Takahiro SHIMANO

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for monitoring a polishing surface of a polish...
- Patent number 9,943,943
- Issue date Apr 17, 2018
- Ebara Corporation
- Hiroyuki Shinozaki
- B24 - GRINDING POLISHING
Information Patent Grant
Method and apparatus for conditioning a polishing pad
- Patent number 9,533,395
- Issue date Jan 3, 2017
- Ebara Corporation
- Mutsumi Tanikawa
- B24 - GRINDING POLISHING
Information Patent Grant
Method and apparatus for conditioning a polishing pad
- Patent number 9,469,013
- Issue date Oct 18, 2016
- Ebara Corporation
- Mutsumi Tanikawa
- B24 - GRINDING POLISHING
Information Patent Grant
Method and apparatus for monitoring a polishing surface of a polish...
- Patent number 9,302,366
- Issue date Apr 5, 2016
- Ebara Corporation
- Hiroyuki Shinozaki
- B24 - GRINDING POLISHING
Information Patent Grant
Method and apparatus for monitoring a polishing surface of a polish...
- Patent number 9,156,122
- Issue date Oct 13, 2015
- Ebara Corporation
- Hiroyuki Shinozaki
- B24 - GRINDING POLISHING
Information Patent Grant
Method of adjusting profile of a polishing member used in a polishi...
- Patent number 9,156,130
- Issue date Oct 13, 2015
- Ebara Corporation
- Takahiro Shimano
- B24 - GRINDING POLISHING
Information Patent Grant
Method of obtaining a sliding distance distribution of a dresser on...
- Patent number 9,108,292
- Issue date Aug 18, 2015
- Ebara Corporation
- Takahiro Shimano
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND APPARATUS FOR MONITORING A POLISHING SURFACE OF A POLISH...
- Publication number 20160207162
- Publication date Jul 21, 2016
- EBARA CORPORATION
- Hiroyuki SHINOZAKI
- B24 - GRINDING POLISHING
Information Patent Application
METHOD AND APPARATUS FOR CONDITIONING A POLISHING PAD
- Publication number 20160158911
- Publication date Jun 9, 2016
- EBARA CORPORATION
- Mutsumi TANIKAWA
- B24 - GRINDING POLISHING
Information Patent Application
METHOD AND APPARATUS FOR MONITORING A POLISHING SURFACE OF A POLISH...
- Publication number 20150314416
- Publication date Nov 5, 2015
- EBARA CORPORATION
- Hiroyuki SHINOZAKI
- B24 - GRINDING POLISHING
Information Patent Application
METHOD OF OBTAINING A SLIDING DISTANCE DISTRIBUTION OF A DRESSER ON...
- Publication number 20140342642
- Publication date Nov 20, 2014
- Takahiro SHIMANO
- B24 - GRINDING POLISHING
Information Patent Application
METHOD OF ADJUSTING PROFILE OF A POLISHING MEMBER USED IN A POLISHI...
- Publication number 20140287653
- Publication date Sep 25, 2014
- Takahiro SHIMANO
- B24 - GRINDING POLISHING
Information Patent Application
METHOD AND APPARATUS FOR CONDITIONING A POLISHING PAD
- Publication number 20120315829
- Publication date Dec 13, 2012
- Mutsumi TANIKAWA
- B24 - GRINDING POLISHING
Information Patent Application
METHOD AND APPARATUS FOR MONITORING A POLISHING SURFACE OF A POLISH...
- Publication number 20120309267
- Publication date Dec 6, 2012
- Hiroyuki SHINOZAKI
- B24 - GRINDING POLISHING

Takahiro SHIMANO

Person

Patents Grantslast 30 patents

Method and apparatus for monitoring a polishing surface of a polish...

Method and apparatus for conditioning a polishing pad

Method and apparatus for conditioning a polishing pad

Method and apparatus for monitoring a polishing surface of a polish...

Method and apparatus for monitoring a polishing surface of a polish...

Method of adjusting profile of a polishing member used in a polishi...

Method of obtaining a sliding distance distribution of a dresser on...

Patents Applicationslast 30 patents

METHOD AND APPARATUS FOR MONITORING A POLISHING SURFACE OF A POLISH...

METHOD AND APPARATUS FOR CONDITIONING A POLISHING PAD

METHOD AND APPARATUS FOR MONITORING A POLISHING SURFACE OF A POLISH...

METHOD OF OBTAINING A SLIDING DISTANCE DISTRIBUTION OF A DRESSER ON...

METHOD OF ADJUSTING PROFILE OF A POLISHING MEMBER USED IN A POLISHI...

METHOD AND APPARATUS FOR CONDITIONING A POLISHING PAD

METHOD AND APPARATUS FOR MONITORING A POLISHING SURFACE OF A POLISH...