Tadao Konishi

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Katsuta, JP

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Patents Grantslast 30 patents

Information Patent Grant
Charged particle beam exposure apparatus
- Patent number 5,424,550
- Issue date Jun 13, 1995
- Hitachi, Ltd.
- Masamichi Kawano
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Charged particle beam exposure apparatus
- Patent number 5,281,827
- Issue date Jan 25, 1994
- Hitachi, Ltd.
- Masamichi Kawano
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Electron beam lithographic method
- Patent number 5,206,517
- Issue date Apr 27, 1993
- Hitachi, Ltd.
- Yukinobu Shibata
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Scanning type electron microscope
- Patent number 4,221,965
- Issue date Sep 9, 1980
- Hitachi, Ltd.
- Tadao Konishi
- G01 - MEASURING TESTING