Tae H. Chung

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San Diego, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for EUV light source target material handling
- Patent number 7,122,816
- Issue date Oct 17, 2006
- Cymer, Inc.
- J. Martin Algots
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND APPARATUS FOR EUV LIGHT SOURCE TARGET MATERIAL HANDLING
- Publication number 20060192155
- Publication date Aug 31, 2006
- J. Martin Algots
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR