Taiji Kiku

Person

Handa-City, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Position accuracy evaluation method and position accuracy evaluatio...
- Patent number 7,948,516
- Issue date May 24, 2011
- NGK Insulators, Ltd.
- Yutaka Unno
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Susceptor for semiconductor manufacturing apparatus
- Patent number 7,686,889
- Issue date Mar 30, 2010
- NGK Insulators, Ltd.
- Taiji Kiku
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing a substrate heating device
- Patent number 7,401,399
- Issue date Jul 22, 2008
- NGK Insulators, Ltd.
- Yutaka Unno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of blasting process
- Patent number 7,288,020
- Issue date Oct 30, 2007
- NGK Insulators, Ltd.
- Taiji Kiku
- B24 - GRINDING POLISHING
Information Patent Grant
Ceramic susceptor and a method of cleaning the same
- Patent number 7,261,780
- Issue date Aug 28, 2007
- NGK Insulators, Ltd.
- Taiji Kiku
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method for cleaning a ceramic member for use in a system for produc...
- Patent number 7,211,156
- Issue date May 1, 2007
- NGK Insulators, Ltd.
- Shinji Yamaguchi
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Method for cleaning a ceramic member for use in a system for produc...
- Patent number 6,855,576
- Issue date Feb 15, 2005
- NGK Insulators, Ltd.
- Shinji Yamaguchi
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...

Patents Applicationslast 30 patents

Information Patent Application
SUSCEPTOR FOR SEMICONDUCTOR MANUFACTURING APPARATUS
- Publication number 20080236479
- Publication date Oct 2, 2008
- NGK Insulators, Ltd.
- Taiji Kiku
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF BLASTING PROCESS
- Publication number 20070207708
- Publication date Sep 6, 2007
- NGK Insulators, Ltd.
- Taiji KIKU
- B24 - GRINDING POLISHING
Information Patent Application
Position accuracy evaluation method and position accuracy evaluatio...
- Publication number 20060207987
- Publication date Sep 21, 2006
- NGK Insulators, Ltd.
- Yutaka Unno
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Substrate heating device and manufacturing method for the same
- Publication number 20050210974
- Publication date Sep 29, 2005
- NGK Insulators, Ltd.
- Yutaka Unno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ceramic susceptor and a method of cleaning the same
- Publication number 20050211703
- Publication date Sep 29, 2005
- NGK Insulators, Ltd.
- Taiji Kiku
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Method for cleaning a creamic member for use in a system for produc...
- Publication number 20050133068
- Publication date Jun 23, 2005
- NGK Insulators, Ltd.
- Shinji Yamaguchi
- B08 - CLEANING
Information Patent Application
Method for cleaning a ceramic member for use in a system for produc...
- Publication number 20030080333
- Publication date May 1, 2003
- NGK Insulators, Ltd.
- Shinji Yamaguchi
- B08 - CLEANING

Person

Patents Grantslast 30 patents

Position accuracy evaluation method and position accuracy evaluatio...

Susceptor for semiconductor manufacturing apparatus

Method of manufacturing a substrate heating device

Method of blasting process

Ceramic susceptor and a method of cleaning the same

Method for cleaning a ceramic member for use in a system for produc...

Method for cleaning a ceramic member for use in a system for produc...

Patents Applicationslast 30 patents

SUSCEPTOR FOR SEMICONDUCTOR MANUFACTURING APPARATUS

METHOD OF BLASTING PROCESS

Position accuracy evaluation method and position accuracy evaluatio...

Substrate heating device and manufacturing method for the same

Ceramic susceptor and a method of cleaning the same

Method for cleaning a creamic member for use in a system for produc...

Method for cleaning a ceramic member for use in a system for produc...