent number 7,060,132
- Issue date Jun 13, 2006
- ASM International N.V
- Sven Lindfors
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of growing a thin film onto a substrate
- Patent number 7,037,372
- Issue date May 2, 2006
- ASM International N.V.
- Sven Lindfors
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of growing a thin film onto a substrate
- Patent number 7,018,478
- Issue date Mar 28, 2006
- ASM International N.V
- Sven Lindfors
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
ALD reactor and method with controlled wall temperature
- Patent number 6,939,579
- Issue date Sep 6, 2005
- ASM International N.V
- Niklas Bondestam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Source chemical container assembly
- Patent number 6,889,864
- Issue date May 10, 2005
- ASM International, N.V.
- Sven Lindfors
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of growing a thin film onto a substrate
- Patent number 6,881,263
- Issue date Apr 19, 2005
- ASM Microchemistry Oy
- Sven Lindfors
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of growing a thin film onto a substrate
- Patent number 6,783,590
- Issue date Aug 31, 2004
- ASM International N.V
- Sven Lindfors
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for growing thin films
- Patent number 6,572,705
- Issue date Jun 3, 2003
- ASM America, Inc.
- Tuomo Suntola
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process and apparatus for preparing heterogeneous catalysts
- Patent number 6,534,431
- Issue date Mar 18, 2003
- Fortum Oil and Gas Oy
- Tuomo Suntola
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Method for removing substances from gases
- Patent number 6,506,352
- Issue date Jan 14, 2003
- ASM Microchemistry Oy
- Sven Lindfors
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Method for growing thin films
- Patent number 6,015,590
- Issue date Jan 18, 2000
- Neste Oy
- Tuomo Suntola
- C30 - CRYSTAL GROWTH
Information Patent Grant
Method and equipment for growing thin films
- Patent number 5,711,811
- Issue date Jan 27, 1998
- Mikrokemia Oy
- Tuomo Suntola
- C30 - CRYSTAL GROWTH
Information Patent Grant
Electroluminescence structure
- Patent number 4,488,084
- Issue date Dec 11, 1984
- Oy LohJa AB
- Sven G. Lindfors
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
Methods and Apparatus for Deposition Reactors
- Publication number 20180305813
- Publication date Oct 25, 2018
- Picosun Oy
- Sven Lindfors
- C30 - CRYSTAL GROWTH
Information Patent Application
Atomic Layer Deposition with Plasma Source
- Publication number 20180099304
- Publication date Apr 12, 2018
- Picosun Oy
- Vaino Kilpi
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
PROTECTING AN INTERIOR OF A GAS CONTAINER WITH AN ALD COATING
- Publication number 20160369396
- Publication date Dec 22, 2016
- Picosun Oy
- Väino SAMMELSELG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Atomic Layer Deposition with Plasma Source
- Publication number 20150322569
- Publication date Nov 12, 2015
- Picosun Oy
- Vaino Kilpi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ATOMIC LAYER DEPOSITION METHOD AND APPARATUSES
- Publication number 20150307989
- Publication date Oct 29, 2015
- Picosun Oy
- Sven Lindfors
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COATING A SUBSTRATE WEB BY ATOMIC LAYER DEPOSITION
- Publication number 20150167165
- Publication date Jun 18, 2015
- Picosun Oy
- Sven Lindfors
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
POWDER PARTICLE COATING USING ATOMIC LAYER DEPOSITION CARTRIDGE
- Publication number 20150125599
- Publication date May 7, 2015
- Picocun Oy
- Sven Lindfors
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COATING A SUBSTRATE WEB BY ATOMIC LAYER DEPOSITION
- Publication number 20150107510
- Publication date Apr 23, 2015
- Picosun Oy
- Sven Lindfors
- C30 - CRYSTAL GROWTH
Information Patent Application
ATOMIC LAYER DEPOSITION REACTOR FOR PROCESSING A BATCH OF SUBSTRATE...
- Publication number 20140335267
- Publication date Nov 13, 2014
- Picosun Oy
- Sven Lindfors
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION REACTOR WITH PLASMA SOURCE
- Publication number 20140087093
- Publication date Mar 27, 2014
- Picosun Oy
- Vaino Kilpi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Atomic Layer Deposition with Plasma Source
- Publication number 20140024223
- Publication date Jan 23, 2014
- Picosun Oy
- Vaino Kilpi
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
APPARATUS AND METHODS FOR DEPOSITION REACTORS
- Publication number 20130240056
- Publication date Sep 19, 2013
- Picosun Oy
- Sven Lindfors
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus and Methods for Deposition Reactors
- Publication number 20130183444
- Publication date Jul 18, 2013
- Picosun Oy
- Pekka J. Soininen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Atomic Layer Deposition Apparatus And Loading Methods
- Publication number 20130029042
- Publication date Jan 31, 2013
- Picosun Oy
- Sven Lindfors
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Atomic layer deposition apparatus and loading methods
- Publication number 20100028122
- Publication date Feb 4, 2010
- Picosun Oy
- Sven Lindfors
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods and apparatus for deposition reactors
- Publication number 20090297710
- Publication date Dec 3, 2009
- Picosun Oy
- Sven Lindfors
- C30 - CRYSTAL GROWTH
Information Patent Application
Apparatus and methods for deposition reactors
- Publication number 20090263578
- Publication date Oct 22, 2009
- Picosun Oy
- Sven Lindfors
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR GROWING THIN FILMS
- Publication number 20090181169
- Publication date Jul 16, 2009
- ASM AMERICA, INC
- Tuomo Suntola
- C30 - CRYSTAL GROWTH
Information Patent Application
METHOD AND APPARATUS FOR REMOVING SUBSTANCES FROM GASES
- Publication number 20090074964
- Publication date Mar 19, 2009
- Sven Lindfors
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
METHOD FOR GROWING THIN FILMS
- Publication number 20080138518
- Publication date Jun 12, 2008
- Tuomo Suntola
- C30 - CRYSTAL GROWTH
Information Patent Application
Method of growing a thin film onto a substrate
- Publication number 20070054049
- Publication date Mar 8, 2007
- Sven Lindfors
- C30 - CRYSTAL GROWTH
Information Patent Application
Apparatuses and methods for deposition of material on surfaces
- Publication number 20060196418
- Publication date Sep 7, 2006
- Picosun Oy
- Sven Lindfors
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of growing a thin film onto a substrate
- Publication number 20050056211
- Publication date Mar 17, 2005
- Sven Lindfors
- C30 - CRYSTAL GROWTH
Information Patent Application
Method of growing a thin film onto a substrate
- Publication number 20040261706
- Publication date Dec 30, 2004
- Sven Lindfors
- C30 - CRYSTAL GROWTH
Information Patent Application
Method and apparatus for depositing thin films on a surface
- Publication number 20040216665
- Publication date Nov 4, 2004
- ASM International NV
- Pekka J. Soininen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Showerhead assembly and ALD methods
- Publication number 20040216668
- Publication date Nov 4, 2004
- Sven Lindfors
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and apparatus for the pulse-wise supply of a vaporized liqui...
- Publication number 20040079286
- Publication date Apr 29, 2004
- Sven Lindfors
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of growing a thin film onto a substrate
- Publication number 20030224107
- Publication date Dec 4, 2003
- Sven Lindfors
- C30 - CRYSTAL GROWTH
Information Patent Application
Method and apparatus of growing a thin film
- Publication number 20030121469
- Publication date Jul 3, 2003
- Sven Lindfors
- C30 - CRYSTAL GROWTH
Information Patent Application
Source chemical container assembly
- Publication number 20030075925
- Publication date Apr 24, 2003
- Sven Lindfors
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Sven Lindfors

