Taide Tan

Person

Tigard, OR, US

People

Patents Grantslast 30 patents

Information Patent Grant
Integrated showerhead with thermal control for delivering radical a...
- Patent number 12,000,047
- Issue date Jun 4, 2024
- Lam Research Corporation
- Rachel E. Batzer
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Separation of plasma suppression and wafer edge to improve edge fil...
- Patent number 11,674,226
- Issue date Jun 13, 2023
- Lam Research Corporation
- Fayaz Shaikh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Integrated showerhead with thermal control for delivering radical a...
- Patent number 11,608,559
- Issue date Mar 21, 2023
- Lam Research Corporation
- Rachel Batzer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Integrated showerhead with thermal control for delivering radical a...
- Patent number 11,101,164
- Issue date Aug 24, 2021
- Lam Research Corporation
- Rachel Batzer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Temperature controlled spacer for use in a substrate processing cha...
- Patent number 11,004,662
- Issue date May 11, 2021
- Lam Research Corporation
- Taide Tan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Integrated showerhead with thermal control for delivering radical a...
- Patent number 10,604,841
- Issue date Mar 31, 2020
- Lam Research Corporation
- Rachel Batzer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
INTEGRATED SHOWERHEAD WITH THERMAL CONTROL FOR DELIVERING RADICAL A...
- Publication number 20240318312
- Publication date Sep 26, 2024
- LAM RESEARCH CORPORATION
- Rachel E. BATZER
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SEPARATION OF PLASMA SUPPRESSION AND WAFER EDGE TO IMPROVE EDGE FIL...
- Publication number 20230323535
- Publication date Oct 12, 2023
- LAM RESEARCH CORPORATION
- Fayaz A. Shaikh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INTEGRATED SHOWERHEAD WITH THERMAL CONTROL FOR DELIVERING RADICAL A...
- Publication number 20230175134
- Publication date Jun 8, 2023
- LAM RESEARCH CORPORATION
- Rachel E. BATZER
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
INTEGRATED SHOWERHEAD WITH THERMAL CONTROL FOR DELIVERING RADICAL A...
- Publication number 20210371982
- Publication date Dec 2, 2021
- LAM RESEARCH CORPORATION
- Rachel BATZER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Separation of Plasma Suppression and Wafer Edge to Improve Edge Fil...
- Publication number 20200190667
- Publication date Jun 18, 2020
- LAM RESEARCH CORPORATION
- Fayaz Shaikh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Temperature Controlled Spacer For Use In A Substrate Processing Cha...
- Publication number 20180233326
- Publication date Aug 16, 2018
- LAM RESEARCH CORPORATION
- Taide Tan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INTEGRATED SHOWERHEAD WITH THERMAL CONTROL FOR DELIVERING RADICAL A...
- Publication number 20180163305
- Publication date Jun 14, 2018
- LAM RESEARCH CORPORATION
- Rachel Batzer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Separation of Plasma Suppression and Wafer Edge to Improve Edge Fil...
- Publication number 20170002465
- Publication date Jan 5, 2017
- LAM RESEARCH CORPORATION
- Fayaz Shaikh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING SYSTEMS AND STRUCTURES HAVING SLOPED CONFINEMENT...
- Publication number 20160289827
- Publication date Oct 6, 2016
- LAM RESEARCH CORPORATION
- Edward Augustyniak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Person

Patents Grantslast 30 patents

Integrated showerhead with thermal control for delivering radical a...

Separation of plasma suppression and wafer edge to improve edge fil...

Integrated showerhead with thermal control for delivering radical a...

Integrated showerhead with thermal control for delivering radical a...

Temperature controlled spacer for use in a substrate processing cha...

Integrated showerhead with thermal control for delivering radical a...

Patents Applicationslast 30 patents

INTEGRATED SHOWERHEAD WITH THERMAL CONTROL FOR DELIVERING RADICAL A...

SEPARATION OF PLASMA SUPPRESSION AND WAFER EDGE TO IMPROVE EDGE FIL...

INTEGRATED SHOWERHEAD WITH THERMAL CONTROL FOR DELIVERING RADICAL A...

INTEGRATED SHOWERHEAD WITH THERMAL CONTROL FOR DELIVERING RADICAL A...

Separation of Plasma Suppression and Wafer Edge to Improve Edge Fil...

Temperature Controlled Spacer For Use In A Substrate Processing Cha...

INTEGRATED SHOWERHEAD WITH THERMAL CONTROL FOR DELIVERING RADICAL A...

Separation of Plasma Suppression and Wafer Edge to Improve Edge Fil...

PLASMA PROCESSING SYSTEMS AND STRUCTURES HAVING SLOPED CONFINEMENT...