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T. H. P. Chang
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Foster City, CA, US
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Patents Grants
last 30 patents
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Patent Grant
Integrated microcolumn and scanning probe microscope arrays
Patent number
6,369,385
Issue date
Apr 9, 2002
Applied Materials, Inc.
Lawrence P. Muray
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Precision alignment of microcolumn tip to a micron-size extractor a...
Patent number
6,297,584
Issue date
Oct 2, 2001
Etec Systems, Inc.
Ho-Seob Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Precision alignment of microcolumn tip to a micron-size extractor a...
Patent number
6,171,165
Issue date
Jan 9, 2001
Etec Systems, Inc.
Ho-Seob Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Silicon microlens cleaning system
Patent number
6,077,417
Issue date
Jun 20, 2000
Etec Systems, Inc.
Kim Y. Lee
B82 - NANO-TECHNOLOGY