Person

Patents Grantslast 30 patents

Method and apparatus for depositing thin films on a surface

Deposition reactor with plasma source

System and method for loading a substrate holder carrying a batch o...

Atomic layer deposition apparatus and loading methods

Atomic layer deposition with plasma source

Atomic layer deposition with plasma source

Method of depositing material using a deposition reactor

Apparatus and methods for deposition reactors

Method for growing thin films

Atomic layer deposition apparatus and loading methods

Apparatuses and methods for deposition of material on surfaces

Method and apparatus for removing substances from gases

Showerhead assembly and ALD methods

Method and apparatus for depositing thin films on a surface

Method for growing thin films

Method for growing thin films

Method and apparatus of growing a thin film onto a substrate

Method and apparatus of growing a thin film

Method of growing a thin film onto a substrate

Method of growing a thin film onto a substrate

ALD reactor and method with controlled wall temperature

Source chemical container assembly

Method of growing a thin film onto a substrate

Method of growing a thin film onto a substrate

Method and apparatus for growing thin films

Process and apparatus for preparing heterogeneous catalysts

Method for removing substances from gases

Method for growing thin films

Method and equipment for growing thin films

Electroluminescence structure

Patents Applicationslast 30 patents

Methods and Apparatus for Deposition Reactors

Atomic Layer Deposition with Plasma Source

PROTECTING AN INTERIOR OF A GAS CONTAINER WITH AN ALD COATING

Atomic Layer Deposition with Plasma Source

ATOMIC LAYER DEPOSITION METHOD AND APPARATUSES

COATING A SUBSTRATE WEB BY ATOMIC LAYER DEPOSITION

POWDER PARTICLE COATING USING ATOMIC LAYER DEPOSITION CARTRIDGE

COATING A SUBSTRATE WEB BY ATOMIC LAYER DEPOSITION

ATOMIC LAYER DEPOSITION REACTOR FOR PROCESSING A BATCH OF SUBSTRATE...

DEPOSITION REACTOR WITH PLASMA SOURCE

Atomic Layer Deposition with Plasma Source

APPARATUS AND METHODS FOR DEPOSITION REACTORS

Apparatus and Methods for Deposition Reactors

Atomic Layer Deposition Apparatus And Loading Methods

Atomic layer deposition apparatus and loading methods

Methods and apparatus for deposition reactors

Apparatus and methods for deposition reactors

METHOD FOR GROWING THIN FILMS

METHOD AND APPARATUS FOR REMOVING SUBSTANCES FROM GASES

METHOD FOR GROWING THIN FILMS

Method of growing a thin film onto a substrate

Apparatuses and methods for deposition of material on surfaces

Method of growing a thin film onto a substrate

Method of growing a thin film onto a substrate

Method and apparatus for depositing thin films on a surface

Showerhead assembly and ALD methods

Method and apparatus for the pulse-wise supply of a vaporized liqui...

Method of growing a thin film onto a substrate

Method and apparatus of growing a thin film

Source chemical container assembly