TAI-HON PHILIP CHANG

Person

FOSTER CITY, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Tandem microchannel plate and solid state electron detector
- Patent number 6,717,146
- Issue date Apr 6, 2004
- Applied Materials, Inc.
- Tai-Hon Philip Chang
- G01 - MEASURING TESTING
Information Patent Grant
Suppression of emission noise for microcolumn applications in elect...
- Patent number 6,555,830
- Issue date Apr 29, 2003
- Applied Materials, Inc.
- Marian Mankos
- G01 - MEASURING TESTING
Information Patent Grant
High precision flexure stage
- Patent number 6,555,829
- Issue date Apr 29, 2003
- Applied Materials, Inc.
- James P. Spallas
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Multiple beam electron beam lithography system
- Patent number 6,429,443
- Issue date Aug 6, 2002
- Applied Materials, Inc.
- Marian Mankos
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Patterned heat conducting photocathode for electron beam source
- Patent number 6,376,984
- Issue date Apr 23, 2002
- Applied Materials, Inc.
- Andres Fernandez
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Gated photocathode for controlled single and multiple electron beam...
- Patent number 6,376,985
- Issue date Apr 23, 2002
- Applied Materials, Inc.
- Kim Y. Lee
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Electrostatic alignment of a charged particle beam
- Patent number 6,288,401
- Issue date Sep 11, 2001
- Etec Systems, Inc.
- Tai-Hon P Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Precision alignment and assembly of microlenses and microcolumns
- Patent number 6,281,508
- Issue date Aug 28, 2001
- Etec Systems, Inc.
- Kim Y. Lee
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method of forming gated photocathode for controlled single and mult...
- Patent number 6,220,914
- Issue date Apr 24, 2001
- Etec Systems, Inc.
- Kim Y. Lee
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Microcolumn assembly using laser spot welding
- Patent number 6,195,214
- Issue date Feb 27, 2001
- Etec Systems, Inc.
- Lawrence Peter Muray
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for direct writing of semiconductor die using...
- Patent number 6,145,438
- Issue date Nov 14, 2000
- C. Neil Berglund
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Detecting registration marks with low energy electron beam
- Patent number 6,127,738
- Issue date Oct 3, 2000
- Tai-Hon Philip Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
T-shaped electron-beam microcolumn as a general purpose scanning el...
- Patent number 6,023,060
- Issue date Feb 8, 2000
- Etec Systems, Inc.
- Tai-Hon P. Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Shaped shadow projection for an electron beam column
- Patent number 6,011,269
- Issue date Jan 4, 2000
- Etec Systems, Inc.
- Lee H. Veneklasen
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Detecting registration marks with a low energy electron beam
- Patent number 6,008,060
- Issue date Dec 28, 1999
- Etec Systems, Inc.
- Tai-Hon Philip Chang
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Tandem microchannel plate and solid state electron detector
- Publication number 20020175283
- Publication date Nov 28, 2002
- Etec Systems, Inc.
- Tai-Hon Philip Chang
- G01 - MEASURING TESTING
Information Patent Application
GATE PHOTOCATHODE FOR CONTROLLED SINGLE AND MULTIPLE ELECTRON BEAM...
- Publication number 20010038263
- Publication date Nov 8, 2001
- KIM Y. LEE
- B82 - NANO-TECHNOLOGY

TAI-HON PHILIP CHANG

Person

Patents Grantslast 30 patents

Tandem microchannel plate and solid state electron detector

Suppression of emission noise for microcolumn applications in elect...

High precision flexure stage

Multiple beam electron beam lithography system

Patterned heat conducting photocathode for electron beam source

Gated photocathode for controlled single and multiple electron beam...

Electrostatic alignment of a charged particle beam

Precision alignment and assembly of microlenses and microcolumns

Method of forming gated photocathode for controlled single and mult...

Microcolumn assembly using laser spot welding

Method and apparatus for direct writing of semiconductor die using...

Detecting registration marks with low energy electron beam

T-shaped electron-beam microcolumn as a general purpose scanning el...

Shaped shadow projection for an electron beam column

Detecting registration marks with a low energy electron beam

Patents Applicationslast 30 patents

Tandem microchannel plate and solid state electron detector

GATE PHOTOCATHODE FOR CONTROLLED SINGLE AND MULTIPLE ELECTRON BEAM...