Tadashi KOTSUGI

Person

Minato-ku, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Etching apparatus
- Patent number 9,691,643
- Issue date Jun 27, 2017
- Tokyo Electron Limited
- Eiichi Nishimura
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Semiconductor device manufacturing method
- Patent number 9,245,764
- Issue date Jan 26, 2016
- Tokyo Electron Limited
- Eiichi Nishimura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etching method and etching apparatus
- Patent number 8,877,081
- Issue date Nov 4, 2014
- Tokyo Electron Limited
- Eiichi Nishimura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Static electricity deflecting device, electron beam irradiating app...
- Patent number 7,554,095
- Issue date Jun 30, 2009
- Tokyo Electron Limited
- Takashi Fuse
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Static electricity deflecting device, electron beam irradiating app...
- Patent number 7,550,739
- Issue date Jun 23, 2009
- Tokyo Electron Limited
- Takashi Fuse
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Static electricity deflecting device, electron beam irradiating app...
- Patent number 7,521,687
- Issue date Apr 21, 2009
- Tokyo Electron Limited
- Takashi Fuse
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SEMICONDUCTOR DEVICE MANUFACTURING METHOD
- Publication number 20150079790
- Publication date Mar 19, 2015
- TOKYO ELECTRON LIMITED
- Eiichi Nishimura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING APPARATUS
- Publication number 20150013908
- Publication date Jan 15, 2015
- TOKYO ELECTRON LIMITED
- Eiichi NISHIMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING METHOD AND ETCHING APPARATUS
- Publication number 20130196511
- Publication date Aug 1, 2013
- TOKYO ELECTRON LIMITED
- Eiichi NISHIMURA
- B82 - NANO-TECHNOLOGY
Information Patent Application
ELECTRON BEAM LITHOGRAPHY APPARATUS AND DESIGN METHOD OF PATTERNED...
- Publication number 20090008579
- Publication date Jan 8, 2009
- TOKYO ELECTRON LIMITED
- Koji TAKEYA
- B82 - NANO-TECHNOLOGY
Information Patent Application
STATIC ELECTRICITY DEFLECTING DEVICE, ELECTRON BEAM IRRADIATING APP...
- Publication number 20080067429
- Publication date Mar 20, 2008
- TOKYO ELECTRON LIMITED
- Takashi FUSE
- B82 - NANO-TECHNOLOGY
Information Patent Application
STATIC ELECTRICITY DEFLECTING DEVICE, ELECTRON BEAM IRRADIATING APP...
- Publication number 20080062608
- Publication date Mar 13, 2008
- TOKYO ELECTRON LIMITED
- Takashi FUSE
- B82 - NANO-TECHNOLOGY
Information Patent Application
STATIC ELECTRICITY DEFLECTING DEVICE, ELECTRON BEAM IRRADIATING APP...
- Publication number 20070228285
- Publication date Oct 4, 2007
- e-Beam Corporation
- Takashi FUSE
- B82 - NANO-TECHNOLOGY
Information Patent Application
STATIC ELECTRICITY DEFLECTING DEVICE, ELECTRON BEAM IRRADIATING APP...
- Publication number 20070228275
- Publication date Oct 4, 2007
- e-Beam Corporation
- Takashi FUSE
- B82 - NANO-TECHNOLOGY

Tadashi KOTSUGI

Person

Patents Grantslast 30 patents

Etching apparatus

Semiconductor device manufacturing method

Etching method and etching apparatus

Static electricity deflecting device, electron beam irradiating app...

Static electricity deflecting device, electron beam irradiating app...

Static electricity deflecting device, electron beam irradiating app...

Patents Applicationslast 30 patents

SEMICONDUCTOR DEVICE MANUFACTURING METHOD

ETCHING APPARATUS

ETCHING METHOD AND ETCHING APPARATUS

ELECTRON BEAM LITHOGRAPHY APPARATUS AND DESIGN METHOD OF PATTERNED...

STATIC ELECTRICITY DEFLECTING DEVICE, ELECTRON BEAM IRRADIATING APP...

STATIC ELECTRICITY DEFLECTING DEVICE, ELECTRON BEAM IRRADIATING APP...

STATIC ELECTRICITY DEFLECTING DEVICE, ELECTRON BEAM IRRADIATING APP...

STATIC ELECTRICITY DEFLECTING DEVICE, ELECTRON BEAM IRRADIATING APP...