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Takahiro Shirahata

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Patents Grantslast 30 patents

  • Information Patent Grant

    Film forming device including a detachable bottom plate for forming...
    • Patent number 11,124,877
    • Issue date Sep 21, 2021
    • Toshiba Mitsubishi-Electric Industrial Systems Corporation
    • Takahiro Shirahata
    • B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
  • Information Patent Grant

    Buffer layer film-forming method and buffer layer
    • Patent number 11,075,318
    • Issue date Jul 27, 2021
    • Toshiba Mitsubishi-Electric Industrial Systems Corporation
    • Takahiro Shirahata
    • Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
  • Information Patent Grant

    Film forming device
    • Patent number 10,544,509
    • Issue date Jan 28, 2020
    • Toshiba Mitsubishi-Electric Industrial Systems Corporation
    • Takahiro Shirahata
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Atomizing apparatus
    • Patent number 10,456,802
    • Issue date Oct 29, 2019
    • TOSHIBA MITSUBIHSHI-ELECTRIC INDUSTRIAL SYSTEMS CORPORATION
    • Hiroyuki Orita
    • B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
  • Information Patent Grant

    Film-forming apparatus to form a film on a substrate
    • Patent number 10,458,017
    • Issue date Oct 29, 2019
    • TOSHIBA MITSUBISHI-ELECTRIC INDUSTRIAL SYSTEMS CORPORATION
    • Takahiro Shirahata
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Method for producing metal oxide film and metal oxide film
    • Patent number 10,351,957
    • Issue date Jul 16, 2019
    • Toshiba Mitsubishi-Electric Industrial Systems Corporation
    • Takahiro Shirahata
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Film formation device
    • Patent number 10,121,931
    • Issue date Nov 6, 2018
    • Toshiba Mitsubishi-Electric Industrial Systems Corporation
    • Hiroyuki Orita
    • B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
  • Information Patent Grant

    Film forming apparatus
    • Patent number 10,118,191
    • Issue date Nov 6, 2018
    • TOSHIBA MITSUBISHI-ELECTRIC INDUSTRIAL SYSTEMS CORPORATION
    • Takahiro Shirahata
    • B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
  • Information Patent Grant

    Oxide film deposition method and oxide film deposition device
    • Patent number 10,016,785
    • Issue date Jul 10, 2018
    • Toshiba Mitsubishi-Electric Industrial Systems Corporation
    • Hiroyuki Orita
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Solar cell manufacturing method
    • Patent number 9,954,135
    • Issue date Apr 24, 2018
    • TOSHIBA MITSUBISHI-ELECTRIC INDUSTRIAL SYSTEMS CORPORATION
    • Takahiro Hiramatsu
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Method of forming zinc oxide film (ZnO) or magnesium zinc oxide fil...
    • Patent number 9,598,768
    • Issue date Mar 21, 2017
    • Toshiba Mitsubishi-Electric Industrial Systems Corporation
    • Takahiro Shirahata
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Method for forming metal oxide film, metal oxide film and apparatus...
    • Patent number 9,574,271
    • Issue date Feb 21, 2017
    • Toshiba Mitsubishi-Electric Industrial Systems Corporation
    • Hiroyuki Orita
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Apparatus for forming metal oxide film, method for forming metal ox...
    • Patent number 9,279,182
    • Issue date Mar 8, 2016
    • Toshiba Mitsubishi-Electric Industrial Systems Corporation
    • Takahiro Shirahata
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Method for forming metal oxide film, metal oxide film, and apparatu...
    • Patent number 9,103,028
    • Issue date Aug 11, 2015
    • Toshiba Mitsubishi-Electric Industrial Systems Corporation
    • Hiroyuki Orita
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

  • Information Patent Application

    FILM FORMING DEVICE
    • Publication number 20180347050
    • Publication date Dec 6, 2018
    • TOSHIBA MITSUBISHI-ELECTRIC INDUSTRIAL SYSTEM CORPORATION
    • Takahiro SHIRAHATA
    • B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
  • Information Patent Application

    FILM FORMING DEVICE
    • Publication number 20180264498
    • Publication date Sep 20, 2018
    • TOSHIBA MITSUBISHI-ELECTRIC INDUSTRIAL SYSTEMS CORPORATION
    • Takahiro SHIRAHATA
    • B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
  • Information Patent Application

    FILM FORMING APPARATUS
    • Publication number 20170274410
    • Publication date Sep 28, 2017
    • TOSHIBA MITSUBISHI-ELECTRIC INDUSTRIAL SYSTEMS CORPORATION
    • Takahiro SHIRAHATA
    • B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
  • Information Patent Application

