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Sylvia Marci Luque
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Orlando, FL, US
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last 30 patents
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Patent Grant
Removal of post etch residuals on wafer surface
Patent number
6,566,269
Issue date
May 20, 2003
Lucent Technologies Inc.
Peter J. Biles
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device having reduced line width variations between t...
Patent number
6,406,999
Issue date
Jun 18, 2002
Agere Systems Guardian Corp.
Thomas Craig Esry
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Process for improving line width variations between tightly spaced...
Patent number
6,395,639
Issue date
May 28, 2002
Agere Systems Guardian Corporation
Thomas Craig Esry
H01 - BASIC ELECTRIC ELEMENTS