Takaaki Kawahara

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Semiconductor device and manufacturing method thereof
- Patent number 9,455,264
- Issue date Sep 27, 2016
- Renesas Electronics Corporation
- Tatsunori Kaneoka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and manufacturing method thereof
- Patent number 9,105,739
- Issue date Aug 11, 2015
- Renesas Electronics Corporation
- Tatsunori Kaneoka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Manufacturing method of semiconductor device
- Patent number 8,293,632
- Issue date Oct 23, 2012
- Renesas Electronics Corporation
- Masaru Kadoshima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and manufacturing method of the same
- Patent number 8,120,118
- Issue date Feb 21, 2012
- Renesas Electronics Corporation
- Shinsuke Sakashita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and manufacturing method of the same
- Patent number 7,855,134
- Issue date Dec 21, 2010
- Renesas Electronics Corporation
- Shinsuke Sakashita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chemical vapor deposition apparatus and a method of manufacturing a...
- Patent number 6,638,880
- Issue date Oct 28, 2003
- Mitsubishi Denki Kabushiki Kaisha
- Mikio Yamamuka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Liquid raw material vaporizer, semiconductor device and method of m...
- Patent number 6,512,885
- Issue date Jan 28, 2003
- Mitsubishi Denki Kabushiki Kaisha
- Mikio Yamamuka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vaporizer for chemical vapor deposition apparatus, chemical vapor d...
- Patent number 6,470,144
- Issue date Oct 22, 2002
- Mitsubishi Denki Kabushiki Kaisha
- Masayoshi Tarutani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming high dielectric constant thin film and method of...
- Patent number 6,448,191
- Issue date Sep 10, 2002
- Mitsubishi Denki Kabushiki Kaisha
- Takaaki Kawahara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chemical vapor deposition apparatus and a method of manufacturing a...
- Patent number 6,312,526
- Issue date Nov 6, 2001
- Mitsubishi Denki Kabushiki Kaisha
- Mikio Yamamuka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vaporizing device for CVD source materials and CVD apparatus employ...
- Patent number 6,273,957
- Issue date Aug 14, 2001
- Mitsubishi Denki Kabushiki Kaisha
- Mikio Yamamuka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming high dielectric constant thin film and method of...
- Patent number 6,235,649
- Issue date May 22, 2001
- Mitsubishi Denki Kabushiki Kaisha
- Takaaki Kawahara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
CVD apparatus for forming thin film having high dielectric constant
- Patent number 6,179,920
- Issue date Jan 30, 2001
- Mitsubishi Denki Kabushiki Kaisha
- Masayoshi Tarutani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High dielectric constant thin film structure, method for forming hi...
- Patent number 6,165,556
- Issue date Dec 26, 2000
- Mitsubishi Denki Kabushiki Kaisha
- Takaaki Kawahara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for monitoring CVD liquid source for forming t...
- Patent number 6,117,482
- Issue date Sep 12, 2000
- Mitsubishi Denki Kabushiki Kaisha
- Takaaki Kawahara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chemical vapor deposition apparatus
- Patent number 6,110,283
- Issue date Aug 29, 2000
- Mitsubishi Denki Kabushiki Kaisha
- Mikio Yamamuka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thin film forming apparatus using laser
- Patent number 6,110,291
- Issue date Aug 29, 2000
- Mitsubishi Denki Kabushiki Kaisha
- Kenyu Haruta
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High dielectric constant thin film structure, method for forming hi...
- Patent number 6,101,085
- Issue date Aug 8, 2000
- Mitsubishi Denki Kabushiki Kaisha
- Takaaki Kawahara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chemical vapor deposition apparatus
- Patent number 6,096,133
- Issue date Aug 1, 2000
- Mitsubishi Denki Kabushiki Kaisha
- Akimasa Yuuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for and method of forming thin film by chemical vapor dep...
- Patent number 6,033,732
- Issue date Mar 7, 2000
- Mitsushita Denki Kabushiki Kaisha
- Akimasa Yuuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of uniform CVD
- Patent number 6,022,811
- Issue date Feb 8, 2000
- Mitsubishi Denki Kabushiki Kaisha
- Akimasa Yuuki
- C30 - CRYSTAL GROWTH
Information Patent Grant
High dielectric constant thin film structure, method for forming hi...
- Patent number 5,989,635
- Issue date Nov 23, 1999
- Mitsubishi Denki Kabushiki Kaisha
- Takaaki Kawahara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High dielectric constant thin film structure, method for forming hi...
- Patent number 5,882,410
- Issue date Mar 16, 1999
- Mitsubishi Denki Kabushiki Kaisha
- Takaaki Kawahara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High dielectric constant thin film structure method for forming hig...
- Patent number 5,834,060
- Issue date Nov 10, 1998
- Mitsubishi Denki Kabushiki Kaisha
- Takaaki Kawahara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for forming thin film by chemical vapor deposition
- Patent number 5,776,254
- Issue date Jul 7, 1998
- Mitsubishi Denki Kabushiki Kaisha
- Akimasa Yuuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thin film forming apparatus using laser and magnetic field
- Patent number 5,760,366
- Issue date Jun 2, 1998
- Mitsubishi Denki Kabushiki Kaisha
- Kenyu Haruta
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
CVD method and apparatus therefor
- Patent number 5,669,976
- Issue date Sep 23, 1997
- Mitsubishi Denki Kabushiki Kaisha
- Akimasa Yuuki
- C30 - CRYSTAL GROWTH

