Takahiro MARUYAMA

Person

Ashiya, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Semiconductor device and method of manufacturing the same
- Patent number 12,009,425
- Issue date Jun 11, 2024
- Renesas Electronics Corporation
- Takahiro Maruyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Manufacturing method of semiconductor device
- Patent number 11,545,502
- Issue date Jan 3, 2023
- Renesas Electronics Corporation
- Takuya Maruyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 10,529,630
- Issue date Jan 7, 2020
- Renesas Electronics Corporation
- Takahiro Maruyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 10,304,925
- Issue date May 28, 2019
- Renesas Electronics Corporation
- Tatsunori Murata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device with separately formed...
- Patent number 9,947,679
- Issue date Apr 17, 2018
- Renesas Electronics Corporation
- Fukuo Owada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 9,536,776
- Issue date Jan 3, 2017
- Renesas Electronics Corporation
- Tatsunori Murata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 9,263,320
- Issue date Feb 16, 2016
- Renesas Electronics Corporation
- Tatsunori Murata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Manufacturing method of semiconductor device
- Patent number 8,951,860
- Issue date Feb 10, 2015
- Renesas Electronics Corporation
- Yasushi Ishii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device having gate in recess
- Patent number 8,754,471
- Issue date Jun 17, 2014
- Renesas Electronics Corporation
- Toshiaki Iwamatsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor integrated circuit device and manufacturing method th...
- Patent number 8,536,005
- Issue date Sep 17, 2013
- Renesas Electronics Corporation
- Takahiro Maruyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Manufacturing method of semiconductor device
- Patent number 7,989,283
- Issue date Aug 2, 2011
- Renesas Electronics Corporation
- Shinichi Yamanari
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device manufacturing method
- Patent number 7,537,987
- Issue date May 26, 2009
- Renesas Technology Corp.
- Masahiko Higashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device having trench element-...
- Patent number 6,825,118
- Issue date Nov 30, 2004
- Renesas Technology Corp.
- Takahiro Maruyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma reactor
- Patent number 6,656,849
- Issue date Dec 2, 2003
- Mitsubishi Denki Kabushiki Kaisha
- Satoshi Ogino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 6,651,678
- Issue date Nov 25, 2003
- Mitsubishi Denki Kabushiki Kaisha
- Kenji Shintani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma reactor and method
- Patent number 6,471,821
- Issue date Oct 29, 2002
- Mitsubishi Denki Kabushiki Kaisha
- Satoshi Ogino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and manufacturing method thereof
- Patent number 6,232,209
- Issue date May 15, 2001
- Mitsubishi Denki Kabushiki Kaisha
- Nobuo Fujiwara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for cleaning semiconductor devices
- Patent number 5,474,615
- Issue date Dec 12, 1995
- Mitsubishi Denki Kabushiki Kaisha
- Tomoaki Ishida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of plasma etching
- Patent number 5,435,886
- Issue date Jul 25, 1995
- Mitsubishi Denki Kabushiki Kaisha
- Nobuo Fujiwara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma treatment apparatus
- Patent number 5,399,830
- Issue date Mar 21, 1995
- Mitsubishi Denki Kabushiki Kaisha
- Takahiro Maruyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for cleaning a substrate with metastable helium
- Patent number 5,318,654
- Issue date Jun 7, 1994
- Mitsubishi Denki Kabushiki Kaisha
- Takahiro Maruyama
- B08 - CLEANING
Information Patent Grant
Plasma etching method with enhanced anisotropic property and appara...
- Patent number 5,223,085
- Issue date Jun 29, 1993
- Mitsubishi Denki Kabushiki Kaisha
- Kenji Kawai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of cleaning a surface
- Patent number 5,147,465
- Issue date Sep 15, 1992
- Mitsubishi Denki Kabushiki Kaisha
- Takahiro Maruyama
- B08 - CLEANING
Information Patent Grant
Plasma processing apparatus including an electromagnet with a bird...
- Patent number 5,038,013
- Issue date Aug 6, 1991
- Mitsubishi Denki Kabushiki Kaisha
- Moriaki Akazawa
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20240304680
- Publication date Sep 12, 2024
- RENESAS ELECTRONICS CORPORATION
- Takahiro MARUYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20240164112
- Publication date May 16, 2024
- RENESAS ELECTRONICS CORPORATION
- Ryo OGURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
- Publication number 20240079458
- Publication date Mar 7, 2024
- RENESAS ELECTRONICS CORPORATION
- Tomoki AYANO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
- Publication number 20230420556
- Publication date Dec 28, 2023
- RENESAS ELECTRONICS CORPORATION
- Yuya ABIKO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
- Publication number 20230146858
- Publication date May 11, 2023
- RENESAS ELECTRONICS CORPORATION
- Takahiro MARUYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
- Publication number 20220149206
- Publication date May 12, 2022
- RENESAS ELECTRONICS CORPORATION
- Takahiro MARUYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
- Publication number 20210118897
- Publication date Apr 22, 2021
- RENESAS ELECTRONICS CORPORATION
- Takuya MARUYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20190206744
- Publication date Jul 4, 2019
- RENESAS ELECTRONICS CORPORATION
- Takahiro MARUYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20170092718
- Publication date Mar 30, 2017
- RENESAS ELECTRONICS CORPORATION
- Tatsunori Murata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20160133507
- Publication date May 12, 2016
- RENESAS ELECTRONICS CORPORATION
- Tatsunori Murata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE
- Publication number 20160086961
- Publication date Mar 24, 2016
- Renesas Electronics Corporation
- Fukuo OWADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20150206787
- Publication date Jul 23, 2015
- Renesas Electronics Corporation
- Tatsunori Murata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
- Publication number 20130084684
- Publication date Apr 4, 2013
- Renesas Electronics Corporation
- Yasushi ISHII
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE AND MANUFACTURING METHOD TH...
- Publication number 20120049288
- Publication date Mar 1, 2012
- Renesas Electronics Corporation
- Takahiro MARUYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND A MANUFACTURING METHOD THEREOF
- Publication number 20110215423
- Publication date Sep 8, 2011
- Renesas Electronics Corporation
- Toshiaki IWAMATSU
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
- Publication number 20110081753
- Publication date Apr 7, 2011
- Renesas Electronics Corporation
- Shinichi YAMANARI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR MANUFACTURING SYSTEM AND METHOD
- Publication number 20090299512
- Publication date Dec 3, 2009
- Renesas Technology Corp.
- Junichi TANAKA
- G05 - CONTROLLING REGULATING
Information Patent Application
SEMICONDUCTOR DEVICE WHICH HAS MOS STRUCTURE AND METHOD OF MANUFACT...
- Publication number 20080308869
- Publication date Dec 18, 2008
- Renesas Technology Corp.
- Hidekazu Oda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE MANUFACTURING METHOD
- Publication number 20070099406
- Publication date May 3, 2007
- Renesas Technology Corp.
- Masahiko Higashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor device which has MOS structure and method of manufact...
- Publication number 20070007602
- Publication date Jan 11, 2007
- Renesas Technology Corp.
- Hidekazu Oda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE HAVING TRENCH ELEMENT-...
- Publication number 20040097046
- Publication date May 20, 2004
- Renesas Technology Coporation
- Takahiro Maruyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Manufacturing method of semiconductor device
- Publication number 20030096505
- Publication date May 22, 2003
- Mitsubishi Denki Kabushiki Kaisha
- Kenji Shintani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma reactor
- Publication number 20030000646
- Publication date Jan 2, 2003
- Mitsubishi Denki Kabushiki Kaisha
- Satoshi Ogino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA REACTOR
- Publication number 20020066537
- Publication date Jun 6, 2002
- SATOSHI OGINO
- H01 - BASIC ELECTRIC ELEMENTS

