Takahiro Yamamoto

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Nirasaki City, JP

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Patents Grantslast 30 patents

Information Patent Grant
Gas mixture supplying method and apparatus
- Patent number 8,770,214
- Issue date Jul 8, 2014
- Tokyo Electron Limited
- Yohei Uchida
- G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents

Information Patent Application
GAS MIXTURE SUPPLYING METHOD AND APPARATUS
- Publication number 20100154908
- Publication date Jun 24, 2010
- TOKYO ELECTRON LIMITED
- Yohei UCHIDA
- G05 - CONTROLLING REGULATING