Patents Applicationslast 30 patents

Information Patent Application
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
- Publication number 20150303205
- Publication date Oct 22, 2015
- RENESAS ELECTRONICS CORPORATION
- Tatsunori Kaneoka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
- Publication number 20130240977
- Publication date Sep 19, 2013
- RENESAS ELECTRONICS CORPORATION
- Tatsunori Kaneoka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
- Publication number 20120056268
- Publication date Mar 8, 2012
- Renesas Electronics Corporation
- Masaharu MIZUTANI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR MANUFACTURING A SEMICONDUCTOR DEVICE
- Publication number 20120045876
- Publication date Feb 23, 2012
- Renesas Electronics Corporation
- Takaaki KAWAHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
- Publication number 20110284971
- Publication date Nov 24, 2011
- Renesas Electronics Corporation
- Shinsuke SAKASHITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF THE SAME
- Publication number 20110057265
- Publication date Mar 10, 2011
- RENESAS ELECTRONICS CORPORATION
- Shinsuke SAKASHITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
- Publication number 20100320542
- Publication date Dec 23, 2010
- Renesas Electronics Corporation
- Takaaki Kawahara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
- Publication number 20100279496
- Publication date Nov 4, 2010
- RENESAS TECHNOLOGY CORP.
- Masaru KADOSHIMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF THE SAME
- Publication number 20090218634
- Publication date Sep 3, 2009
- RENESAS TECHNOLOGY CORP.
- Shinsuke Sakashita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE WHICH HAS MOS STRUCTURE AND METHOD OF MANUFACT...
- Publication number 20080121999
- Publication date May 29, 2008
- Renesas Technology Corp.
- Takaaki KAWAHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Chemical vapor deposition apparatus and a method of manufacturing a...
- Publication number 20020023588
- Publication date Feb 28, 2002
- Mitsubishi Denki Kabushiki Kaisha
- Mikio Yamamuka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Vaporizing device for CVD source materials and CVD apparatus employ...
- Publication number 20010039923
- Publication date Nov 15, 2001
- Mikio Yamamuka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of forming high dielectric constant thin film and method of...
- Publication number 20010029090
- Publication date Oct 11, 2001
- Mitsubishi Denki Kabushiki Kaisha
- Takaaki Kawahara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Takaaki Kawahara

Person

Patents Grantslast 30 patents

Semiconductor device and manufacturing method thereof

Semiconductor device and manufacturing method thereof

Manufacturing method of semiconductor device

Semiconductor device and manufacturing method of the same

Semiconductor device and manufacturing method of the same

Chemical vapor deposition apparatus and a method of manufacturing a...

Liquid raw material vaporizer, semiconductor device and method of m...

Vaporizer for chemical vapor deposition apparatus, chemical vapor d...

Method of forming high dielectric constant thin film and method of...

Chemical vapor deposition apparatus and a method of manufacturing a...

Vaporizing device for CVD source materials and CVD apparatus employ...

Method of forming high dielectric constant thin film and method of...

CVD apparatus for forming thin film having high dielectric constant

High dielectric constant thin film structure, method for forming hi...

Method and apparatus for monitoring CVD liquid source for forming t...

Chemical vapor deposition apparatus

Thin film forming apparatus using laser

High dielectric constant thin film structure, method for forming hi...

Chemical vapor deposition apparatus

Apparatus for and method of forming thin film by chemical vapor dep...

Method of uniform CVD

High dielectric constant thin film structure, method for forming hi...

High dielectric constant thin film structure, method for forming hi...

High dielectric constant thin film structure method for forming hig...

Apparatus for forming thin film by chemical vapor deposition

Thin film forming apparatus using laser and magnetic field

CVD method and apparatus therefor

Patents Applicationslast 30 patents

SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF

SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF

SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF

METHOD FOR MANUFACTURING A SEMICONDUCTOR DEVICE

SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF

SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF THE SAME

SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF

MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE

SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF THE SAME

SEMICONDUCTOR DEVICE WHICH HAS MOS STRUCTURE AND METHOD OF MANUFACT...

Chemical vapor deposition apparatus and a method of manufacturing a...

Vaporizing device for CVD source materials and CVD apparatus employ...

Method of forming high dielectric constant thin film and method of...