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Takaaki Aoki
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Kyoto, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Substrate cleaning method, substrate cleaning device, and vacuum pr...
Patent number
9,881,815
Issue date
Jan 30, 2018
Tokyo Electron Limited
Jiro Matsuo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for smoothing a solid surface
Patent number
8,764,952
Issue date
Jul 1, 2014
Japan Aviation Electronics Industry Limited
Akinobu Sato
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Dry etching method and photonic crystal device fabricated by use of...
Patent number
7,563,379
Issue date
Jul 21, 2009
Japan Aviation Electronics Industry Limited
Akiko Suzuki
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
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Patent Application
SUBSTRATE CLEANING METHOD, SUBSTRATE CLEANING DEVICE, AND VACUUM PR...
Publication number
20150007858
Publication date
Jan 8, 2015
TOKYO ELECTRON LIMITED
Jiro Matsuo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SOLID SURFACE SMOOTHING METHOD
Publication number
20140299465
Publication date
Oct 9, 2014
Akinobu SATO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Solid surface smoothing apparatus
Publication number
20100096263
Publication date
Apr 22, 2010
Japan Aviation Electronics Industry Limited
Akinobu Sato
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method and device for flattening surface of solid
Publication number
20060278611
Publication date
Dec 14, 2006
Japan Aviation Electronics Industry Limited
Akinobu Sato
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Dry etching method and photonic crystal device fabricated by use of...
Publication number
20050155951
Publication date
Jul 21, 2005
Akiko Suzuki
B81 - MICRO-STRUCTURAL TECHNOLOGY