Syuichi Takahashi

Person

Miyagi-gun, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Plasma processing apparatus and cleaning method
- Patent number 11,430,636
- Issue date Aug 30, 2022
- Tokyo Electron Limited
- Syuichi Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus and cleaning method
- Patent number 10,497,545
- Issue date Dec 3, 2019
- Tokyo Electron Limited
- Syuichi Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for repairing an electrostatic chuck device, a...
- Patent number 9,017,786
- Issue date Apr 28, 2015
- Tokyo Electron Limited
- Ken Yoshioka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for repairing an electrostatic chuck device, a...
- Patent number 8,252,132
- Issue date Aug 28, 2012
- Tokyo Electron Limited
- Ken Yoshioka
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Plasma processing apparatus
- Patent number 8,142,609
- Issue date Mar 27, 2012
- Tokyo Electron Limited
- Syuichi Takahashi
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Exhaust ring for manufacturing semiconductors
- Patent number D496008
- Issue date Sep 14, 2004
- Tokyo Electron Limited
- Syuichi Takahashi
- D13 - Equipment for production, distribution, or transformation of energy

Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING APPARATUS AND CLEANING METHOD
- Publication number 20200105505
- Publication date Apr 2, 2020
- TOKYO ELECTRON LIMITED
- Syuichi TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND CLEANING METHOD
- Publication number 20150357165
- Publication date Dec 10, 2015
- TOKYO ELECTRON LIMITED
- Syuichi TAKAHASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR REPAIRING AN ELECTROSTATIC CHUCK DEVICE, A...
- Publication number 20120300357
- Publication date Nov 29, 2012
- TOKYO ELECTRON LIMITED
- Ken Yoshioka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR REPAIRING AN ELECTROSTATIC CHUCK DEVICE, A...
- Publication number 20100177455
- Publication date Jul 15, 2010
- TOKYO ELECTRON LIMITED
- Ken Yoshioka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20080308230
- Publication date Dec 18, 2008
- TOKYO ELECTRON LIMITED
- Syuichi TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
- Publication number 20080242086
- Publication date Oct 2, 2008
- TOKYO ELECTRON LIMITED
- Hiroki MATSUMARU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma processing apparatus and mounting unit thereof
- Publication number 20050274324
- Publication date Dec 15, 2005
- TOKYO ELECTRON LIMITED
- Syuichi Takahashi
- H01 - BASIC ELECTRIC ELEMENTS

Syuichi Takahashi

Person

Patents Grantslast 30 patents

Plasma processing apparatus and cleaning method

Plasma processing apparatus and cleaning method

Method and apparatus for repairing an electrostatic chuck device, a...

Method and apparatus for repairing an electrostatic chuck device, a...

Plasma processing apparatus

Exhaust ring for manufacturing semiconductors

Patents Applicationslast 30 patents

PLASMA PROCESSING APPARATUS AND CLEANING METHOD

PLASMA PROCESSING APPARATUS AND CLEANING METHOD

METHOD AND APPARATUS FOR REPAIRING AN ELECTROSTATIC CHUCK DEVICE, A...

METHOD AND APPARATUS FOR REPAIRING AN ELECTROSTATIC CHUCK DEVICE, A...

PLASMA PROCESSING APPARATUS

PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS

Plasma processing apparatus and mounting unit thereof