Takahiro MARUYAMA

Person

Patents Grantslast 30 patents

Semiconductor device and method of manufacturing the same

Manufacturing method of semiconductor device

Method of manufacturing semiconductor device

Method of manufacturing semiconductor device

Method of manufacturing semiconductor device with separately formed...

Method of manufacturing semiconductor device

Method of manufacturing semiconductor device

Manufacturing method of semiconductor device

Semiconductor device having gate in recess

Semiconductor integrated circuit device and manufacturing method th...

Manufacturing method of semiconductor device

Semiconductor device manufacturing method

Method of manufacturing semiconductor device having trench element-...

Plasma reactor

Method of manufacturing semiconductor device

Plasma reactor and method

Semiconductor device and manufacturing method thereof

Method for cleaning semiconductor devices

Method of plasma etching

Plasma treatment apparatus

Apparatus for cleaning a substrate with metastable helium

Plasma etching method with enhanced anisotropic property and appara...

Method of cleaning a surface

Plasma processing apparatus including an electromagnet with a bird...

Patents Applicationslast 30 patents

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME

SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME

MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE

SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME

MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE

SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE AND MANUFACTURING METHOD TH...

SEMICONDUCTOR DEVICE AND A MANUFACTURING METHOD THEREOF

MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE

SEMICONDUCTOR MANUFACTURING SYSTEM AND METHOD

SEMICONDUCTOR DEVICE WHICH HAS MOS STRUCTURE AND METHOD OF MANUFACT...

SEMICONDUCTOR DEVICE MANUFACTURING METHOD

Semiconductor device which has MOS structure and method of manufact...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE HAVING TRENCH ELEMENT-...

Manufacturing method of semiconductor device

Plasma reactor

PLASMA REACTOR