    BUFFER LAYER FILM-FORMING METHOD AND BUFFER LAYER
    • Publication number 20170047472
    • Publication date Feb 16, 2017
    • TOSHIBA MITSUBISHI-ELECTRIC INDUSTRIAL SYSTEMS CORPORATION
    • Takahiro SHIRAHATA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SOLAR CELL MANUFACTURING METHOD
    • Publication number 20160204301
    • Publication date Jul 14, 2016
    • TOSHIBA MITSUBISHI-ELECTRIC INDUSTRIAL SYSTEMS CORPORATION
    • Takahiro HIRAMATSU
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ATOMIZING APPARATUS
    • Publication number 20160158788
    • Publication date Jun 9, 2016
    • TOSHIBA MITSUBISHI-ELECTRIC INDUSTRIAL SYSTEMS CORPORATION
    • Hiroyuki ORITA
    • B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
  • Information Patent Application

    FILM FORMATION METHOD
    • Publication number 20160047037
    • Publication date Feb 18, 2016
    • TOSHIBA MITSUBISHI-ELECTRIC INDUSTRIAL SYSTEMS CORPORATION
    • Takahiro HIRAMATSU
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    APPARATUS FOR FORMING METAL OXIDE FILM, METHOD FOR FORMING METAL OX...
    • Publication number 20160047049
    • Publication date Feb 18, 2016
    • TOSHIBA MITSUBISHI-ELECTRIC INDUSTRIAL SYSTEMS CORPORATION
    • Takahiro Shirahata
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM-FORMING APPARATUS
    • Publication number 20150299854
    • Publication date Oct 22, 2015
    • TOSHIBA MITSUBISHI-ELECTRIC INDUSTRIAL SYSTEMS CORPORATION
    • Takahiro Shirahata
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD FOR PRODUCING METAL OXIDE FILM AND METAL OXIDE FILM
    • Publication number 20150076422
    • Publication date Mar 19, 2015
    • TOSHIBA MITSUBISHI-ELECTRIC INDUSTRIAL SYSTEMS CORPORATION
    • Takahiro Shirahata
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD FOR PRODUCING METAL OXIDE FILM AND METAL OXIDE FILM
    • Publication number 20150034885
    • Publication date Feb 5, 2015
    • TOSHIBA MITSUBISHI-ELECTRIC INDUSTRIAL SYSTEMS CORPORATION
    • Takahiro Shirahata
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD FOR PRODUCING METAL OXIDE FILM AND METAL OXIDE FILM
    • Publication number 20150010464
    • Publication date Jan 8, 2015
    • TOSHIBA MITSUBISHI-ELECTRIC INDUSTRIAL SYSTEMS CORPORATION
    • Takahiro Shirahata
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    OXIDE FILM DEPOSITION METHOD AND OXIDE FILM DEPOSITION DEVICE
    • Publication number 20140141170
    • Publication date May 22, 2014
    • TOSHIBA MITSUBISHI-ELECTRIC INDUSTRIAL SYSTEMS CORPORATION
    • Hiroyuki Orita
    • B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
  • Information Patent Application

    FILM FORMATION DEVICE
    • Publication number 20130247820
    • Publication date Sep 26, 2013
    • TOSHIBA MITSUBISHI-ELECTRIC INDUSTRIAL.SYS. CORP.
    • Hiroyuki Orita
    • B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
  • Information Patent Application

    APPARATUS FOR FORMING METAL OXIDE FILM, METHOD FOR FORMING METAL OX...
    • Publication number 20130039843
    • Publication date Feb 14, 2013
    • KYOTO UNIVERSITY
    • Takahiro Shirahata
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD FOR FORMING METAL OXIDE FILM, METAL OXIDE FILM AND APPARATUS...
    • Publication number 20120112187
    • Publication date May 10, 2012
    • KYOTO UNIVERSITY
    • Hiroyuki Orita
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD FOR FORMING METAL OXIDE FILM, METAL OXIDE FILM, AND APPARATU...
    • Publication number 20120040083
    • Publication date Feb 16, 2012
    • KYOTO UNIVERSITY
    • Hiroyuki Orita
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD OF FORMING METAL OXIDE FILM AND APPARATUS FOR FORMING METAL...
    • Publication number 20110151619
    • Publication date Jun 23, 2011
    • TOSHIBA MITSUBISHI-ELECTRIC INDUSTRIAL.SYS. CORP.
    • Hiroyuki Orita
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD OF FORMING ZINC OXIDE FILM (ZNO) OR MAGNESIUM ZINC OXIDE FIL...
    • Publication number 20110143053
    • Publication date Jun 16, 2011
    • TOSHIBA MITSUBISHI-ELECTRIC INDUS. SYS. CORP.
    • Takahiro Shirahata
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...